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191. 发明授权

EP0744641B1 An illumination system and method employing a deformable mirror and diffractive optical elements 失效
$An illumination system and method employing a deformable mirror and diffractive optical elements$
标题翻译：照明系统和方法，其使用可变形反射镜和衍射光学元件
公开(公告)号：EP0744641B1
公开(公告)日：2001-09-05
申请号：EP96107790.6
申请日：1996-05-15
申请人： SVG LITHOGRAPHY SYSTEMS, INC.
发明人： Stanton, Stuart
IPC分类号： G02B26/06 , G03F7/20
CPC分类号： G03F7/702 , G02B26/06 , G02B26/0825 , G02B27/48 , G03F7/70141 , G03F7/70266 , G03F7/70358

192. 发明公开

EP1060441A1 IMPROVED PATTERN GENERATOR 有权
标题翻译：改进的图形发生器
公开(公告)号：EP1060441A1
公开(公告)日：2000-12-20
申请号：EP99908054.2
申请日：1999-03-02
申请人： MICRONIC LASER SYSTEMS AB
发明人： SANDSTRÖM, Torbjörn
IPC分类号： G03F7/20 , G03F7/207 , G02B26/06
CPC分类号： G03F7/70725 , B23K26/032 , B23K26/064 , B23K26/0648 , B41J2/465 , G02B26/0833 , G02B26/0841 , G02B27/0043 , G02B27/4205 , G03F7/2022 , G03F7/70041 , G03F7/70283 , G03F7/70291 , G03F7/704 , G03F7/70475 , G09G3/2007 , G09G3/346 , H04N1/195 , H04N5/7458 , H04N2201/0414
摘要： The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask, a display panel or a microoptical device. The apparatus comprises a radiation source and a spatial modulator (SLM) having a multitude of modulating elements (pixels). It further comprises an electronic data processing and delivery system feeding drive signals to the modulator, a precision mechanical system for moving said workpiece and an electronic control system coordinating the movement of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns. According to the invention the drive signals can set a modulating element to a number of states larger than two.

193. 发明授权

EP0518107B1 Piston error estimation method for segmented aperture optical systems while observing arbitrary unknown extended scenes 失效
标题翻译：用于估计具有分段开口同时观察任意的，未知的，扩展的场景中的光学系统的往复运动活塞的失调的方法
公开(公告)号：EP0518107B1
公开(公告)日：1999-12-15
申请号：EP92108751.6
申请日：1992-05-24
申请人： RAYTHEON COMPANY
发明人： Ellerbroek, Brent L. , Rafanelli, Gerard L.
IPC分类号： G02B26/06 , G01J9/00
CPC分类号： G02B26/06 , G01M11/005

194. 发明公开

EP0840159A3 Image forming apparatus 失效
公开(公告)号：EP0840159A3
公开(公告)日：1999-06-16
申请号：EP97308803.2
申请日：1997-11-03
申请人： HAMAMATSU PHOTONICS K.K. , Riso National Laboratory
发明人： Toyoda, Haruyoshi , Gluckstad, Jesper
IPC分类号： G02B27/52 , G02B26/06
CPC分类号： G02B27/46 , G02B27/52 , G03H2225/25 , G03H2225/32 , G06E3/00 , G06E3/005
摘要： An image H(x, y) for displaying a target image G(x, y) is displayed on a liquid-crystal display panel and illumination light from an illumination light source is made to pass therethrough to form an image on a PALSLM. Read light hv is radiated to the PALSLM and a phase-modulated light image α(x, y) read out of the PALSLM is subjected to Fourier transform by a lens. A phase contrast filter gives a predetermined phase shift to only the zero-order light component of Fourier light image α f (x, y). The phase-shifted light image is subjected to inverse Fourier transform by a lens to project an output image O(x, y) to an output plane. A light image O'(x, y) branched by a beam sampler is picked up by a pickup device and an evaluation value calculating unit evaluates conformity between the image O(x, y) and the image G(x, y). A control unit performs feedback control of optical characteristics of the illumination light source, PALSLM, and phase contrast filter, based on the evaluation result.

