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    • 91. 发明公开
    • A QUADRATURE COMPENSATION METHOD FOR MEMS GYROSCOPES AND A GYROSCOPE SENSOR
    • MEMS陀螺仪和陀螺仪传感器的快速补偿方法
    • EP3234503A1
    • 2017-10-25
    • EP15813059.1
    • 2015-12-17
    • RISE Acreo AB
    • ANDERSSON, GertSVENSSON, ErikSTOEW, BorysHEDENSTIERNA, Nils
    • G01C19/5712
    • G01C19/5712
    • The present invention relates to a gyroscope sensor (102) for detecting a rotational motion about a sensitivity axis (104) and comprising means for quadrature compensation. The gyroscope sensor comprises a total inertial mass (105) comprising a first inertial mass (106) and a second inertial mass (108) physically attached to each other and arranged such that a rotation of the first inertial mass about a detection axis caused by the coriolis force when the gyroscope sensor is subjected to a rotation about a sensitivity axis. The gyroscope further comprises a first drive structure having a displaceable drive frame which may cause a respective of the first or second inertial mass to rotate about the detection axis in order to compensate for quadrature errors originating from faulty coupling between a drive mode and a sense mode of the gyroscope sensor.
    • 本发明涉及一种用于检测围绕灵敏度轴(104)的旋转运动的陀螺仪传感器(102),并且包括用于正交补偿的装置。 所述陀螺仪传感器包括总惯性质量(105),所述总惯性质量(105)包括第一惯性质量(106)和第二惯性质量(108),所述第一惯性质量(106)和第二惯性质量(108)物理地彼此附接并且布置成使得所述第一惯性质量围绕由所述 当陀螺仪传感器受到围绕灵敏度轴的旋转时的科里奥利力。 陀螺仪进一步包括第一驱动结构,该第一驱动结构具有可移位的驱动框架,该驱动框架可以使得第一或第二惯性质量块中的相应一个围绕检测轴线旋转,以便补偿源于驱动模式和感测模式之间的错误耦合的正交误差 的陀螺仪传感器。
    • 97. 发明公开
    • DREHRATENSENSOR
    • 旋转速率传感器
    • EP2984449A1
    • 2016-02-17
    • EP14717717.4
    • 2014-04-07
    • Robert Bosch GmbH
    • REINMUTH, Jochen
    • G01C19/5712
    • G01C19/5712G01C19/5719G01C19/574
    • The invention proposes a micromechanical structure, in particular a rate of rotation sensor, having a substrate which has a main plane of extent, having a first Coriolis element, having a second Coriolis element, having a drive device for deflecting the first Coriolis element and the second Coriolis element out of a rest position, and having a detection device, characterized in that the first Coriolis element is designed to be symmetrical in terms of mass in relation to the second Coriolis element with respect to a first axis running parallel to the main plane of extent, wherein the first Coriolis element and the second Coriolis element have a common main plane of extent, wherein, in the rest position, the common main plane of extent runs parallel to the main plane of extent of the substrate, wherein the first Coriolis element and the second Coriolis element are each designed so as to be symmetrical in terms of mass with respect to a second axis running perpendicular to the first axis, wherein the first Coriolis element and the second Coriolis element can be driven by the drive device so as to perform a rotational oscillation about the first axis, wherein, in the case of a rate of rotation acting parallel to the projection of the second axis onto the main plane of extent, the first Coriolis element and the second Coriolis element can be deflected to realize a force action of the Coriolis force for a rotational oscillation about a third axis extending perpendicular to the main plane of extent and running through the point of intersection of the first axis and second axis, wherein the micromechanical structure has at least one first deflection element and at least one second deflection element, wherein the first deflection element and the second deflection element are designed to be symmetrical in terms of mass with respect to the first axis and with respect to the second axis, wherein the first deflection element is coupled at least to the first Coriolis element, and the second deflection element is coupled at least to the second Coriolis element, such that the force action of the Coriolis force on the first Coriolis element and on the second Coriolis element for a rotational oscillation of the first deflection element and of the second deflection element about the third axis can be detected by the detection device.
    • 98. 发明公开
    • Micromachined gyroscope including a guided mass system
    • Mikrogefertigtes Gyroskop mit einemgeführtenMassesystem
    • EP2884229A1
    • 2015-06-17
    • EP14182956.4
    • 2014-08-29
    • InvenSense, Inc.
    • Anac, OzanSeeger, Joseph
    • G01C19/5712G01C19/5733G01C19/574
    • G01C19/5712G01C19/5733G01C19/574
    • A gyroscope (150) comprises a substrate (101) and a guided mass system. The guided mass system comprises proof masses (102a, 651) and guiding arms (104a, 104b) disposed in a plane parallel to the substrate (101). The proof masses are coupled to the guiding arm by springs (103a, 103b). The guiding arm is coupled to the substrate by springs (108a,108b). At least one of the proof-masses (651) is directly coupled to the substrate (101) by at least one anchor via a spring system (710a,710b). The gyroscope also comprises an actuator (109a, 109b) for vibrating one of the proof-masses (102a) in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers (660a, 660b) for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.
    • 陀螺仪(150)包括基板(101)和引导质量系统。 引导质量系统包括设置在平行于衬底(101)的平面中的校准质量(102a,651)和引导臂(104a,104b)。 检验质量通过弹簧(103a,103b)与引导臂联接。 引导臂通过弹簧(108a,108b)联接到基板。 至少一个证明物质(651)通过弹簧系统(710a,710b)由至少一个锚固件直接耦合到基底(101)。 陀螺仪还包括用于在第一方向上振动证明物质(102a)中的一个的致动器(109a,109b),这导致另一个证明物质在平面中旋转。 最后,陀螺仪还包括用于响应于围绕单个轴或多个输入轴的角速度感测被引导质量系统的运动的换能器(660a,660b)。