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    • 33. 发明公开
    • THERMAL FLUID FLOW-RATE SENSOR
    • 热流体流量传感器
    • EP3244173A1
    • 2017-11-15
    • EP15876969.5
    • 2015-11-26
    • Hitachi Automotive Systems, Ltd.
    • SAKUMA, NoriyukiONOSE, YasuoTASHIRO, ShinobuDOI, Ryosuke
    • G01F1/692B81B1/00
    • G01F1/6983B81B1/00G01F1/6845G01F1/692G01F1/699
    • Degradation of reliability of a thermal fluid flow sensor, caused by generation of a crack in an insulating film is prevented in the thermal fluid flow sensor including a detection section and a circuit section formed on the same substrate when stress adjustment is performed by forming a deep concave portion in an interlayer insulating film in the detection section and forming the insulating film having a tensile stress thereon. As a means thereof, stair-like step is provided in a side wall of a concave portion, formed in the interlayer insulating film on a diaphragm. Accordingly, each depth of a first concave portion and a second concave portion, which form the concave portion, is reduced, and coatability of the insulating film for the stress adjustment, which covers a side wall and a bottom face of the concave portion, is improved.
    • 在通过形成深度来进行应力调节时,在包括形成在同一衬底上的检测部分和电路部分的热流体流量传感器中,防止了由于绝缘膜中产生裂纹而导致的热流体流量传感器的可靠性降低 在检测部分中的层间绝缘膜中形成凹陷部分,并在其上形成具有拉应力的绝缘膜。 作为其手段,在形成于隔膜上的层间绝缘膜中的凹部的侧壁中设置阶梯状的台阶。 因此,形成凹部的第一凹部和第二凹部的深度减小,并且覆盖凹部的侧壁和底面的用于应力调整的绝缘膜的可涂布性为 改进。