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    • 31. 发明公开
    • HIGH-PURITY 1,3-PROPANEDIOL DERIVATIVE SOLVENT, PROCESS FOR PRODUCING THE SAME, AND USE THEREOF
    • 1,3-丙二醇高纯溶剂衍生,方法及其生产和需求
    • EP1085003A1
    • 2001-03-21
    • EP00912993.3
    • 2000-03-30
    • DAICEL CHEMICAL INDUSTRIES, Ltd.
    • TANIGAWA, HirotoMIYAKE, HirotoKOYAMA, HiroshiFUJITA, AkihikoMARUO, Katsuya
    • C07C43/13C07C41/26C07C41/42G03F7/004G03F7/32G03F7/027H05K3/00C08L101/00
    • G03F7/422C07C43/13C07C45/71G03F7/0048G03F7/322G03F7/325C07C47/19
    • The present invention No. I is to obtain a high purity 3-alkoxy-1-propanol having the content of alcoholic impurities of not more than 0.3% by weight by allowing to react acrolein with a linear or branched alcohol having a carbon number of 1-4 using acrolein having the content of propionaldehyde of not more than 1% by weight as a raw material, a 3-alkoxy-1-propanol is produced by a hydrogenation reaction using hydrogen of a reaction mass under the presence of a catalyst, followed by recovering through a distillation of the 3-alkoxy-1-propanol having the content of alcoholic impurities of not more than 0.3% by weight from a crude solution in the hydrogenation reaction.
      The present invention No. II is a cleaning agent for a lithography which is a solvent (a) alone which includes a 1,3-propanediol alkylether, a 1,3-propanediol alkylether acetate, or a mixture thereof and, further, in which there are employed together the alcohols (b) having a carbon number of 1-4 and propylene glycol methylether acetate.
      The present invention No. III is a rinsing liquid for lithography which comprises a homogeneous solution containing the solvent (a) and water.
      The present invention No. IV is to employ the solvent (a) as a solvent for a resist composition, and it is a resist composition composed of the solvent for a resist composition and a component for a resist.
      The present invention No. V is composed of the solvent (a), and a modified copolymer in which an epoxy group-contained unsaturated compound having an aliphatic structure is added to carboxylic groups in a copolymer of a copolymerizable unsaturated carboxylic acid with an unsaturated compound other than the unsaturated carboxylic acid.
    • 本发明第 I是通过使反应丙烯醛与线性或使用具有丙烯醛具有1-4个碳数的支链醇具有不超过0.3%(重量)醇中的杂质的含量3-烷氧基-1-丙醇,以获得高纯度的 的不超过1%的丙醛(重量)作为原料的内容,3-烷氧基-1-丙醇是由氢化反应使用反应物料的氢下,在催化剂的随后通过蒸馏回收存在下生产 具有不大于0.3%的酒精中杂质的重量从在氢化反应中的粗溶液中的含量的3-烷氧基-1-丙醇。 本发明第 II是一种清洗剂光刻所有这是一种溶剂(a)单独,其包括1.3丙二醇烷基醚,醋酸1,3-丙二醇醚,或它们的混合物,并且进一步地,其中有一起使用的 醇(b)具有的1-4和丙二醇甲基醚乙酸酯的碳原子数。 本发明第 III是用于平版印刷的冲洗液,其包含一种均匀的溶液含有溶剂(a)和水。 本发明第 IV是使用溶剂(a)中,作为抗蚀剂组合物的溶剂,并且它是用于抗蚀剂组合物和组件,用于抗蚀剂的溶剂组成的抗蚀剂组合物。 本发明第 V被由溶剂(a)的,和改性的共聚物,其中,以环氧树脂具有脂族结构中包含基团的不饱和化合物在低于不饱和羧酸等不饱和化合物添加到羧基的共聚性不饱和羧酸的共聚物与 酸。
    • 38. 发明公开
    • Radiation-sensitive composition adapted for roller coating
    • Strahlungsempfindlic Zusammensetzung zur Walzenbeschichtung
    • EP0851297A1
    • 1998-07-01
    • EP97122388.8
    • 1997-12-18
    • CLARIANT INTERNATIONAL LTD.
    • Susukida, Kenji
    • G03F7/004
    • G03F7/0048
    • A radiation-sensitive composition adapted for roller coating is disclosed, which contains, as a solvent for the composition, a mixed solvent of at least one member selected from the group consisting of propylene glycol alkyl ethers and propylene glycol diacetate having a boiling point of 170 to 250 °C, kinematic viscosity of 2 cSt or more at 25 °C and a relative evaporation rate of 10 or less taking the evaporation rate of n-butyl acetate as 100, and other solvent or solvents. This composition forms less uneven coating upon being coated on a substrate by roller coating. The propylene glycol alkyl ethers are exemplified by propylene glycol phenyl ether, tripropylene glycol methyl ether, dipropylene glycol n-butyl ether, dipropylene glycol methyl ether, propylene glycol n-butyl ether, etc. and other solvents are exemplified by propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, ethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether, ethyl lactate, n-butyl acetate, etc.
    • 公开了一种适用于辊涂的辐射敏感组合物,其包含作为组合物的溶剂的选自丙二醇烷基醚和沸点为170的丙二醇二乙酸酯中的至少一种的混合溶剂 在250℃下,运动粘度在25℃下为2cSt或更高,相对蒸发速率为10或更低,取乙酸正丁酯的蒸发速率为100,以及其它溶剂或溶剂。 当通过辊涂在基材上涂布时,该组合物形成较少的不均匀涂层。 丙二醇烷基醚的例子有丙二醇苯基醚,三丙二醇甲基醚,二丙二醇正丁基醚,二丙二醇甲基醚,丙二醇正丁基醚等,其它溶剂的例子有丙二醇单甲醚乙酸酯 ,丙二醇单甲醚,乙二醇单乙醚乙酸酯,乙二醇单丁醚,乳酸乙酯,乙酸正丁酯等