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    • 1. 发明公开
    • Edge termination for silicon power devices
    • RandabschlussfürSilizium-Leistungsanordnungen
    • EP1065727A2
    • 2001-01-03
    • EP00401826.3
    • 2000-06-27
    • Intersil Corporation
    • Zeng, JunDolry, GaryMuraleedharan, Praveen
    • H01L29/06
    • H01L29/0615H01L29/1608H01L29/267Y10S438/931
    • A silicon semiconductor die comprises a heavily doped silicon substrate (701) and an upper layer (702) comprising doped silicon of a first conduction type disposed on the substrate (701). The upper layer comprises a well region (703) of a second, opposite conduction type adjacent an edge termination zone (705) that comprises a layer of a material having a higher critical electric field than silicon. Both the well region (703) and adjacent edge termination zone (705) are disposed at an upper surface of the upper layer, and an oxide layer (706) overlies the upper layer and the edge termination zone. The invention also concerns a process for forming a silicon die having edge termination.
    • 硅半导体管芯包括重掺杂硅衬底(701)和包括设置在衬底(701)上的第一导电类型的掺杂硅的上层(702)。 上层包括邻近边缘终止区(705)的第二相反导电类型的阱区(703),其包括具有比硅更高的临界电场的材料层。 阱区域(703)和相邻的边缘终止区域(705)均设置在上层的上表面,并且氧化物层(706)覆盖在上层和边缘终止区域上。 本发明还涉及一种用于形成具有边缘终止的硅片的方法。