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21. 发明授权

EP2208020B1 DREHRATENSENSOR 有权
公开(公告)号：EP2208020B1
公开(公告)日：2013-08-21
申请号：EP08805011.7
申请日：2008-10-02
申请人： Robert Bosch GmbH
发明人： NEUL, Reinhard , CLASSEN, Johannes , OHMS, Torsten , KUHLMANN, Burkhard , FRANKE, Axel , KOHN, Oliver , MEISEL, Daniel Christoph , HAUER, Joerg , GOMEZ, Udo-Martin , KEHR, Kersten
IPC分类号： G01C19/574
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44

22. 发明公开

EP2433094A1 SELBSTTEST FÜR DREHRATENSENSOREN 有权
标题翻译： SELF TEST旋转速率传感器
公开(公告)号：EP2433094A1
公开(公告)日：2012-03-28
申请号：EP10713897.6
申请日：2010-04-06
申请人： Robert Bosch GmbH
发明人： BAUER, Wolfram , CLASSEN, Johannes , WILLIG, Rainer , MEIER, Matthias , KUHLMANN, Burkhard , REIMANN, Mathias , ESCH, Ermin , SCHWARZ, Hans-Dieter , VEITH, Michael , LANG, Christoph , GOMEZ, Udo-Martin
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C25/00 , G01C19/56 , G01C19/5726
摘要： A yaw rate sensor (10) comprises a movable mass structure (12) and a drive component (13) which is suitable to set the movable mass structure (12) in motion (14), and an evaluation component (15) which is suitable to register a reaction (40) of the movable mass structure (12) to a yaw rate (Ω). A method for the functional testing of a yaw rate sensor (10) comprises the following steps: driving a movable mass structure (12), feeding a test signal (42) into a quadrature control loop (44) at a feed location (48) of the quadrature control loop (44), feeding back a deflection (40) of the movable mass structure (12), registering an extent of the feedback of the movable mass structure (12), reading a response signal (47) from the quadrature control loop (44). In the yaw rate sensor (10) and also in the method, provision is made to read the response signal (47) in relation to a processing direction (45) of the test signal (42) between the feed location (48) for a test signal (42) and an actuating element (38) for feeding back a deflection (40) of the movable mass structure (12).

23. 发明公开

EP2389561A1 DREHRATENSENSOR 有权
公开(公告)号：EP2389561A1
公开(公告)日：2011-11-30
申请号：EP09793499.6
申请日：2009-12-03
申请人： Robert Bosch GmbH
发明人： CLASSEN, Johannes
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5747
摘要： A yaw rate sensor comprises a substrate having a substrate surface, a first moveable element which is arranged above the substrate surface and has a drive frame and a first detection mass, a first electrode which is arranged at a distance below the first detection mass and connected to the substrate surface, and a second electrode which is arranged at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected via at least one drive spring to the substrate, the detection mass is connected via at least one detection spring to the drive frame, the first moveable element can be excited to perform a driving oscillation parallel to the substrate surface, and the first detection mass can be deflected perpendicular to the substrate surface.
摘要翻译：偏航率传感器包括具有基板表面的基板，布置在基板表面上方且具有驱动框架和第一检测质量的第一可移动元件，第一电极，第一电极布置在第一检测质量下方一定距离处并且连接以及第二电极，该第二电极被布置在第一检测质量之上的一定距离处并被连接到基板表面。驱动框架经由至少一个驱动弹簧连接到基板，检测质量块经由至少一个检测弹簧连接到驱动框架，第一可移动元件可被激励以执行平行于基板表面的驱动振荡，以及第一检测质量可以垂直于衬底表面偏转。

24. 发明公开

EP2227674A1 DREHRATENSENSOR UND VERFAHREN ZUM BETRIEB EINES DREHRATENSENSORS 审中-公开
标题翻译：旋转速率传感器和方法操作旋转速率传感器
公开(公告)号：EP2227674A1
公开(公告)日：2010-09-15
申请号：EP08860930.0
申请日：2008-11-10
申请人： Robert Bosch GmbH
发明人： CLASSEN, Johannes , GRACKI, Sebastian
IPC分类号： G01C19/56
CPC分类号： G01C19/5755
摘要： The invention relates to a yaw rate sensor, having a substrate and a first Coriolis element, excitation means being provided for the oscillation excitement of the first Coriolis element in a first direction, first detection means being provided for the detection of a first deflection of the first Coriolis element in a third direction that is substantially perpendicular to the first direction, characterized in that the first Coriolis element is configured as a rocker.

