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191. 发明公开

EP1199026A3 Aberration-free delivery system 有权
标题翻译：无像差输送系统
公开(公告)号：EP1199026A3
公开(公告)日：2003-07-02
申请号：EP01304460.7
申请日：2001-05-21
申请人： 20/10 Perfect Vision Optische Geraete GmbH
发明人： Bille, Josef , Loesel, Frieder
IPC分类号： A61B3/10 , G02B26/06
CPC分类号： A61B3/10
摘要： A device and method for establishing an aberration-free delivery system for use in evaluating an optical specimen includes a light source for directing light through the system and along a beam path toward the specimen. A first beam splitter is positioned on the beam path to direct light radiated from the system toward a detector for creation of a first wavefront, and for generation of a signal. In turn, the signal is used to program an active mirror that is also positioned on the beam path, to thereafter establish an aberration-free wavefront for light incident on the optical specimen. Further, a second beam splitter is positioned on the beam path for directing light reflected from the specimen toward the detector for the creation of a second wavefront having characteristics of optical aberrations in the specimen. The second wavefront is then used to further program the active mirror for analysis and evaluation of the optical specimen.

192. 发明公开

EP1210641A4 DEVICE FOR PRODUCING OPTICALLY-CONTROLLED INCREMENTAL TIME DELAYS 审中-公开
标题翻译：装置生产光学控制的增量延误时间
公开(公告)号：EP1210641A4
公开(公告)日：2003-06-11
申请号：EP00961366
申请日：2000-08-25
申请人： UNIV OHIO STATE
发明人： COLLINS STUART A , ANDERSON BETTY LISE
IPC分类号： G02B26/06 , G02B26/08 , G02B27/00 , G02B27/28 , H01Q3/26 , G02F1/03
CPC分类号： G02B27/0087 , G02B2207/117 , H01Q3/2676

193. 发明授权

EP0906586B1 PHASENMODULIERENDE MIKROSTRUKTUREN FÜR HÖCHSTINTEGRIERTE FLÄCHENLICHTMODULATOREN 失效
标题翻译：相位调制微构造FOR最大积分投光灯调节剂
公开(公告)号：EP0906586B1
公开(公告)日：2002-06-26
申请号：EP97929199.4
申请日：1997-06-17
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人： GOTTFRIED-GOTTFRIED, Ralf , KÜCK, Heinz,Dr. , KUNZE, Detlef,Dr.
IPC分类号： G02B26/06 , G02B26/08 , G09F9/37
CPC分类号： G02B26/06

194. 发明公开

EP1190272A2 DUAL STAGE DEFORMABLE MIRROR 审中-公开
标题翻译：两阶段变形镜
公开(公告)号：EP1190272A2
公开(公告)日：2002-03-27
申请号：EP01900884.6
申请日：2001-01-05
申请人： Goodrich Corporation
发明人： SHEN, Gon-Yen
IPC分类号： G02B26/06 , G02B7/188
CPC分类号： G02B26/06
摘要： Multistage stage deformable mirror structure (10) includes backup structure (12); single mirror facesheet (18) having an optical surface (18A); and, interposed between the support surface and the optical surface, an intermediate deformable structure (14) that is coupled at a first surface to the support surface through a first set of linear actuators (16). The intermediate deformable structure is coupled at a second opposing surface to the optical surface through a second set of linear actuators (20). The optical surface assumes a shape that is a combination of the deformation imparted to the intermediate deformable structure by the first set of linear actuators, and the deformation imparted to it by the second set of linear actuators. The first set of linear actuators have a wider dynamic range, the optical surface is deformed so as to simultaneously compensate an incident wavefront for large/small magnitude and low/high temporal/spatial frequency wavefront errors.

195. 发明授权

EP0744641B1 An illumination system and method employing a deformable mirror and diffractive optical elements 失效
$An illumination system and method employing a deformable mirror and diffractive optical elements$
标题翻译：照明系统和方法，其使用可变形反射镜和衍射光学元件
公开(公告)号：EP0744641B1
公开(公告)日：2001-09-05
申请号：EP96107790.6
申请日：1996-05-15
申请人： SVG LITHOGRAPHY SYSTEMS, INC.
发明人： Stanton, Stuart
IPC分类号： G02B26/06 , G03F7/20
CPC分类号： G03F7/702 , G02B26/06 , G02B26/0825 , G02B27/48 , G03F7/70141 , G03F7/70266 , G03F7/70358

196. 发明公开

EP1060441A1 IMPROVED PATTERN GENERATOR 有权
标题翻译：改进的图形发生器
公开(公告)号：EP1060441A1
公开(公告)日：2000-12-20
申请号：EP99908054.2
申请日：1999-03-02
申请人： MICRONIC LASER SYSTEMS AB
发明人： SANDSTRÖM, Torbjörn
IPC分类号： G03F7/20 , G03F7/207 , G02B26/06
CPC分类号： G03F7/70725 , B23K26/032 , B23K26/064 , B23K26/0648 , B41J2/465 , G02B26/0833 , G02B26/0841 , G02B27/0043 , G02B27/4205 , G03F7/2022 , G03F7/70041 , G03F7/70283 , G03F7/70291 , G03F7/704 , G03F7/70475 , G09G3/2007 , G09G3/346 , H04N1/195 , H04N5/7458 , H04N2201/0414
摘要： The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask, a display panel or a microoptical device. The apparatus comprises a radiation source and a spatial modulator (SLM) having a multitude of modulating elements (pixels). It further comprises an electronic data processing and delivery system feeding drive signals to the modulator, a precision mechanical system for moving said workpiece and an electronic control system coordinating the movement of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns. According to the invention the drive signals can set a modulating element to a number of states larger than two.

