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61. 发明公开

EP2211594A3 Extreme ultraviolet light source device 有权
标题翻译：极端紫外线光源装置
公开(公告)号：EP2211594A3
公开(公告)日：2011-02-02
申请号：EP10000408.4
申请日：2010-01-18
申请人： Ushiodenki Kabushiki Kaisha
发明人： Yokohama, Takuma
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (11, 12) arranged oppositely to each other, a pulsed power supply means (8) supplying pulsed power to said discharge electrodes (11, 12), a raw material supply means (11b, 12b) supplying a liquid or solid raw material for the emission of extreme ultraviolet radiation to said discharge electrodes (11, 12) and onto these electrodes (11, 12), and an energy beam radiating means (23a) radiating a focused energy beam (23) towards said raw material (11a) having been supplied onto said discharge electrodes (11, 12) to gasify said raw material (11a) and to start a discharge between said pair of electrodes (11, 12).The surface of said raw material (11a) is arranged at a position shifted from the focal point (P) of the energy beam (23) towards the irradiation entrance side of the energy beam (23).

62. 发明授权

EP1791992B1 ROTATING BOBBIN HOLDER 有权
标题翻译：旋转卷轴固持
公开(公告)号：EP1791992B1
公开(公告)日：2010-11-03
申请号：EP05796479.3
申请日：2005-09-02
申请人： Titan Paints & Chemicals Limited
发明人： RAVI, Sam
IPC分类号： D01H1/18
CPC分类号： D01H1/183
摘要： A rotating bobbin holder comprising a stud member (25) with a head (25a), a body (25c) of variable length and with a substantially non-circular cross section, said body (25c) further extended as a threaded profile (25d), said stud member (25) disposed to pass through a smaller opening of the expanded barrel (11), a brake shoe (17) permitted to pass through said stud member and disposed on the outer-upper surface of the barrel (11) to provide a variable a brake force by means of a brake tensioner (19), said tensioner (19) connected to the brake shoe (17) on one side and the other side of the tensioner (19) is abutted by a tensioner support member (20) , a skirt member (18) is permitted to pass through the stud member and disposed on the upper extended barrel (11), a relative surface profile on top inner surface of the skirt member (18) corresponding to the outer profile of the tensioner support member (20) to provide a non-rotatable functional support to the skirt member (18), and at least a spacer member (26) disposed on the body of the stud member to compress and decompress said tensioner (19) and to generate variable braking force on said bobbin hanging tube.

63. 发明授权

EP2154729B1 Solarmodulanordnung und Dachanordnung 失效转让
标题翻译：太阳能电池阵列和屋顶组件
公开(公告)号：EP2154729B1
公开(公告)日：2010-10-27
申请号：EP08162384.5
申请日：2008-08-14
申请人： Dudas, Mirko
发明人： Dudas, Mirko
IPC分类号： H01L31/042
CPC分类号： H02S20/30 , F24S30/455 , F24S40/44 , F24S50/00 , F24S50/20 , F24S2030/16 , H02S20/10 , H02S40/10 , H02S40/22 , H02S40/425 , Y02B10/12 , Y02B10/20 , Y02E10/47 , Y02E10/52

64. 发明授权

EP1865527B1 Discharge lamp and metal foil for a discharge lamp 有权
标题翻译：放电灯和金属箔的放电灯
公开(公告)号：EP1865527B1
公开(公告)日：2010-10-27
申请号：EP07010888.1
申请日：2007-06-01
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Kumada, Toyohiko
IPC分类号： H01J5/46 , H01J5/38 , H01J61/36 , H01J9/32
CPC分类号： H01J61/368 , H01J5/38 , H01J5/46 , H01J9/326 , H01J61/36 , H01J61/822

65. 发明公开

EP1848004A3 Extreme UV radiation focusing mirror and extreme UV radiation source device 有权
标题翻译：聚焦镜的EUV辐射和EUV辐射源
公开(公告)号：EP1848004A3
公开(公告)日：2010-09-01
申请号：EP07007808.4
申请日：2007-04-17
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Kabuki, Kiyoyuki , Sato, Hiroto
IPC分类号： G21K1/06 , G03F7/20
CPC分类号： G21K1/06 , B82Y10/00 , G03F7/70166 , G21K2201/067
摘要： In an EUV focusing mirror in which there are several thin concave nested high precision mirrors (a,b,c,d,e) in the form of an ellipsoid of revolution, a paraboloid of revolution, a Wolter type or the like, the sides which do not constitute the reflection surfaces are made in the shape of a knife edge at the radiation incident ends of the respective mirrors in order not to be shielded by the thickness of the radiation incidence sides of the respective mirrors. Likewise, the radiation exit ends of the respective mirrors are made in the form of a knife edge. This yields an advantageous far-field distribution use of the mirrors for an EUV radiation source device and the degree of reduction of the light intensity can be made smaller than in the conventional case.

