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91. 发明公开

EP3252429A1 CONTINUOUS MONITORING OF DRIVE AMPLITUDE IN VIBRATING MICROELECTROMECHANICAL GYROSCOPES 有权
标题翻译：振动微电子机械陀螺仪连续监测振动幅度
公开(公告)号：EP3252429A1
公开(公告)日：2017-12-06
申请号：EP17171295.3
申请日：2017-05-16
申请人： Murata Manufacturing Co., Ltd.
发明人： Törmälehto, Kimmo
IPC分类号： G01C19/5726 , G01C19/5712
摘要： The disclosure relates to a microelectromechanical gyroscope comprising at least one mass element, a drive actuator and sense electrodes. The at least one mass element is configured to be driven by the drive actuator into oscillating movement with a drive oscillation frequency ω D , and the sense electrodes are configured to produce a sense signal from the oscillating movement of the at least one mass element. The gyroscope control circuit comprises an amplitude detection unit which detects a sense signal amplitude at the frequency 2ω D . This amplitude yields a measure of drive oscillation amplitude. Amplitude detection at the frequency ω D yields a measure of angular rotation rate.
摘要翻译：本公开涉及包括至少一个质量元件，驱动致动器和感测电极的微机电陀螺仪。所述至少一个质量元件被配置为由所述驱动致动器驱动为具有驱动振荡频率ωD的振荡运动，并且所述感测电极被配置为从所述至少一个质量元件的振荡运动产生感测信号。陀螺仪控制电路包括检测频率为2ωD的感测信号幅度的幅度检测单元。该幅度产生驱动振荡幅度的量度。频率ωD处的幅度检测产生角度旋转速率的度量。

92. 发明公开

EP3234503A1 A QUADRATURE COMPENSATION METHOD FOR MEMS GYROSCOPES AND A GYROSCOPE SENSOR 有权转让
标题翻译： MEMS陀螺仪和陀螺仪传感器的快速补偿方法
公开(公告)号：EP3234503A1
公开(公告)日：2017-10-25
申请号：EP15813059.1
申请日：2015-12-17
申请人： RISE Acreo AB
发明人： ANDERSSON, Gert , SVENSSON, Erik , STOEW, Borys , HEDENSTIERNA, Nils
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： The present invention relates to a gyroscope sensor (102) for detecting a rotational motion about a sensitivity axis (104) and comprising means for quadrature compensation. The gyroscope sensor comprises a total inertial mass (105) comprising a first inertial mass (106) and a second inertial mass (108) physically attached to each other and arranged such that a rotation of the first inertial mass about a detection axis caused by the coriolis force when the gyroscope sensor is subjected to a rotation about a sensitivity axis. The gyroscope further comprises a first drive structure having a displaceable drive frame which may cause a respective of the first or second inertial mass to rotate about the detection axis in order to compensate for quadrature errors originating from faulty coupling between a drive mode and a sense mode of the gyroscope sensor.
摘要翻译：本发明涉及一种用于检测围绕灵敏度轴（104）的旋转运动的陀螺仪传感器（102），并且包括用于正交补偿的装置。所述陀螺仪传感器包括总惯性质量（105），所述总惯性质量（105）包括第一惯性质量（106）和第二惯性质量（108），所述第一惯性质量（106）和第二惯性质量（108）物理地彼此附接并且布置成使得所述第一惯性质量围绕由所述当陀螺仪传感器受到围绕灵敏度轴的旋转时的科里奥利力。陀螺仪进一步包括第一驱动结构，该第一驱动结构具有可移位的驱动框架，该驱动框架可以使得第一或第二惯性质量块中的相应一个围绕检测轴线旋转，以便补偿源于驱动模式和感测模式之间的错误耦合的正交误差的陀螺仪传感器。

