会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 42. 发明公开
    • Process or forming MOS-gated devices having self-aligned trenches
    • 一种用于与MOS栅极器件和自对准沟槽的制造过程
    • EP1052690A3
    • 2003-12-03
    • EP00108965.5
    • 2000-04-27
    • Intersil Corporation
    • Grebs, Thomas
    • H01L21/336
    • H01L29/7802H01L29/41766H01L29/7813
    • A process for forming an MOS-gated device having sell-aligned trenches, a screen oxide layer is formed on an upper layer of a semiconductor substrate, and a nitride layer is formed on the screen oxide layer. Using a well mask, the nitride layer is patterned and etched to define a well region in the upper layer, and ions of a first conduction type are diffused into the masked upper layer to form the well region. Ions of a second, opposite conduction type are implanted into the well region of the masked upper layer to form a source region extending to a selected depth that defines a source-well junction. The well mask is removed, exposing the portion of the nitride layer previously underlying the mask. An oxide insulating layer providing a hard mask is formed overlying the well and source regions in the upper layer. The remaining portions of the nitride layer and the screen oxide layer underlying it, which had been protected by the well mask, are removed, exposing the portion of the substrate not masked by the oxide insulating layer. The portion of the substrate thus exposed is etched to form a gate trench extending through the substrate to a selected depth beneath the well region. Sidewalls and a floor of an insulator are formed in the gate trench, which is filled with a semiconductor. The semiconductor in the trench is planarized to be substantially coplanar with the upper surface of the oxide insulating layer. An interlevel dielectric layer is formed on the planarized gate trench semiconductor and the upper surface of the oxide insulating layer.
    • 45. 发明公开
    • Low voltage dual-well MOS device
    • MOS Bauelement mit Doppelwannefürniedrige Spannungen
    • EP1058317A3
    • 2002-11-13
    • EP00401471.8
    • 2000-05-25
    • Intersil Corporation
    • Zeng, JunWheatley, Carl, Jr.
    • H01L29/78H01L21/336H01L29/36H01L29/08
    • H01L29/7802H01L29/0878H01L29/66712
    • A low-voltage MOS device (100) having high ruggedness, low on-resistance, and body diode reverse recovery characteristics comprises a semiconductor substrate (101) on which is disposed a doped upper layer (102) of a first conduction type. The upper layer includes at its upper surface a blanket implant of the first conduction type, a heavily doped source region (113) of the first conduction type, and a heavily doped body region (112) of a second and opposite conduction type. The upper layer further includes a doped first well region (108) of the first conduction type and a doped well region (109) of the second conduction type underlying the source and body regions. The first well region (108) underlies the second well region (109) and merges with the blanket implant to form a heavily doped neck region that abuts the second well region at the upper surface of the upper layer. A gate comprising a conductive material separated from the upper layer by an insulating layer is disposed on the upper layer overlying the heavily doped neck region.
    • 具有高耐久性,低导通电阻和改善的体二极管反向恢复特性的改进的低电压MOS器件包括其上设置有第一导电类型的掺杂上层的半导体衬底。 上层在其上表面包括第一导电类型的覆盖注入,第一导电类型的重掺杂源区和第二和相反导电类型的重掺杂体区。 上层还包括第一导电类型的掺杂的第一阱区和位于源极和体区的第二导电类型的掺杂阱区。 第一阱区域位于第二阱区域的下面,并与橡皮布植入物合并以形成与上层的上表面邻接第二阱区域的重掺杂的颈区域。 包括通过绝缘层从上层分离的导电材料的门设置在覆盖重掺杂颈部区域的上层上。 一种用于形成具有高耐久性,低导通电阻和改善的体二极管反向恢复特性的改进的低电压MOS器件的方法包括提供包括第一导电类型的掺杂上层的半导体衬底,以及 在上层的上表面中的第一导电类型。 在衬底的上层上形成包括导电材料和绝缘层的栅极,并且通过注入第一导电类型的掺杂的第一阱区和第二导电类型和第二导电类型的掺杂的第二阱区, 第一和第二导电类型通过共同的窗口进入上层的上表面。 第一阱区域位于第二阱区域的下方并且与橡皮布注入合并,形成在栅极下方的重掺杂的颈部区域并且邻接上层的上表面处的第二阱区域。 在上层的上表面处的第二阱区中形成第一导电类型的重掺杂源区和第二导电类型的重掺杂体区。
    • 48. 发明公开
    • Bicmos process with low temperature coefficient resistor (TCRL)
    • BiCMOS工艺具有低温度系数电阻器
    • EP1065715A2
    • 2001-01-03
    • EP00401889.1
    • 2000-06-30
    • Intersil Corporation
    • Hemmenway, DonaldDelgado, JohnButler, JohnRivoli, Anthony
    • H01L21/8249H01L27/06
    • H01L28/20H01L21/763H01L21/8249H01L27/0635
    • A low temperature coefficient resistor (TCRL) has some unrepaired ion implant damage. The damaged portion raises the resistance and renders the resistor less sensitive to operating temperature fluctuations. A polysilicon thin film low temperature coefficient resistor and a method for the resistor's fabrication overcomes the coefficient of resistance problem of the prior art, while at the same time eliminating steps from the BiCMOS fabrication process, optimizing bipolar design tradeoffs, and improving passive device isolation. A low temperature coefficient of resistance resistor (TCRL) is formed on a layer of insulation, typically silicon dioxide or silicon nitride, the layer comprising polysilicon having a relatively high concentration of dopants of one or more species. An annealing process is used for the implanted resistor which is shorter than that for typical prior art implanted resistors, leaving some intentional unannealed damage in the resistor. The planned damage gives the TCRL a higher resistance without increasing its temperature coefficient. A process for fabrication of the resistor is used which combines separate spacer oxide depositions, provides buried layers having different diffusion coefficients, incorporates dual dielectric trench sidewalls that double as a polish stop, supplies a spacer structure that controls precisely the emitter-base dimension, and integrates bipolar and CMOS devices with negligible compromise to the features of either type.