66. 发明公开

EP2209133A2 High pressure mercury lamp 审中-公开
标题翻译： Hochdruck-Quecksilberlampe
公开(公告)号：EP2209133A2
公开(公告)日：2010-07-21
申请号：EP10000237.7
申请日：2010-01-12
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： Fujina, Kyosuke , Iguchi, Takehiko , Morimoto, Akihisa
IPC分类号： H01J61/073 , H01J61/86
CPC分类号： H01J61/0732 , H01J61/20 , H01J61/86
摘要： To devise a UV light source which has an increased UV irradiance in the short wavelength range, prevents blackening of the light emission tube and a decrease of the irradiance and has a long durability, a high pressure mercury lamp (1) of the direct current type is provided, comprising a light emission tube (10), a cathode (13) and an anode (14) arranged at a distance oppositely to each other inside said light emission tube, said cathode (13) having a shape of a truncated cone (16) with a flat part (18) at a tip end thereof, mercury filled inside said light emission tube in an amount of 0.05 to 0.10 mg/mm 3 , wherein the distance between the cathode (13) and the anode (14) is 1.4 to 1.8 mm, and a tip diameter of the flat part (18) at the tip end of the cathode (13) is 0.1 to 0.3 mm.
摘要翻译：为了设计在短波长范围内具有增加的紫外线辐照度的UV光源，防止发光管变黑并且辐照度降低并且具有长的耐久性，直流型高压汞灯（1），其包括在所述发光管内部彼此相对设置的发光管（10），阴极（13）和阳极（14），所述阴极（13）具有截头圆锥形状（ 16），其末端具有平坦部分（18），填充在所述发光管内的汞含量为0.05至0.10mg / mm 3，其中阴极（13）和阳极（14）之间的距离为 1.4〜1.8mm，阴极（13）前端的平坦部（18）的前端直径为0.1〜0.3mm。

67. 发明公开

EP2203033A2 Extreme ultraviolet light source device 有权
标题翻译：极端的紫外线光源装置
公开(公告)号：EP2203033A2
公开(公告)日：2010-06-30
申请号：EP09015807.2
申请日：2009-12-21
申请人： USHIO DENKI KABUSHIKI KAISHA
发明人： Yokoyama, Takuma
IPC分类号： H05G2/00
CPC分类号： H05G2/001 , G21K1/00
摘要： The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (2a, 2b, 52a, 52b) arranged spaced apart from each other; a pulsed power supply means (3, 53) supplying pulsed power to said discharge electrodes (2a, 2b); a raw material supply means (7) adapted for supplying raw material (M) for generating extreme ultraviolet radiation onto said discharge electrodes (2a, 2b, 52a, 52b); an energy beam emitting means (10, 60) adapted for radiating an energy beam (LB2) to the raw material (M) on said discharge electrodes (2a, 2b, 52a, 52b) to gasify said raw material (M); a means (11, 61, 85, 95, 105) for forming a depression (MA) in the raw material (M) supplied onto said discharge electrodes (2a, 2b, 52a, 52b); and a controller (6, 56). Said controller (6, 56) is adapted to control the depression forming means (11, 61, 85, 95, 105) such that it forms a depression (MA) in the raw material (M) supplied onto the discharge electrodes (2a, 2b, 52a, 52b) before the voltage between the electrodes (2a, 2b, 52a, 52b) increases by means of the supply of pulsed power to the discharge electrodes (2a, 2b, 52a, 52b) by said pulsed power supply means (3, 53), and before the energy beam (LB2) is radiated to the raw material (M) on the electrodes (2a, 2b, 52a, 52b) by said energy beam emitting means (10, 60). The invention also relates to a process for generating EUV radiation.
摘要翻译：本发明涉及一种远紫外光源装置，其包括彼此间隔开布置的一对放电电极（2a，2b，52a，52b）向所述放电电极（2a，2b）提供脉冲功率的脉冲电源装置（3,53）; 原料供应装置（7），用于向所述放电电极（2a，2b，52a，52b）供应用于产生极紫外辐射的原料（M）; 能量束发射装置（10,60），适于向所述放电电极（2a，2b，52a，52b）上的原料（M）辐射能量束（LB2）以使所述原料（M）气化; 用于在供给到所述放电电极（2a，2b，52a，52b）上的原料（M）中形成凹陷（MA）的装置（11,61,85,95,105）; 和控制器（6,56）。所述控制器（6,56）适于控制凹陷形成装置（11,61,85,95,105），使得其形成供应到放电电极（2a，2b）上的原材料（M）中的凹陷（MA）（2a，2b，52a，52b）之间的电压通过由所述脉冲电源装置向所述放电电极（2a，2b，52a，52b）提供脉冲功率而增加之前，并且在能量束（LB2）通过所述能量束发射装置（10,60）照射到电极（2a，2b，52a，52b）上的原材料（M）之前。本发明还涉及用于生成EUV辐射的过程。

