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31. 发明公开

EP1691398A4 CERAMIC HEATER UNIT 有权
标题翻译：陶瓷发热UNIT
公开(公告)号：EP1691398A4
公开(公告)日：2009-01-21
申请号：EP04820513
申请日：2004-12-01
申请人： BRIDGESTONE CORP
发明人： YAMAKAWA MASAFUMI
IPC分类号： H01L21/02 , H05B3/03 , C04B37/00 , H01L21/00 , H01L21/205 , H05B3/14 , H05B3/74
CPC分类号： C04B37/005 , B32B2315/02 , C04B2237/083 , C04B2237/365 , H01L21/67103 , H05B3/143
摘要： A ceramic heater unit (20) comprising at least a heater (1) and electrodes (2) for passing electricity through the heater (1) to elevate the temperature of the heater (1), characterized in that the heater (1) and electrodes (2) are made of a material containing silicon carbide and the heater (1) and electrodes (2) are integrally constructed with use of a binder consisting of a material containing silicon carbide.

32. 发明授权

EP1251719B1 Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern 有权
标题翻译：由电加热元件和含有基板处理设备图案的导电图案
公开(公告)号：EP1251719B1
公开(公告)日：2008-06-25
申请号：EP02252761.8
申请日：2002-04-18
申请人： Sumitomo Electric Industries, Ltd.
发明人： Natsuhara, Masuhiro, , Nakata, Hirohiko, , Kuibira, Akira, , Narita, Masashi,
IPC分类号： H05B3/28
CPC分类号： H01L21/67103 , H05B3/143 , H05B3/283

33. 发明公开

EP1845754A1 Heating element 有权
标题翻译：加热元件
公开(公告)号：EP1845754A1
公开(公告)日：2007-10-17
申请号：EP07007534.6
申请日：2007-04-12
申请人： Shin-Etsu Chemical Co., Ltd.
发明人： Kimura, Noboru , Kubota, Yoshihiro , Yamamura, Waichi c/o Advanced Functional Materials Research Center , Kano, Shoji
IPC分类号： H05B3/28 , H01L21/00 , H01L21/68
CPC分类号： H01L21/67103 , H01L21/67098 , H05B3/143 , H05B2203/003
摘要： There is disclosed a heating element 10 comprising: at least
a heat-resistant base member 1;
a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;
a protection layer 4 with an insulating property formed on the conductive layer; and
a corrosion-resistant layer 4p having a nitrogen gas permeability of 1x10 -2 cm 2 /sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
摘要翻译：公开了一种加热元件10，其包括：至少一个耐热基底构件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成绝缘性的保护层4，以及具有1×10 -2 cm 2 / sec以下的氮气渗透率的耐腐蚀层4p或者由在保护层4上形成的包含掺杂剂的化合物制成。可以提供一种加热元件，其中耐腐蚀其氮气渗透性，电阻率或硬度受到控制的氮化硅层形成在保护层上，并且即使在高温和腐蚀性气体的环境下腐蚀性气体也很难通过该层而被腐蚀，可以避免导电层，尤其是电源端子部分，并且另外即使当具有卡盘图案时也可以实现作为静电卡盘的高功能并且具有长的操作寿命并且能够以低成本生产。

34. 发明公开

EP1784050A2 Ceramic heater and method for producing ceramic heater 有权
标题翻译： Keramisches Heizelement und Verfahren zur Herstellung von keramischen Heizern。
公开(公告)号：EP1784050A2
公开(公告)日：2007-05-09
申请号：EP06255610.5
申请日：2006-10-31
申请人： Shin-Etsu Chemical Company, Ltd.
发明人： Kushihashi, Takuma, c/o Gunma Complex , Kimura, Noboru, c/o Gunma Complex , Seki, Masaki, c/o Gunma Complex
IPC分类号： H05B3/14
CPC分类号： H05B3/143 , H01L21/67103
摘要： There is disclosed a ceramic heater 11 comprising: at least a plate member 12 made of insulating ceramics in which one or more pair(s) of through-holes 13 are formed; a rod member 14, being made of conductive ceramics, having a power-supply terminal 18 at one end thereof, and being inserted into the through-hole 13 at another end thereof; a conductive layer 19 made of conductive ceramics formed on the plate member 12; and a coating layer 21 made of insulating ceramics formed on the conductive layer; wherein one end face 16 of the rod member has a same plane with a main surface 15 of the plate member; the conductive layer 19 having a heater pattern 20 is formed on the main surface 15 of the plate member having the same plane; and the rod members 14 are electrically insulated not to be short-circuited to each other in the opposite main surface 17. There can be provided a ceramic heater by which an object to be heated being directly put thereon can be heated uniformly and of which heating efficiency is high and in which the heater main body is not large in size and is compact.
摘要翻译：公开了一种陶瓷加热器11，其包括：至少一个由绝缘陶瓷制成的板构件12，其中形成有一对或多个通孔13; 杆状构件14，由导电陶瓷制成，其一端具有电源端子18，并在其另一端插入通孔13中; 由导电陶瓷制成的导电层19形成在板件12上; 以及形成在导电层上的由绝缘陶瓷制成的涂层21; 其中，杆构件的一个端面16与板构件的主表面15具有相同的平面; 具有加热器图案20的导电层19形成在具有相同平面的板构件的主表面15上; 并且杆构件14在相对的主表面17中彼此电绝缘不彼此短路。可以提供一种陶瓷加热器，其中直接放置在其上的待加热物体可以被均匀地加热，并且其中加热效率高，加热器主体尺寸不大，结构紧凑。