93. 发明授权

EP2087315B1 ANORDNUNG ZUR MESSUNG EINER DREHRATE MIT EINEM VIBRATIONSSENSOR 有权
公开(公告)号：EP2087315B1
公开(公告)日：2017-07-12
申请号：EP07820163.9
申请日：2007-09-13
申请人： Continental Automotive GmbH , Sensordynamics AG
发明人： GIER, Lothar , KEMPE, Volker , STRLE, Drago
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712

94. 发明授权

EP2246662B1 Gyroscope utilizing MEMS and optical sensing 有权
标题翻译：阿姆斯特朗
公开(公告)号：EP2246662B1
公开(公告)日：2017-03-08
申请号：EP10250864.5
申请日：2010-04-30
申请人： The Board of Trustees of the Leland Stanford Junior University
发明人： Kilic, Onur , Digonnet, Michel J.F. , Kino, Gordon S , Solgaard, Olav
IPC分类号： G01C19/5712 , G01C19/5776
CPC分类号： G01C19/56 , G01C19/5712 , G01C19/5776 , Y10T29/49609

95. 发明授权

EP2467675B1 OFFSET DETECTION AND COMPENSATION FOR MICROMACHINED INERTIAL SENSORS 有权
标题翻译：检测以及偏移微MADE惯性传感器的补偿
公开(公告)号：EP2467675B1
公开(公告)日：2016-12-07
申请号：EP10747345.6
申请日：2010-08-10
申请人： Analog Devices, Inc.
发明人： CLARK, William, A. , GEEN, John, A.
IPC分类号： G01C19/56 , G01C19/5712 , G01P15/097
CPC分类号： G01P15/097 , G01C19/5712

96. 发明授权

EP2697607B1 ACCELEROMETER SYSTEMS AND METHODS 有权
标题翻译：加速度测量系统和方法
公开(公告)号：EP2697607B1
公开(公告)日：2016-06-01
申请号：EP12770723.0
申请日：2012-03-15
申请人： Northrop Grumman Guidance and Electronics Company, Inc.
发明人： STEWART, Robert E. , SAKAIDA, Daryl , BULATOWICZ, Michael D. , LI, Ming , DOUGLASS, John Thomas
IPC分类号： G01C19/5712 , G01P15/13
CPC分类号： G01P15/131 , G01C19/5705 , G01P15/125 , G01P2015/0834

97. 发明公开

EP2607850A3 Micromechanical Coriolis Rate of Rotation Sensor 有权转让
标题翻译： Mikromechanischen科里奥利Drehratensensor
公开(公告)号：EP2607850A3
公开(公告)日：2016-05-18
申请号：EP12197111.3
申请日：2012-12-14
申请人： Maxim Integrated Products, Inc.
发明人： Rocchi, Alessandro , Marchetti, Eleonora , Bertini, Lorenzo
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712 , G01C19/04 , G01C19/5747 , Y10T74/1293
摘要： A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a second driving mass (2) disposed in an X-Y plane parallel to the substrate. Each driving mass (2) being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the Y-axis. Drive means are used for generating a rotational oscillation of the driving masses (2) about the drive axis (Z) at each central suspension. At least one elastic connecting element (5) is disposed on each of the driving masses (2) on both sides of the Y-axis and spaced apart from the same for connecting and oscillating the two driving masses (2) in a mutually tuned manner.

