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    • 47. 发明公开
    • METHOD FOR IMPROVING THE HEAT STABILITY OF FILMS OF POLY-p-XYLYLENE OR DERIVATIVES THEREOF, AND POLY-p -XYLYLENE DERIVATIVES
    • VERFAHREN ZUR VERBESSERUNG DERWÄRMESTABILITÄTVON FILMEN AUS POLY-P-XYLYLEN
    • EP1700876A1
    • 2006-09-13
    • EP03780945.6
    • 2003-12-19
    • Daisankasei Co.,Ltd.
    • MARUYAMA, Hiroshi, c/o DaisankaseiMOCHIZUKI, Tsutomu, c/o DaisankaseiINOUE, Takashi, c/o Daisankasei
    • C08G61/02
    • C08G61/025C08G61/02C08G2261/3424C08L65/04
    • A method for improving the heat stability of polyparaxylylene and a derivative film thereof to improve the heat resistance of the polyparaxylylene and the derivative film thereof without deteriorating deposition characteristics or profitability, and a polyparaxylylene derivative whose heat resistance is improved are provided. When the polyparaxylylene or the derivative film thereof represented by a below-described general formula 1 is formed by a chemical vapor deposition method, an amino-(2.2)-paracyclophane compound represented by a below-described general formula 3 is mixed in a (2.2)-paracyclophane compound represented by a below-described general formula 2 to form a film.

      (In the formula 1, X 1 and X 2 designate hydrogen, lower alkyl or halogen. X 1 and X 2 may be the same or different. n represents a degree of polymerization.)

      (In the formula 2, X 1 and X 2 have the same meanings as those of the formula 1.)

      (In the formula 3, X 3 designates hydrogen or a lower alkyl group. Y 1 and Y 2 designate hydrogen or an amino group and both Y 1 and Y 2 are not hydrogens at the same time.)
    • 提供聚对二甲苯的热稳定性的方法及其衍生膜,以提高聚对二甲苯及其衍生物膜的耐热性,而不会降低沉积特性或获利能力,并提供耐热性提高的聚对二甲苯衍生物。 当通过化学气相沉积法形成由下述通式1表示的聚对二甲苯或其衍生物膜时,将下述通式3所示的氨基 - (2.2) - 环烷基化合物混合在(2.2 ) - 由下述通式2表示的 - 环烷基化合物以形成膜。 (式1中,X 1和X 2表示氢,低级烷基或卤素,X 1和X 2可以相同或不同,n表示聚合度。)(式2中,X 1和X 2 具有与式1相同的含义)(式3中,X 3表示氢或低级烷基,Y 1和Y 2表示氢或氨基,Y 1和Y 2均不为氢 同一时间。)