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    • 106. 发明公开
    • Method and apparatus for forming superconducting materials
    • Methode undGerätzur Herstellung von supraleitenden Materialien。
    • EP0308266A2
    • 1989-03-22
    • EP88308627.4
    • 1988-09-16
    • SEL SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    • Yamazaki, Shunpei
    • H01L39/12H01L39/24
    • H01L39/247C23C16/408C23C16/511H01L39/2422H01L39/2438H01L39/2441H01L39/2454Y10S505/727Y10S505/734Y10S505/737
    • A method and apparatus is disclosed for the formation of thin film superconducting oxide materials, for example materials of the general formula (A 1-x B x ) y Cu z O w , by deposition onto a substrate of the reaction products of a microwave excited plasma subjected additionally to a magnetic field and with the deposition being effected again under the action of magnetic and/or electric fields directed so as to obtain preferential crystal orientation and in some cases epitaxial crystal growth in the deposited film. By use of microwave excitation a hybrid resonance is established within the plasma leading to an abundance of excited oxygen within the plasma whereby the introduction of elemental constituents of the required superconducting oxide material, preferably in aerosol or spray form, can result in a plasma reaction wherein the superconducting material is the reaction product. If a spoiling agent is introduced additionally into the plasma in the first part of a two part process, a non-­superconducting film of essentially the same crystal structure and crystal orientation as the required film can be deposited to form a surface for formation of the desired superconducting film.
    • 公开了一种用于形成薄膜超导氧化物材料的方法和装置,例如通式(A1-xBx)yCuzOw的材料,通过沉积到另外施加磁场的微波激发等离子体的反应产物的衬底上 并且在磁场和/或电场的作用下再次进行沉积,以获得优选的晶体取向,并且在一些情况下在沉积膜中的外延晶体生长。 通过使用微波激发,在等离子体内建立混合共振,导致在等离子体内产生大量的激发氧,由此所需的超导氧化物材料的元素成分(优选以气溶胶或喷雾形式)的引入可导致等离子体反应,其中 超导材料是反应产物。 如果在两部分工艺的第一部分中将额外的引流剂引入等离子体中,则可沉积与所需膜基本上相同的晶体结构和晶体取向的非超导膜,以形成所需膜的表面 超导膜。