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    • 29. 发明公开
    • Semiconductor device fabrication method
    • 半导体器件制造方法
    • EP1458021A2
    • 2004-09-15
    • EP04251084.2
    • 2004-02-26
    • Shinko Electric Industries Co., Ltd.
    • Sunohara, MasahiroMurayama, Kei
    • H01L21/784H01L21/68
    • H01L21/6835H01L21/67092H01L21/67132H01L21/6836H01L21/78H01L2221/68322H01L2221/68327H01L2221/68331
    • A semiconductor device fabrication method for reliably separating diced semiconductor chips (15) from a dicing tape (10) without damaging the diced semiconductor chip. The method includes the steps of: attaching a wafer (11) on a dicing tape; dicing the wafer., thereby forming divided semiconductor chips; and separating the semiconductor chips from the dicing tape, wherein the step of separating includes the steps of: providing a hollow sheet (16A, 16B, 16C) having at least one aperture (18) corresponding to the semiconductor chips between the semiconductor chips attached on the dicing tape and a porous plate (21) coupled to a vacuum source (23); sucking the semiconductor chips to the porous plate via the hollow sheet by driving the vacuum source; and separating the dicing tape from the semiconductor chips under a condition where the semiconductor chips are being sucked to the porous plate.
    • 一种半导体器件制造方法,用于可靠地从切割带(10)分离切割的半导体芯片(15)而不损坏切割的半导体芯片。 该方法包括以下步骤:将晶片(11)附着在切割带上; 切割晶片,由此形成分割的半导体芯片; 以及从所述切割带分离所述半导体芯片,其中所述分离步骤包括以下步骤:提供具有对应于所述半导体芯片之间的至少一个孔(18)的中空片(16A,16B,16C) 切割带和耦合到真空源(23)的多孔板(21); 通过驱动真空源经由中空片将半导体芯片吸引到多孔板; 以及在半导体芯片被吸附到多孔板的情况下将切割带与半导体芯片分离。