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11. 发明公开

EP1653494A2 Micro thin-film structure, MEMS switch employing such a micro thin-film, and method of fabricating them 有权
标题翻译：薄膜的微结构的MEMS开关具有这样的薄膜的微结构和对应Herstellunsverfahren
公开(公告)号：EP1653494A2
公开(公告)日：2006-05-03
申请号：EP05022713.1
申请日：2005-10-18
申请人： Samsung Electronics Co., Ltd.
发明人： Kweon, Soon-cheol , Shin, Hyung-jae , Jeon, Byung-hee , Hong, Seok-kwan , Kim, Che-heung , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H1/0036
摘要： A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.
摘要翻译：一种微薄膜结构，微机电系统（MEMS）开关，以及制造它们的方法。微薄膜结构包括具有不同的性质和顺序层叠以形成在上层和下层，worin上部和下部层之间界面处形成的至少两个薄薄膜以在至少两个方向上取向。微薄膜结构，以及形成的方法，可以被应用到一个MEMS开关的可动电极。薄膜结构可以通过通孔在下层中形成，并且在被接合在通孔的形式沉积的上层形成。可替代地，薄膜结构可以通过对下层的顶侧上形成凸起和凹陷部分，然后沉积在具有凹凸部分的下层的顶侧上的上层进行。

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