197. 发明授权

EP0518107B1 Piston error estimation method for segmented aperture optical systems while observing arbitrary unknown extended scenes 失效
标题翻译：用于估计具有分段开口同时观察任意的，未知的，扩展的场景中的光学系统的往复运动活塞的失调的方法
公开(公告)号：EP0518107B1
公开(公告)日：1999-12-15
申请号：EP92108751.6
申请日：1992-05-24
申请人： RAYTHEON COMPANY
发明人： Ellerbroek, Brent L. , Rafanelli, Gerard L.
IPC分类号： G02B26/06 , G01J9/00
CPC分类号： G02B26/06 , G01M11/005

198. 发明公开

EP0840159A3 Image forming apparatus 失效
公开(公告)号：EP0840159A3
公开(公告)日：1999-06-16
申请号：EP97308803.2
申请日：1997-11-03
申请人： HAMAMATSU PHOTONICS K.K. , Riso National Laboratory
发明人： Toyoda, Haruyoshi , Gluckstad, Jesper
IPC分类号： G02B27/52 , G02B26/06
CPC分类号： G02B27/46 , G02B27/52 , G03H2225/25 , G03H2225/32 , G06E3/00 , G06E3/005
摘要： An image H(x, y) for displaying a target image G(x, y) is displayed on a liquid-crystal display panel and illumination light from an illumination light source is made to pass therethrough to form an image on a PALSLM. Read light hv is radiated to the PALSLM and a phase-modulated light image α(x, y) read out of the PALSLM is subjected to Fourier transform by a lens. A phase contrast filter gives a predetermined phase shift to only the zero-order light component of Fourier light image α f (x, y). The phase-shifted light image is subjected to inverse Fourier transform by a lens to project an output image O(x, y) to an output plane. A light image O'(x, y) branched by a beam sampler is picked up by a pickup device and an evaluation value calculating unit evaluates conformity between the image O(x, y) and the image G(x, y). A control unit performs feedback control of optical characteristics of the illumination light source, PALSLM, and phase contrast filter, based on the evaluation result.

199. 发明公开

EP0840159A2 Image forming apparatus 失效
标题翻译：成像设备
公开(公告)号：EP0840159A2
公开(公告)日：1998-05-06
申请号：EP97308803.2
申请日：1997-11-03
申请人： HAMAMATSU PHOTONICS K.K. , Riso National Laboratory
发明人： Toyoda, Haruyoshi , Gluckstad, Jesper
IPC分类号： G02B27/52 , G02B26/06
CPC分类号： G02B27/46 , G02B27/52 , G03H2225/25 , G03H2225/32 , G06E3/00 , G06E3/005
摘要： An image H(x, y) for displaying a target image G(x, y) is displayed on a liquid-crystal display panel and illumination light from an illumination light source is made to pass therethrough to form an image on a PALSLM. Read light hv is radiated to the PALSLM and a phase-modulated light image α(x, y) read out of the PALSLM is subjected to Fourier transform by a lens. A phase contrast filter gives a predetermined phase shift to only the zero-order light component of Fourier light image α f (x, y). The phase-shifted light image is subjected to inverse Fourier transform by a lens to project an output image O(x, y) to an output plane. A light image O'(x, y) branched by a beam sampler is picked up by a pickup device and an evaluation value calculating unit evaluates conformity between the image O(x, y) and the image G(x, y). A control unit performs feedback control of optical characteristics of the illumination light source, PALSLM, and phase contrast filter, based on the evaluation result.
摘要翻译：在液晶显示面板上显示用于显示目标图像G（x，y）的图像H（x，y），并使来自照明光源的照明光通过，以在PALSLM上形成图像。读取光hv辐射到PALSLM，并且从PALSLM读出的相位调制光图像α（x，y）通过透镜进行傅立叶变换。相位对比滤波器仅给出傅立叶光图像αf（x，y）的零阶光分量的预定相移。相移光图像通过透镜进行傅立叶逆变换以将输出图像O（x，y）投影到输出平面。由拾取装置拾取由光束采样器分支的光图像O'（x，y），并且评估值计算单元评估图像O（x，y）和图像G（x，y）之间的一致性。控制单元基于评估结果执行照明光源，PALSLM和相位对比滤波器的光学特性的反馈控制。

200. 发明公开

EP0791846A2 Optical low-pass filter and optical apparatus having the same 失效
标题翻译： Optischer Tiefpassfilter sowie optische Vorrichtung mit einem derartigen Filter
公开(公告)号：EP0791846A2
公开(公告)日：1997-08-27
申请号：EP97102878.2
申请日：1997-02-21
申请人： CANON KABUSHIKI KAISHA
发明人： Okuyama, Atsushi , Kobayashi, Shuichi , Wada, Ken
IPC分类号： G02B26/06 , G02B27/46 , G02B5/20
CPC分类号： G02B26/06 , G02B27/46
摘要： An optical low-pass filter comprises a phase advancing area which advances a phase of a wavefront of an incident pencil of rays with respect to a phase of a wavefront of a center of the incident pencil of rays, and a phase retarding area which retards the phase of the wavefront of the incident pencil of rays with respect to the phase of the wavefront of the center of the incident pencil of rays, the phase advancing area and the phase retarding area alternately existing in the optical low-pass filter, and an optical apparatus comprises an image forming optical system, an image pickup element, and such an optical low-pass filter.
摘要翻译：光学低通滤波器包括相位前进区域，该相位前进区域相对于入射的光线中心的波前的相位推进入射的光线的波前的相位，以及相位延迟区域，其延迟相对于入射光线中心的波前相位，交替存在于光学低通滤波器中的相位推进区域和相位延迟区域的入射光线的波前相位，以及光学装置包括图像形成光学系统，图像拾取元件和这种光学低通滤波器。

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