25. 发明公开

EP2100151A2 MIKROMECHANISCHER Z-SENSOR 失效
公开(公告)号：EP2100151A2
公开(公告)日：2009-09-16
申请号：EP07821328.7
申请日：2007-10-15
申请人： Robert Bosch GmbH
发明人： CLASSEN, Johannes , TEBJE, Lars
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0831
摘要： The invention relates to a micromechanical Z-sensor with a given sensitivity, a torsion spring (100) and a seismic auxiliary mass (40), the torsion spring (100) having a spring width (105) and the seismic auxiliary mass (40) having webs (110) of a web width (115). The basis of the invention is that the web width (115) is selected to be smaller than the spring width (105).
摘要翻译：本发明涉及具有给定灵敏度的微机械Z传感器，扭簧（100）和地震辅助质量（40），扭簧（100）具有弹簧宽度（105）和地震辅助质量（40）具有幅材宽度（115）的幅材（110）。本发明的基础是，幅材宽度（115）被选择为小于弹簧宽度（105）。

26. 发明公开

EP2049871A1 DREHRATENSENSOR 有权
公开(公告)号：EP2049871A1
公开(公告)日：2009-04-22
申请号：EP07729969.1
申请日：2007-06-06
申请人： Robert Bosch GmbH
发明人： HAUER, Joerg , GOMEZ, Udo-Martin , NEUL, Reinhard , KEHR, Kersten , CLASSEN, Johannes , FRANKE, Axel , QUANDER, Marco
IPC分类号： G01C19/56 , G01P9/04
CPC分类号： G01C19/5762 , G01C19/5747
摘要： The present invention relates to a rotation-rate sensor having a drive mass element (13) which is arranged above a surface of a substrate and can be caused to oscillate by means of a drive device (18) along a first axis (y) which runs along the surface, having a detection mass element (14) which can be deflected under the influence of Coriolis force along a second axis (z) which runs at right angles to the surface, and having a detection device which can detect the deflection of the detection mass element (14) along the second axis (z). The arrangement of the second axis (z) at right angles to the surface allows the rotation-rate sensor to be integrated on a chip together with further rotation-rate sensors which are suitable for detection of rotations about rotation axes in other directions.
摘要翻译：本发明涉及一种具有驱动质量元件（13）的转速传感器，该驱动质量元件布置在基板的表面上方并且可以通过驱动装置（18）沿第一轴线（y）振动，该第一轴线沿着表面延伸，具有能够在科里奥利力的影响下沿着与表面成直角延伸的第二轴（z）偏转的检测质量元件（14），并且具有检测装置，该检测装置能够检测沿第二轴线（z）的检测质量元件（14）。与表面成直角的第二轴线（z）的布置允许旋转速率传感器与另外的旋转速率传感器一起集成在芯片上，所述另外的旋转速度传感器适于检测围绕其他方向的旋转轴线的旋转。

27. 发明公开

EP1468248A1 DREHRATENSENSOR 审中-公开
公开(公告)号：EP1468248A1
公开(公告)日：2004-10-20
申请号：EP02774412.7
申请日：2002-09-25
申请人： ROBERT BOSCH GMBH
发明人： WILLIG, Rainer , FRANZ, Jochen , KUHLMANN, Burkhard , HAUER, Joerg , GOMEZ, Udo-Martin , MAURER, Dieter , DOERING, Christian , BAUER, Wolfram , BISCHOF, Udo , NEUL, Reinhard , CLASSEN, Johannes , LANG, Christoph , FREY, Jens
IPC分类号： G01C19/56 , G01P3/14
CPC分类号： G01C19/5747
摘要： The invention relates to a rotational rate sensor comprising a substrate and a Coriolis element (2a, 2b), said Coriolis element (2a, 2b) being arranged over a surface of a substrate. According to the invention, stimulation means (12a, 13a, 12b, 13b) are provided for stimulating the Coriolis element (2a, 2b) in such a way that it oscillates parallel to a first axis (X); detection means (15a, 16a, 15b, 16b, 17) are provided for detecting a deviation of the Coriolis element (2a, 2b), caused by a Coriolis force in a second axis (Y) which is perpendicular to the first axis; the first and second axes (X, Y) are parallel to the surface of the substrate; sensor elements (1a, 1b, 2a, 2b, 3a, 3b) are provided which are at least partially mobile in relation to the substrate; and force-mediating means (19, 20) are provided for mediating a static force between the substrate and at least one of the sensor elements (1a, 1b, 2a, 2b, 3a, 3b).
摘要翻译：本发明涉及一种旋转速率传感器，其包括衬底和科里奥利元件（2a，2b），所述科里奥利元件（2a，2b）布置在衬底的表面上。根据本发明，（12A，13A，12B，13B）被提供用于刺激科里奥利元件刺激装置（2a，2b）的，它平行于振荡的第一轴线（X）这样的方式; 提供了用于检测科里奥利元件的偏差检测装置（15A，16A，15B，16B，17）（2A，2B），所引起的第二轴（Y）垂直于所述第一轴线的科里奥利力; 第一和第二轴线（X，Y）平行于基板的表面; 提供传感器元件（1a，1b，2a，2b，3a，3b），所述传感器元件相对于所述衬底至少部分可移动; 和力介导装置（19,20），用于调节衬底和传感器元件（1a，1b，2a，2b，3a，3b）中的至少一个之间的静态力。

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