195. 发明公开

EP0840159A2 Image forming apparatus 失效
标题翻译：成像设备
公开(公告)号：EP0840159A2
公开(公告)日：1998-05-06
申请号：EP97308803.2
申请日：1997-11-03
申请人： HAMAMATSU PHOTONICS K.K. , Riso National Laboratory
发明人： Toyoda, Haruyoshi , Gluckstad, Jesper
IPC分类号： G02B27/52 , G02B26/06
CPC分类号： G02B27/46 , G02B27/52 , G03H2225/25 , G03H2225/32 , G06E3/00 , G06E3/005
摘要： An image H(x, y) for displaying a target image G(x, y) is displayed on a liquid-crystal display panel and illumination light from an illumination light source is made to pass therethrough to form an image on a PALSLM. Read light hv is radiated to the PALSLM and a phase-modulated light image α(x, y) read out of the PALSLM is subjected to Fourier transform by a lens. A phase contrast filter gives a predetermined phase shift to only the zero-order light component of Fourier light image α f (x, y). The phase-shifted light image is subjected to inverse Fourier transform by a lens to project an output image O(x, y) to an output plane. A light image O'(x, y) branched by a beam sampler is picked up by a pickup device and an evaluation value calculating unit evaluates conformity between the image O(x, y) and the image G(x, y). A control unit performs feedback control of optical characteristics of the illumination light source, PALSLM, and phase contrast filter, based on the evaluation result.
摘要翻译：在液晶显示面板上显示用于显示目标图像G（x，y）的图像H（x，y），并使来自照明光源的照明光通过，以在PALSLM上形成图像。读取光hv辐射到PALSLM，并且从PALSLM读出的相位调制光图像α（x，y）通过透镜进行傅立叶变换。相位对比滤波器仅给出傅立叶光图像αf（x，y）的零阶光分量的预定相移。相移光图像通过透镜进行傅立叶逆变换以将输出图像O（x，y）投影到输出平面。由拾取装置拾取由光束采样器分支的光图像O'（x，y），并且评估值计算单元评估图像O（x，y）和图像G（x，y）之间的一致性。控制单元基于评估结果执行照明光源，PALSLM和相位对比滤波器的光学特性的反馈控制。

196. 发明公开

EP0791846A2 Optical low-pass filter and optical apparatus having the same 失效
标题翻译： Optischer Tiefpassfilter sowie optische Vorrichtung mit einem derartigen Filter
公开(公告)号：EP0791846A2
公开(公告)日：1997-08-27
申请号：EP97102878.2
申请日：1997-02-21
申请人： CANON KABUSHIKI KAISHA
发明人： Okuyama, Atsushi , Kobayashi, Shuichi , Wada, Ken
IPC分类号： G02B26/06 , G02B27/46 , G02B5/20
CPC分类号： G02B26/06 , G02B27/46
摘要： An optical low-pass filter comprises a phase advancing area which advances a phase of a wavefront of an incident pencil of rays with respect to a phase of a wavefront of a center of the incident pencil of rays, and a phase retarding area which retards the phase of the wavefront of the incident pencil of rays with respect to the phase of the wavefront of the center of the incident pencil of rays, the phase advancing area and the phase retarding area alternately existing in the optical low-pass filter, and an optical apparatus comprises an image forming optical system, an image pickup element, and such an optical low-pass filter.
摘要翻译：光学低通滤波器包括相位前进区域，该相位前进区域相对于入射的光线中心的波前的相位推进入射的光线的波前的相位，以及相位延迟区域，其延迟相对于入射光线中心的波前相位，交替存在于光学低通滤波器中的相位推进区域和相位延迟区域的入射光线的波前相位，以及光学装置包括图像形成光学系统，图像拾取元件和这种光学低通滤波器。

197. 发明公开

EP0779530A4 ADAPTIVE OPTICAL MODULE 失效
标题翻译：适应ABLE光模块
公开(公告)号：EP0779530A4
公开(公告)日：1997-06-17
申请号：EP96926678
申请日：1996-06-17
申请人： YALESTOWN CORP NV
发明人： SAFRONOV ANDREI GENNADIEVICH
IPC分类号： G01J9/00 , G02B26/06
CPC分类号： G02B26/06 , G01J9/00
摘要： The invention pertains to the field of controllable optics and can be used for manipulating a radiation wave front or for correcting phase distortions in optical equipment and in a wide range of systems including industrial laser systems, optical telescopes of different spectral ranges, and optical guidance and tracking systems. The invention in essence lies in improving the range and precision of the phase distortion correction while also increasing the maximum permissible power of the radiation used and simplifying the adaptive optical system. This has been achieved by using in the adaptive optical module a dynamic adjusting head in which is mounted a deformable dimorphic mirror, coolable if necessary, in the form of a semi-passive dimorphic structure containing a system of multiple-layer piezo-elements, a radiation detector in the form of a hexagonal photodiode lattice and hexagonal lens lattice. All the optical elements of the module including the radiation detector can be fitted in the same housing provided with inlet and outlet optical windows. In addition, the proposed design increases the sensitivity and reliablility of the adaptive optical module, and significantly increases its operational potential.