35. 发明公开

EP1753014A1 Heating element 有权
标题翻译：加热元件
公开(公告)号：EP1753014A1
公开(公告)日：2007-02-14
申请号：EP06254131.3
申请日：2006-08-07
申请人： Shinetsu Chemical Co., Ltd.
发明人： Kimura, Noboru c/o Gunma Complex , Kushihashi, Takuma c/o Gunma Complex
IPC分类号： H01L21/00 , H01L21/683 , H01L21/687
CPC分类号： H01L21/67103 , H05B3/143
摘要： There is disclosed a heating element 10 comprising:
a single-place heat-resistant base member 1 with a plate portion 1a in which a heater pattern 3a is formed, a rod portion 1b extending from one surface of the plate portion 1a and in which a current-carrying part 3b is formed, and an end portion 1c at an end of the rod portion 1b on the opposite side of the plate portion 1a and in which a power-supply terminal 3c is formed;
a dielectric layer 2 with insulating property on the surface of the heat-resistant base member 1;
a conductive layer 3 with conductive property on the dielectric layer 2, in which the conductive layer 3 is formed as the heater pattern 3a in the plate portion 1a, as the current-carrying part 3b in the rod portion 1b, and as the power-supply terminal 3c in the end portion 1c; and
a protection layer 4 with insulating property which covers the surface of the heater pattern 3a and the current-carrying part 3b, in which the dielectric layer 2, the conductive layer 3 and the protection layer 4 are formed to unite with the heat-resistant base member 1. There can be provided a heating element resistant to corrosion of a power-supply terminal, with a long-life protection layer, with high durability, compact in size, and capable of being produced at a low cost.
摘要翻译：公开了一种加热元件10，其包括：单位耐热基底部件1，其具有其中形成有加热器图案3a的板部分1a;杆部分1b，其从板部分1a的一个表面延伸并且其中，形成导电部分3b，以及在杆部分1b的与板部分1a相对的一侧上的端部处的端部1c，并且其中形成电源端子3c; 在耐热基材1的表面具有绝缘性的电介质层2，在电介质层2上具有导电层3的导电层3，其中导电层3形成为板部1a中的加热器图案3a，作为杆部1b中的电流承载部3b，供电端子3c在端部1c中; 以及具有绝缘性的保护层4，其覆盖加热器图案3a和通电部3b的表面，其中电介质层2，导电层3和保护层4形成为与耐热层可以提供耐受供电端子腐蚀的加热元件，具有长寿命的保护层，具有高耐久性，紧凑尺寸并且能够以低成本生产。

36. 发明公开

EP1642876A1 ALUMINUM NITRIDE CONJUGATE BODY AND METHOD OF PRODUCING THE SAME 审中-公开
标题翻译：铝合金ON R R R R R R R R R R R R R R R R
公开(公告)号：EP1642876A1
公开(公告)日：2006-04-05
申请号：EP04746090.2
申请日：2004-06-11
申请人： TOKUYAMA CORPORATION
发明人： ESAKI, Tatsuo c/o Tokuyama Corporation
IPC分类号： C04B37/00
CPC分类号： C04B37/006 , B32B18/00 , B32B2315/02 , C04B35/581 , C04B35/6303 , C04B35/634 , C04B35/645 , C04B37/001 , C04B37/003 , C04B2235/3206 , C04B2235/3208 , C04B2235/3213 , C04B2235/3225 , C04B2235/656 , C04B2235/6567 , C04B2235/661 , C04B2235/95 , C04B2235/96 , C04B2235/963 , C04B2235/9638 , C04B2237/122 , C04B2237/124 , C04B2237/125 , C04B2237/366 , C04B2237/704 , C04B2237/708 , H01L21/6833 , H05B3/143 , Y10T29/4913 , Y10T29/49826 , Y10T29/49968 , Y10T29/4997 , Y10T279/23 , Y10T428/12347 , Y10T428/12493 , Y10T428/24917 , Y10T428/249953
摘要： An aluminum nitride joined body comprising two pieces of aluminum nitride sintered body plates joined together without using adhesive, and a metal layer formed on a portion of the junction interface thereof, wherein, as viewed on a side section passing through the center of the joined body, a plurality of voids are existing in the directly joined region where the sintered body plates are directly facing each other on the junction interface, the voids having an average length L of 0.5 to 4 µm along the junction interface, thereby forming non-joined portions due to the voids, and a non-joined ratio Q on the side section as calculated by the following formula (1), Non-joined ratio Q = ( X / Y ) × 100 where X is a length of the non-joined portion in the direction of junction interface expressed by the sum of lengths L of the voids existing in the directly joined region, and Y is a length of the directly joined region where the voids are existing,
is in a range of from 0.1 to 0.5% on average. The AlN plate-like joined body has the metal layer contained therein that is effectively suppressed from warping, exhibits a large junction strength, excellent durability, and is useful as a plate heater or an electrostatic chuck for treating a semiconductor wafer that is placed thereon in an apparatus for producing a semiconductor.
摘要翻译：一种氮化铝接合体，其包括两片不使用粘合剂连接在一起的氮化铝烧结体板，以及在其接合界面的一部分上形成的金属层，其中，从穿过接合体的中心的侧面看，在烧结体板的接合界面上直接相对的直接接合区域中存在多个空隙，空隙的接合界面的平均长度L为0.5〜4μm，由此形成非接合部由于空白，并且通过下式（1）计算出的侧面上的非连接比率Q，未连接的比率Q =（X / Y）×100其中X是长度在接合界面方向上的非接合部分由存在于直接接合区域中的空隙的长度L的总和表示，Y是存在空隙的直接接合区域的长度，处于从0 平均为.1〜0.5％。 AlN板状接合体，其中包含的金属层被有效地抑制翘曲，显示出大的接合强度，优异的耐久性，并且可用作用于处理放置在其上的半导体晶片的板式加热器或静电吸盘一种半导体制造装置。

