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21. 发明授权

EP2441170B1 RÉSONATEUR ÉLECTROMÉCANIQUE A ANCRAGE RÉSONANT 有权
标题翻译：与谐振悬挂机电谐振器
公开(公告)号：EP2441170B1
公开(公告)日：2015-07-22
申请号：EP10724796.7
申请日：2010-06-07
申请人： Commissariat à l'Énergie Atomique et aux Énergies Alternatives
发明人： HENTZ, Sébastien , ARCAMONE, Julien
IPC分类号： H03H9/02 , H03H9/24 , H03H3/007 , G01C19/56
CPC分类号： H03H9/02338 , H03H3/0072 , H03H9/2436 , H03H2009/02385 , H03H2009/0244 , H03H2009/02503 , H03H2009/02527 , H03H2009/2442

22. 发明公开

EP2676366A1 NOVEL MICROMECHANICAL DEVICES 有权转让
标题翻译：新的微机械装置
公开(公告)号：EP2676366A1
公开(公告)日：2013-12-25
申请号：EP12747759.4
申请日：2012-02-17
申请人： Teknologian Tutki Muskeskus VTT.
发明人： PENSALA, Tuomas , JAAKKOLA, Antti , GANCHENKOVA, Maria , PRUNNILA, Mika , KIIHAMÄKI, Jyrki
IPC分类号： H03H9/02 , H03H3/007 , B81B3/00
CPC分类号： H03H9/02448 , B81B3/0078 , B81B2201/0271 , H01L41/18 , H03H3/0072 , H03H3/0076 , H03H9/2405 , H03H9/2447 , H03H2009/02503 , H03H2009/02519 , H03H2009/241 , H03H2009/2442 , Y10T29/42
摘要： The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element (16) made of semiconductor material comprising n-type doping agent and excitation or sensing means (10, 14) functionally connected to said oscillating or deflecting element (16). According to the invention, the oscillating or deflecting element (16) is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.

23. 发明公开

EP2569862A1 MICROELECTROMECHANICAL RESONATOR AND A METHOD FOR PRODUCING THE SAME 有权转让
标题翻译：微机电共振器及相应方法
公开(公告)号：EP2569862A1
公开(公告)日：2013-03-20
申请号：EP11722749.6
申请日：2011-05-05
申请人： Teknologian Tutkimuskeskus VTT
发明人： PENSALA, Tuomas , JAAKKOLA, Antti
IPC分类号： H03H3/007 , H03H9/24
CPC分类号： H03H3/0076 , H03H9/1057 , H03H9/2436 , H03H2009/02503 , H03H2009/2442
摘要： The invention relates to temperature compensated micro-electro-mechanical (MEMS) resonators (300) preferably made of silicon. Prior art MEMS resonators have a significant temperature coefficient of resonance frequency, whereby it is difficult to achieve a sufficiently good frequency stability. The inventive MEMS resonator has a resonance plate (310) which resonates in Lamé mode. The resonance plate is p+ doped material, such as silicon doped with boron, and the concentration of the p+ doping is such that the plate has a temperature coefficient of resonance frequency near to zero. The tensile stress and the second order temperature coefficient can further be reduced by doping the plate with germanium.

24. 发明公开

EP2484008A1 A MICROMECHANICAL RESONATOR 有权转让
标题翻译：激光共振器
公开(公告)号：EP2484008A1
公开(公告)日：2012-08-08
申请号：EP10821619.3
申请日：2010-09-27
申请人： Teknologian tutkimuskeskus VTT
发明人： OJA, Aarne , PENSALA, Tuomas , MELTAUS, Johanna
IPC分类号： H03H9/02 , H03H3/007 , H03H3/013 , B81B7/00 , B81B3/00
CPC分类号： H03H9/02259 , B81B3/0081 , B81B2201/0271 , H03H3/0076 , H03H9/02338 , H03H9/02448 , H03H9/2436 , H03H9/2452 , H03H9/2463 , H03H2003/027 , H03H2003/0407 , H03H2009/02496 , H03H2009/02503 , H03H2009/02511 , H03H2009/241 , H03H2009/2442
摘要： The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f
o , coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).

25. 发明公开

EP2443745A1 METHODS OF FORMING MICROMECHANICAL RESONATORS HAVING HIGH DENSITY TRENCH ARRAYS THEREIN THAT PROVIDE PASSIVE TEMPERATURE COMPENSATION 审中-公开
标题翻译：用于生产微型机械谐振器高密度抓斗的安排无源温度补偿
公开(公告)号：EP2443745A1
公开(公告)日：2012-04-25
申请号：EP10726747.8
申请日：2010-06-04
申请人： Georgia Tech Research Corporation
发明人： AYAZI, Farrokh , TABRIZIAN, Roozbeh , CASINOVI, Giorgio
IPC分类号： H03H3/007 , H03H9/02
CPC分类号： H03H3/0076 , H03H9/02448 , H03H2009/2442 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： A method of forming a micromechanical resonator includes forming a resonator body (12) anchored to a substrate (10) by at least a first anchor (12a, 12b). This resonator body may include a semiconductor or other first material having a negative temperature coefficient of elasticity (TCE). A two-dimensional array of spaced-apart trenches (14) are provided in the resonator body. These trenches may be filled with an electrically insulating or other second material (16a) having a positive TCE. The array of trenches may extend uniformly across the resonator body, including regions in the body that have relatively high and low mechanical stress during resonance. This two-dimensional array (or network) of trenches can be modeled as a network of mass-spring systems with springs in parallel and/or in series with respect to a direction of a traveling acoustic wave within the resonator body during resonance.