198. 发明公开

EP0642048A1 Spiegelstützsystem mit Kraftmesszellen 失效
标题翻译： Spiegelstützsystemmit Kraftmesszellen。
公开(公告)号：EP0642048A1
公开(公告)日：1995-03-08
申请号：EP94112859.7
申请日：1994-08-18
申请人： Carl Zeiss
发明人： Meier, Hans-J.
IPC分类号： G02B7/182 , G02B26/06 , G02B26/08
CPC分类号： G02B7/183
摘要： Die Erfindung betrifft eine Spiegellagerung zum Abstützen eines Spiegels eines Spiegelteleskops, bei welcher die Lagerung in drei Gruppen erfolgt. Jede Gruppe besteht aus einem festen Lager und beliebig vielen kraftvariablen Betätigungsgliedern. außerdem ist jedes Lager und jedes Betätigungsglied mit einer Kraftmeßdose ausgestattet.
Bei einer möglichen Kräfteverlagerung am Spiegel wird das Signal des festen Lagerpunktes einer Gruppe jeweils mit dem Signal eines kraftvariablen Betätigungsgliedes verglichen und die mögliche Differenz der beiden Signale für einen Nachregelungsvorgang verwendet.
摘要翻译：本发明涉及一种用于支撑反射望远镜（反射镜望远镜）的反射镜的反射镜安装件，其中以三组进行安装。每个组包括固定轴承和任何数量的可变力的致动构件。此外，每个轴承和每个致动构件设置有称重传感器。在反射镜上发生可能的力位移（力移动）的情况下，将组中的固定轴承点的信号在每种情况下与可变力致动构件的信号进行比较，并且两个信号之间的可能的差异为用于调整操作（重新调整）。

199. 发明公开

EP0546811A1 Simple adaptive optical system 失效
标题翻译： Einfach适应性Optisches系统。
公开(公告)号：EP0546811A1
公开(公告)日：1993-06-16
申请号：EP92311213.0
申请日：1992-12-09
申请人： Hughes Aircraft Company
发明人： Kittell, David H.
IPC分类号： G02B26/06
CPC分类号： G02B26/06 , G01J9/00
摘要： A system for correcting wavefront distortion includes an eight channel deformable mirror 11 attached to a two-axis, tip/tilt mount 12 . The deformable mirror 11 reflects an incoming telescopic wavefront 10 onto a beamsplitter 14 . The beamsplitter 14 divides the reflected telescopic wavefront 13 into two separate beams 15 , 20 . The beam 20 reflected by the beamsplitter 14 may be used for experimentation and measurement. The beam 15 transmitted by the beamsplitter 14 is directed toward a modified Hartmann-Shack wavefront sensor 16 . The modified Hartmann-Shack sensor 16 detects the slope of the wavefront at several locations across this transmitted beam 15 and provides analog signals 17 representing these slopes to a series of actuator drive circuits 18 . The actuator drive circuits 18 provide excitation signals 19 to actuators 22 , 30 on the deformable mirror 11 and the two-axis, tip/tilt mount 12 . These actuators 22 , 30 facilitate the reforming and repositioning of the deformable mirror 11 so as to correct any incoming wavefront 10 distortion.
摘要翻译：用于校正波前失真的系统包括附接到双轴尖端/倾斜底座12的八通道可变形反射镜11.可变形反射镜11将进入的伸缩波前10反射到分束器14.分束器14将反射的望远镜波前13 由分束器14反射的光束20可用于实验和测量。由分束器14发送的光束15指向修改后的Hartmann-Shack波前传感器16.修改的Hartmann-Shack传感器16检测该透射光束15上的多个位置处的波前的斜率，并将代表这些斜率的模拟信号17提供给一系列致动器驱动电路18.致动器驱动电路18向可变形反射镜11上的致动器22,30和两轴尖端/倾斜支架12提供激励信号19。这些致动器22,30有利于重新定位和重新定位可变形反射镜11，以便校正任何进入的波前10失真。

200. 发明公开

EP0438664A3 Segmented mirror and method of controlling the same 失效
标题翻译：分光镜及其控制方法
公开(公告)号：EP0438664A3
公开(公告)日：1992-05-06
申请号：EP90122478.2
申请日：1990-11-26
申请人： Kaman Aerospace Corporation
发明人： Ulich, Bobby Lee , Pflibsen, Kent
IPC分类号： G02B7/182 , G02B26/06
CPC分类号： G02B26/06 , G02B5/08
摘要： A segmented mirror control system (10) is presented wherein an array of structural elements (e.g. mirrors) (10) can be actively positioned to maintain an accurate pre-determined overall shape. The present invention is "active" and so may be characterized as an Active Segmented Mirror Control "ASMC". The segments of a mirror or the reflecting panels, in for example, a radiotelescope, may be continually adjusted with ASMC to provide an accurate reflecting mirror of very large diameter even when disturbed by external forces. ASMC is a closed loop control system. That is, an array of sensors (16) is first used to measure differential position errors. This data is then processed to determine position actuator (14) commands. Finally, these commands are used to move the segments until the sensors are nulled and the desired shape is obtained.

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