37. 发明公开

EP1588404A2 WAFER HANDLING APPARATUS 审中-公开
标题翻译： WAFERHANDHABUNGSVORRICHTUNG
公开(公告)号：EP1588404A2
公开(公告)日：2005-10-26
申请号：EP04702947.5
申请日：2004-01-16
申请人： GENERAL ELECTRIC COMPANY
发明人： MARINER, John, Thomas , HEJL, Timothy, J. , LONGWORTH, Douglas, Alan , LENNARTZ, Jeffrey , SANE, Ajit , MACEY, Andrew, John , LEIST, Jon , DEVAN, Thomas, E.
IPC分类号： H01L21/00
CPC分类号： H01L21/67109 , C23C16/4581 , H01L21/67103 , H01L21/6833 , H01L21/68757 , H05B3/143
摘要： A wafer processing device or apparatus, i.e., a heater or an electrostatic chuck, comprises a planar support platen, a support shaft having centrally located bore, and a pair of electrical conductors located in the shaft. In one embodiment, the electrical conductors are concentrically located within the bore of the shaft, with the first electrical lead being in the form of a pyrolytic graphite rod and separated from the outer second graphite electrical lead by means of a pyrolytic boron nitride (pBN) coating. In a second embodiment, the support platen and the support shaft are formed from a single unitary body of graphite. In yet another embodiment of the device of the invention, the connection posts comprise a carbon fiber composite and the exposed ends of the electrical connectors are coated with a protective ceramic paste for extended life in operations.

38. 发明授权

EP1133214B1 CERAMIC HEATER 有权
标题翻译：陶瓷加热器
公开(公告)号：EP1133214B1
公开(公告)日：2005-08-10
申请号：EP00957015.1
申请日：2000-09-07
申请人： IBIDEN CO., LTD.
发明人： KARIYA, Satoru, Ibiden Co., Ltd.
IPC分类号： H05B3/12 , H05B3/14 , H05B3/20 , H05B3/26
CPC分类号： H05B3/12 , H05B3/143 , H05B3/265
摘要： A ceramic heater includes a ceramic substrate on which a heater is formed. The heater is formed of non-sintered metal foil or conductive ceramic film, which is bonded to the surface of the substrate with heat-resistant resin. The irregularity of resistance attributed to the quality of the heater is eliminated, while accurate and quick temperature control is achieved.

39. 发明公开

EP1185143A4 HOT PLATE AND CONDUCTOR PASTE 审中-公开
标题翻译：热板和导电膏
公开(公告)号：EP1185143A4
公开(公告)日：2005-03-07
申请号：EP00922933
申请日：2000-05-01
申请人： IBIDEN CO LTD
发明人： ZHOU YANLING
IPC分类号： H05B3/20 , H01B1/22 , H01C7/00 , H01L21/027 , H05B3/10 , H05B3/12 , H05B3/14 , H05B3/16 , H05B3/26 , H05B3/74
CPC分类号： H05B3/141 , H05B3/12 , H05B3/143 , H05B3/265 , H05B3/74

40. 发明授权

EP1199741B1 Ceramic heater to heat wafers 有权
标题翻译：一种陶瓷加热器用于加热晶片
公开(公告)号：EP1199741B1
公开(公告)日：2004-12-22
申请号：EP01308810.9
申请日：2001-10-16
申请人： NGK INSULATORS, LTD.
发明人： Yamaguchi, Shinji, c/o NGK Insulators Ltd.
IPC分类号： H01L21/00 , H05B3/14 , H05B3/26
CPC分类号： H01L21/67109 , H01L21/67103 , H05B3/143 , H05B3/265 , H05B3/283 , H05B3/74

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