26. 发明授权

EP2291910B1 MEMS RESONATOR FOR FILTERING AND MIXING 有权
标题翻译：用于过滤和混合的MEMS谐振器
公开(公告)号：EP2291910B1
公开(公告)日：2011-11-09
申请号：EP09766291.0
申请日：2009-06-18
申请人： NXP B.V.
发明人： STEENEKEN, Peter, Gerard , VAN BEEK, Jozef, T.M , REIMANN, Klaus
IPC分类号： H03D7/00
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，所述微机电系统包括谐振器; 致动电极; 和第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并且包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移是其被机械频率响应滤波并且改变第一检测电极的电特性的值。该方法还包括将第二交变电压信号施加到第一检测电极，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

27. 发明公开

EP1797395A1 RESONATEUR A MASSES OSCILLANTES 审中-公开
标题翻译： RESONATEUR A A MASSES OSCILLANTES
公开(公告)号：EP1797395A1
公开(公告)日：2007-06-20
申请号：EP05810750.9
申请日：2005-10-05
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人： DELEVOYE, Elisabeth
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , H03H9/02275 , H03H9/02338 , H03H9/2405 , H03H9/2431 , H03H2009/02354 , H03H2009/02503 , H03H2009/2442
摘要： The suspension and coupling beams (14, 15, 16, 17) of the oscillating masses (11, 12) in a device used for example as rate gyro and comprising oscillating masses (11, 12) form a single and continuous system allowing compact construction of the device. Preferably, a junction beam (16) surrounds the two oscillating masses.
摘要翻译：振荡质量体（11,12）在例如用作速率陀螺仪并包括振荡质量体（11,12）的装置中的悬挂梁和耦合梁（14,15,16,17）形成单个且连续的系统，从而允许紧凑的结构的设备。优选地，接合梁（16）围绕两个振动质量。

28. 发明公开

EP3202035A1 TEMPERATURE COMPENSATED PLATE RESONATOR 有权
标题翻译：温度补偿板谐振器
公开(公告)号：EP3202035A1
公开(公告)日：2017-08-09
申请号：EP15786990.0
申请日：2015-10-02
申请人： Teknologian Tutkimuskeskus VTT OY
发明人： JAAKKOLA, Antti , PEKKO, Panu , PRUNNILA, Mika , PENSALA, Tuomas
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/17 , H01L41/18 , H03H9/02448 , H03H9/2436 , H03H2009/02503 , H03H2009/02527 , H03H2009/2442
摘要： The invention relates to a microelectromechanical resonator device comprising a support structure and a semiconductor resonator plate doped to a doping concentration with an n-type doping agent and being capable of resonating in a width-extensional resonance mode. In addition, there is at least one anchor suspending the resonator plate to the support structure and an actuator for exciting the width-extensional resonance mode into the resonator plate. According to the invention, the resonator plate is doped to a doping concentration of 1.2*1020 cm−3 or more and has a shape which, in combination with said doping concentration and in said width-extensional resonance mode, provides the second order temperature coefficient of frequency (TCF2) to be 12 ppb/C2 or less at least at one temperature. Several practical implementations are presented.
摘要翻译：微机电谐振器装置技术领域本发明涉及一种微电子机械谐振器装置，其包括支撑结构和利用n型掺杂剂掺杂到掺杂浓度并且能够在宽度 - 拉伸谐振模式下谐振的半导体谐振器板。此外，至少有一个锚定件将谐振器板悬挂到支撑结构上，以及一个致动器，用于将宽度 - 拉伸谐振模式激励到谐振器板中。根据本发明，谐振器板被掺杂至1.2×1020cm-3或更高的掺杂浓度，并且具有这样的形状，其与所述掺杂浓度结合并且在所述宽度 - 拉伸谐振模式中提供二阶温度系数频率（TCF2）至少在一个温度下为12ppb / C2或更低。介绍了几个实际的实现。

29. 发明授权

EP2707953B1 MICROMECHANICAL DEVICE 有权转让
标题翻译：微机械装置
公开(公告)号：EP2707953B1
公开(公告)日：2016-04-13
申请号：EP12786090.6
申请日：2012-05-11
申请人： Teknologian tutkimuskeskus VTT Oy
发明人： PRUNNILA, Mika , JAAKKOLA, Antti , PENSALA, Tuomas
IPC分类号： H03H9/02 , H03H9/24 , B81B3/00
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442

30. 发明授权

EP2569862B1 MICROELECTROMECHANICAL RESONATOR AND A METHOD FOR PRODUCING THE SAME 有权转让
标题翻译：微机电共振器及相应方法
公开(公告)号：EP2569862B1
公开(公告)日：2015-04-08
申请号：EP11722749.6
申请日：2011-05-05
申请人： Teknologian Tutkimuskeskus VTT
发明人： PENSALA, Tuomas , JAAKKOLA, Antti
IPC分类号： H03H3/007 , H03H9/24
CPC分类号： H03H3/0076 , H03H9/1057 , H03H9/2436 , H03H2009/02503 , H03H2009/2442

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