98. 发明公开

EP2984449A1 DREHRATENSENSOR 有权
标题翻译：旋转速率传感器
公开(公告)号：EP2984449A1
公开(公告)日：2016-02-17
申请号：EP14717717.4
申请日：2014-04-07
申请人： Robert Bosch GmbH
发明人： REINMUTH, Jochen
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712 , G01C19/5719 , G01C19/574
摘要： The invention proposes a micromechanical structure, in particular a rate of rotation sensor, having a substrate which has a main plane of extent, having a first Coriolis element, having a second Coriolis element, having a drive device for deflecting the first Coriolis element and the second Coriolis element out of a rest position, and having a detection device, characterized in that the first Coriolis element is designed to be symmetrical in terms of mass in relation to the second Coriolis element with respect to a first axis running parallel to the main plane of extent, wherein the first Coriolis element and the second Coriolis element have a common main plane of extent, wherein, in the rest position, the common main plane of extent runs parallel to the main plane of extent of the substrate, wherein the first Coriolis element and the second Coriolis element are each designed so as to be symmetrical in terms of mass with respect to a second axis running perpendicular to the first axis, wherein the first Coriolis element and the second Coriolis element can be driven by the drive device so as to perform a rotational oscillation about the first axis, wherein, in the case of a rate of rotation acting parallel to the projection of the second axis onto the main plane of extent, the first Coriolis element and the second Coriolis element can be deflected to realize a force action of the Coriolis force for a rotational oscillation about a third axis extending perpendicular to the main plane of extent and running through the point of intersection of the first axis and second axis, wherein the micromechanical structure has at least one first deflection element and at least one second deflection element, wherein the first deflection element and the second deflection element are designed to be symmetrical in terms of mass with respect to the first axis and with respect to the second axis, wherein the first deflection element is coupled at least to the first Coriolis element, and the second deflection element is coupled at least to the second Coriolis element, such that the force action of the Coriolis force on the first Coriolis element and on the second Coriolis element for a rotational oscillation of the first deflection element and of the second deflection element about the third axis can be detected by the detection device.

99. 发明公开

EP2884229A1 Micromachined gyroscope including a guided mass system 有权
标题翻译： Mikrogefertigtes Gyroskop mit einemgeführtenMassesystem
公开(公告)号：EP2884229A1
公开(公告)日：2015-06-17
申请号：EP14182956.4
申请日：2014-08-29
申请人： InvenSense, Inc.
发明人： Anac, Ozan , Seeger, Joseph
IPC分类号： G01C19/5712 , G01C19/5733 , G01C19/574
CPC分类号： G01C19/5712 , G01C19/5733 , G01C19/574
摘要： A gyroscope (150) comprises a substrate (101) and a guided mass system. The guided mass system comprises proof masses (102a, 651) and guiding arms (104a, 104b) disposed in a plane parallel to the substrate (101). The proof masses are coupled to the guiding arm by springs (103a, 103b). The guiding arm is coupled to the substrate by springs (108a,108b). At least one of the proof-masses (651) is directly coupled to the substrate (101) by at least one anchor via a spring system (710a,710b). The gyroscope also comprises an actuator (109a, 109b) for vibrating one of the proof-masses (102a) in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers (660a, 660b) for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.
摘要翻译：陀螺仪（150）包括基板（101）和引导质量系统。引导质量系统包括设置在平行于衬底（101）的平面中的校准质量（102a，651）和引导臂（104a，104b）。检验质量通过弹簧（103a，103b）与引导臂联接。引导臂通过弹簧（108a，108b）联接到基板。至少一个证明物质（651）通过弹簧系统（710a，710b）由至少一个锚固件直接耦合到基底（101）。陀螺仪还包括用于在第一方向上振动证明物质（102a）中的一个的致动器（109a，109b），这导致另一个证明物质在平面中旋转。最后，陀螺仪还包括用于响应于围绕单个轴或多个输入轴的角速度感测被引导质量系统的运动的换能器（660a，660b）。

100. 发明公开

EP2697607A4 ACCELEROMETER SYSTEMS AND METHODS 有权
标题翻译：加速度测量系统和方法
公开(公告)号：EP2697607A4
公开(公告)日：2014-10-22
申请号：EP12770723
申请日：2012-03-15
申请人： NORTHROP GRUMMAN GUIDANCE & EL
发明人： STEWART ROBERT E , SAKAIDA DARYL , BULATOWICZ MICHAEL D , LI MING , DOUGLASS JOHN THOMAS
IPC分类号： G01C19/5712 , G01P15/13
CPC分类号： G01P15/131 , G01C19/5705 , G01P15/125 , G01P2015/0834

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