68. 发明公开

EP2128888A3 Quecksilberfreie Metallhalogenid-Hochdruckentladungslampe 有权转让
标题翻译：无汞金属卤化物高压放电灯
公开(公告)号：EP2128888A3
公开(公告)日：2010-06-30
申请号：EP09002659.2
申请日：2009-02-25
申请人： BLV LICHT- UND VAKUUMTECHNIK GMBH
发明人： Wakahata, Yasuhiko , Wesseling, Heinz-Jürgen
IPC分类号： H01J61/12 , H01J61/82
CPC分类号： H01J61/125 , H01J61/827
摘要： Offenbart wird eine quecksilberfreie Metallhalogenid-Hochdruckentladungslampe mit einem lichtdurchlässigen und gasdicht verschlossenen Entladungsgefäß und zwei Elektroden, die in das Entladungsgefäß hineinragen und in dem Entladungsgefäß einander gegenüberliegend angeordnet sind, wobei das Entladungsgefäß mit einer Lampenfüllung befüllt ist, die umfasst: zumindest ein Edelgas, zumindest die Elemente Eisen und Zink sowie zumindest ein Halogenid, wobei das Halogenid Bromid umfasst, und wobei der Anteil des Bromids mindestens 14 Mol-% der Gesamthalogenmenge beträgt und für das Verhältnis aus Moldichte des Zinks D in µMol/cm 3 und elektrischer Feldstärke E in V/cm zwischen den Elektroden die Beziehung 0,005 ≤ D/E ≤ 0,200 gilt.

69. 发明公开

EP2169705A3 Filament lamp 有权
标题翻译：灯丝灯
公开(公告)号：EP2169705A3
公开(公告)日：2010-05-12
申请号：EP09011677.3
申请日：2009-09-11
申请人： USHIODENKI KABUSHIKI KAISHA
发明人： Tanino, Kenji , Mizukawa, Yoichi
IPC分类号： H01K1/28 , H01K1/16 , H01K1/24 , H01K9/08
CPC分类号： H01K1/28 , H01K1/16 , H01K1/24 , H01K1/40 , H01K7/00 , H01K9/08 , H05B6/129
摘要： To provide a filament lamp having a plurality of independent power supply pathways, the structure being capable of preventing the power supply pathways from electrically shorting to each other, a filament lamp formed of a straight-tube shaped luminous part having multiple filaments (F1, F2, F3) divided in the axial direction, and sealing parts (20) on each of opposite ends of the luminous part (10) in which are embedded metal foils (31, 32, 33) corresponding to the number of filaments in an aligned manner, and leads for supplying electricity independently to each filament, the luminous part (10) having a first housing space (11) for housing the filaments and a second housing space (12) for housing the leads (51, 52, 53), the housing spaces be connected and extending in the axial direction.
摘要翻译：为了提供具有多个独立供电通路的白炽灯，该结构能够防止供电通路彼此电短路，由具有多个灯丝（F1，F2）的直管形发光部件形成的白炽灯，F3）在轴向上分开，并且在发光部分（10）的每个相对端上的密封部分（20）中嵌入有与灯丝数量对应的金属箔（31,32,33）（10）具有用于容纳灯丝的第一容纳空间（11）和用于容纳引线（51,52,53）的第二容纳空间（12），所述导线壳体空间连接并沿轴向延伸。

70. 发明公开

EP1976344A3 Extreme ultraviolet light source device and extreme ultraviolet radiation generating method 有权
标题翻译：极端紫外光和方法的光源装置，用于产生极紫外辐射
公开(公告)号：EP1976344A3
公开(公告)日：2010-04-28
申请号：EP08005656.7
申请日：2008-03-26
申请人： TOKYO INSTITUTE OF TECHNOLOGY , Ushio Denki Kabushiki Kaisha
发明人： Hosokai, Tomonao , Horioka, Kazuhiko , Mizokoshi, Hiroshi , Yokoyama, Takuma , Seki, Kyohei
IPC分类号： H05G2/00
CPC分类号： G03F7/70033 , B82Y10/00 , H05G2/003 , H05G2/005 , H05G2/006 , H05G2/008
摘要： High temperature plasma raw material (21) is gasified by irradiation with a first energy beam (23). When the gasified raw material reaches the discharge region, pulsed power is applied between the electrodes (11, 12) and a second energy beam (24) irradiates. In this manner, the plasma is heated and excited and an EUV emission occurs. The emitted EUV emission is collected and extracted by EUV collector optics. Because of irradiation by the first and second energy beams (23, 24), a special distribution of high temperature plasma raw material density can be set to a specified distribution and demarcation of the position of the discharge channel can be set. Moreover, it is possible to lengthen pulses of extreme ultraviolet emission by supplying raw material gas of which the ion density in the discharge path is nearly the same as the ion density under EUV radiation emission conditions.

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