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    • 12. 发明公开
    • CHEMICAL VAPOR DEPOSITION DEVICE AND CHEMICAL VAPOR DEPOSITION METHOD
    • 化学气相沉积装置和化学气相沉积法
    • EP3321391A1
    • 2018-05-16
    • EP16824406.9
    • 2016-07-08
    • Mitsubishi Materials Corporation
    • TATSUOKA ShoYAMAGUCHI Kenji
    • C23C16/455B23B27/14
    • C23C16/455C23C16/34C23C16/45576C23C16/45578C23C16/4583
    • A chemical vapor deposition apparatus includes a reaction chamber in which a deposition material is accommodated, a gas supply tube provided in the reaction chamber, and a rotary drive device that rotates the gas supply tube around a rotation axis in the reaction chamber, in which an inside of the gas supply tube is partitioned into the first and second gas flowing sections extending along the rotation axis, a set of gas ejection ports including at least three or more the gas ejection ports disposed, lying next to each other in the circumferential direction is installed on the tube wall, and the set of gas ejection ports includes at least one of a first gas ejection port ejecting the first gas flowing through the first gas flowing section, and at least one of the second gas ejection port ejecting a second gas flowing through the second gas flowing section.
    • 本发明提供一种化学蒸镀装置,其特征在于,具备:收容蒸镀材料的反应室,设置于该反应室内的气体供给管,以及使该气体供给管围绕旋转轴在该反应室内旋转的旋转驱动装置, 所述气体供给管的内部被划分为沿所述旋转轴延伸的所述第一气体流通部和所述第二气体流通部,所述圆周方向上并排设置的包含至少三个以上所述气体喷出口的一组气体喷出口为 所述一组气体喷射口包括第一气体喷射口和第二气体喷射口中的至少一个,所述第一气体喷射口喷射流过所述第一气体流动部的所述第一气体,并且所述第二气体喷射口中的至少一个喷射第二气体流动 通过第二气体流动部分。
    • 17. 发明公开
    • SURFACE-COATED CUTTING TOOL WITH RIGID COATING LAYERS EXHIBITING EXCELLENT CHIPPING RESISTANCE
    • 表面涂层切削刀具具有刚性涂层,表现出优异的耐磨性
    • EP3269478A1
    • 2018-01-17
    • EP16764886.4
    • 2016-03-11
    • Mitsubishi Materials Corporation
    • SATO KenichiTATSUOKA ShoYAMAGUCHI Kenji
    • B23B27/14B23C5/16C23C16/34C23C16/36
    • B23B27/14B23B2228/105C23C16/34C23C16/347C23C16/36C23C16/403C23C28/042C23C28/044C23C28/42C23C30/005
    • Provided is a coated tool in which a hard coating layer has excellent hardness and toughness and exhibits excellent chipping resistance during high-speed intermittent cutting work. In a surface-coated cutting tool including at least a (Ti,Al) (C,N) layer as a hard coating layer on a surface of the coated tool, the layer includes an upper layer in which a periodic compositional variation in Ti and Al is present in crystal grains having an NaCl type face-centered cubic structure, and a lower layer in which a periodic compositional variation in Ti and Al is not present in crystal grains having an NaCl type face-centered cubic structure, the upper layer has a relatively high Al amount, the lower layer has a relatively low Al amount, a value of I (200)/I(111) of the upper layer is preferably greater than 10, a value of I(200)/I(111) of the lower layer is preferably less than 3, the lower layer is configured to have a composition inclined structure in which the Al amount gradually and continuously increases from a tool body side towards an upper layer side, the lower layer is formed of a layered structure including a plurality of layers, and the Al amount of each layer can gradually and stepwisely increase from the tool body side towards the upper layer side.
    • 本发明提供一种涂层工具,其中硬涂层具有优异的硬度和韧性,并且在高速断续切割加工期间表现出优异的耐崩裂性。 在至少包括(Ti,Al)(C,N)层作为涂覆工具表面上的硬涂层的表面涂覆切削工具中,该层包括上层,其中Ti和 Al存在于具有NaCl型面心立方结构的晶粒中,并且其中Ti和Al的周期性组成变化不存在于具有NaCl型面心立方结构的晶粒中的下层,上层具有 Al含量相对较高,下层的Al含量相对较低,上层的I(200)/ I(111)的值优选大于10,I(200)/ I(111) 优选小于3,下层被构成为具有Al量从工具主体侧朝向上层侧逐渐连续增加的组成倾斜构造,下层由层状结构形成 包括多个层,以及每层的Al量 能够从工具主体侧朝向上层侧逐渐地逐步增大。
    • 19. 发明公开
    • SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYER EXHIBITS EXCELLENT CHIPPING RESISTANCE
    • 麻醉药师SCHNEIDWERKZEUG MIT HARTERÜBERZUGSSCHICHTMIT HERVORRAGENDERSCHLAGBESTÄNDIGKEIT
    • EP3103572A1
    • 2016-12-14
    • EP15843784.8
    • 2015-09-18
    • Mitsubishi Materials Corporation
    • TATSUOKA ShoSATO KenichiYAMAGUCHI Kenji
    • B23B27/14C23C16/34C23C16/36
    • B23B27/148B23B2222/16B23B2222/28B23B2224/04B23B2226/125B23B2228/04B23B2228/105C23C16/0272C23C16/34C23C16/36C23C28/042C23C28/044C23C28/42
    • Provided is a coated tool in which a hard coating layer has excellent hardness and toughness and exhibits chipping resistance and defect resistance during long-term use. A surface-coated cutting tool is formed by coating the surface of a tool body with a (Ti 1-x Al x ) (C y N 1-y ) layer (the average amount Xavg of Al and the average amount Yavg of C satisfy 0.60 ≤ Xavg ≤ 0.95 and 0 ≤ Yavg ≤ 0.005). Crystal grains having an NaCl type face-centered cubic structure in the layer have {111} orientation, a columnar structure in which the average grain width W of the individual crystal grains having an NaCl type face-centered cubic structure is 0.1 µm to 2.0 µm and the average aspect ratio A thereof is 2 to 10 is included, and in the individual crystal grains having an NaCl type face-centered cubic structure, a periodic compositional variation in Ti and Al in the composition formula: (Ti 1-x Al x ) (C y N 1-y ) is present and the difference Δx between the average of maximum values of x which varies periodically and the average of minimum values thereof is 0.03 to 0.25.
    • 提供一种硬涂层具有优异的硬度和韧性并且在长期使用中具有耐崩裂性和耐缺陷性的涂覆工具。 通过用(Ti 1-x Al x)(C y N 1-y)层(Al的平均量Xavg和C的平均量Yavg满足C 1 N y y y)层涂覆工具主体的表面来形成表面涂覆的切削工具 0.60‰Xavg‰¤0.95和0‰¤Yavg‰0.005)。 层中具有NaCl型面心立方结构的晶粒具有{111}取向,其中具有NaCl型面心立方结构的单个晶粒的平均晶粒宽度W为0.1μm至2.0μm的柱状结构 并且其平均纵横比A为2至10,并且在具有NaCl型面心立方结构的单个晶粒中,组成式中的Ti和Al的周期性组成变化:(Ti 1-x Al x )(C y N 1-y),并且周期性变化的x的最大值的平均值和最小值的平均值之间的差“x”为0.03〜0.25。