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1. 发明授权

EP1931975B1 MEASURING METHOD AND SOFTWARE PRODUCT 有权
标题翻译：测量方法和软件产品
公开(公告)号：EP1931975B1
公开(公告)日：2018-03-14
申请号：EP06794103.9
申请日：2006-10-06
申请人： Aalto University Foundation sr
发明人： SAVIN, Hele , HAARAHILTUNEN, Antti , YLI-KOSKI, Marko, Veli
IPC分类号： G01N21/95 , G01N27/20 , G01N21/17 , G01N33/00 , H01L21/66
CPC分类号： H01L22/12 , G01N2021/1719 , G01N2033/0095
摘要： The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration.

2. 发明公开

EP1931975A4 MEASURING METHOD, ARRANGEMENT AND SOFTWARE PRODUCT 有权
标题翻译： MESSVERFAHREN，-ANORDNUNG UND SOFTWARE-PRODUKT
公开(公告)号：EP1931975A4
公开(公告)日：2014-07-23
申请号：EP06794103
申请日：2006-10-06
申请人： TEKNILLINEN KORKEAKOULU
发明人： SAVIN HELE , HAARAHILTUNEN ANTTI , YLI-KOSKI MARKO VELI
IPC分类号： G01N21/95 , G01N21/17 , G01N27/20 , G01N33/00 , H01L20060101 , H01L21/66
CPC分类号： H01L22/12 , G01N2021/1719 , G01N2033/0095
摘要： The invention presents a method for determining the copper concentration of the substrate using the photoconductivity method in a new manner, the method comprising steps in which the photoconductivity property of the substrate is measured for a first time by an arrangement, the surface of the substrate is illuminated by illuminating means emitting photon radiation, the photoconductivity property of the substrate is measured for a second time by an arrangement, and the copper concentration of the substrate is determined from the change between the first and second time of measurement on the basis of the illumination. The invention also presents an arrangement and a software product for determining the copper concentration.
摘要翻译：本发明提出了一种以新的方式使用光电导方法测定衬底的铜浓度的方法，该方法包括以下步骤：首先通过配置测量衬底的光电导性质，衬底的表面为通过发射光子辐射的照明装置照射，通过布置第二次测量基板的光电导性质，并且基于基于照明的第一和第二测量时间之间的变化来确定基板的铜浓度。本发明还提出了用于确定铜浓度的布置和软件产品。

3. 发明公开

EP1382958A3 System and method for measuring properties of a semiconductor substrate in a non-destructive way 有权
标题翻译：装置和方法用于在半导体衬底的性质的非破坏性测量
公开(公告)号：EP1382958A3
公开(公告)日：2004-05-12
申请号：EP03447186.2
申请日：2003-07-17
申请人： INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW
发明人： Clarysse, Trudo , Vandervorst, Wilfried
IPC分类号： G01N21/17 , H01L21/66
CPC分类号： G01N21/636 , G01N21/1717 , G01N2021/1719
摘要： The present invention discloses a method to determine the dopant profile of doped regions in a semiconductor substrate. A pump laser is used to create excess carriers in this semiconductor substrate. The excess carrier concentration will influence the reflection of a probe laser. From the reflected probe laser not only the bulk components but also the near-surface components are eliminated to only yield the bulk components.

4. 发明公开

EP2677302A4 METHOD AND DEVICE FOR MEASURING CARRIER LIFETIME 失效
标题翻译：方法和设备载体测量LIFE
公开(公告)号：EP2677302A4
公开(公告)日：2016-03-02
申请号：EP11858857
申请日：2011-02-15
申请人： YSYSTEMS LTD
发明人： YVES LACROIX
IPC分类号： G01N21/64 , G01R31/265 , H01L21/66
CPC分类号： G01N21/6408 , G01N21/6489 , G01N21/66 , G01N2021/1719 , G01R31/2656 , H01L22/12 , H01L2924/0002 , H01L2924/00

5. 发明授权

EP1382958B1 System and method for measuring properties of a semiconductor substrate in a non-destructive way 有权
标题翻译：装置和方法用于在半导体衬底的性质的非破坏性测量
公开(公告)号：EP1382958B1
公开(公告)日：2006-12-13
申请号：EP03447186.2
申请日：2003-07-17
申请人： INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW
发明人： Clarysse, Trudo , Vandervorst, Wilfried
IPC分类号： G01N21/17 , H01L21/66
CPC分类号： G01N21/636 , G01N21/1717 , G01N2021/1719

6. 发明公开

EP1382958A2 System and method for measuring properties of a semiconductor substrate in a non-destructive way 有权
标题翻译：装置和方法用于在半导体衬底的性质的非破坏性测量
公开(公告)号：EP1382958A2
公开(公告)日：2004-01-21
申请号：EP03447186.2
申请日：2003-07-17
申请人： INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW
发明人： Clarysse, Trudo , Vandervorst, Wilfried
IPC分类号： G01N21/17 , H01L21/66
CPC分类号： G01N21/636 , G01N21/1717 , G01N2021/1719
摘要： The present invention discloses a method to determine the dopant profile of doped regions in a semiconductor substrate. A pump laser is used to create excess carriers in this semiconductor substrate. The excess carrier concentration will influence the reflection of a probe laser. From the reflected probe laser not only the bulk components but also the near-surface components are eliminated to only yield the bulk components.
摘要翻译：本发明盘松动确定性地挖掘在半导体衬底，掺杂区的掺杂剂分布的方法。泵激光器用于创建在该半导体衬底过量载流子。过量的载流子浓度将影响一个激光探针的反射。从反射的激光探针不仅本体元件，但这样的表面附近分量被消除仅得到块状组件。

7. 发明公开

EP2939002A1 PROCEDE ET DISPOSITIF POUR CARACTERISER UN MILIEU FLUIDE A L'AIDE D'UN TRANSDUCTEUR PHOTOELECTRIQUE 有权
标题翻译：方法和装置一流体特性由光电转换器的方式
公开(公告)号：EP2939002A1
公开(公告)日：2015-11-04
申请号：EP13820818.6
申请日：2013-12-17
申请人： Centre National de la Recherche Scientifique (CNRS) , Ecole Centrale De Lyon , Institut National Des Sciences Appliquées De Lyon , Université Claude Bernard Lyon I , Universite T. Chevtchenko de Kiev
发明人： LYTVYNENKO, Sergeii , BEILOBROV, Dmytro , LYSENKO, Volodymyr , SKRYSHEVSKYY, Valeriy
IPC分类号： G01N21/17
CPC分类号： G01N21/27 , G01N21/1717 , G01N21/31 , G01N2021/1719 , G01N2201/061
摘要： The invention concerns a device for characterising a fluid medium (3) using a photoelectric transducer (2). According to the invention, the device comprises: at least one semi-conductive substrate (4) having at least one space charge region {5} and having a receiving surface (6) for the fluid medium with a view to forming a substrate/fluid medium interface (7); a system (8) for producing an amplitude-modulated point light beam (9) that illuminates, through the fluid medium (3), at least one area of the interface (7), a system (10) for measuring the values of a photoelectric magnitude delivered during the illumination in order to create a matrix of the photoelectric magnitude values, and a system (12) for processing the photoelectric magnitude values delivered by the measurement system (10), designed to determine, from the matrix, an electronic signature characteristic of the fluid medium.
摘要翻译：一种用于与光电变换器的帮助表征流体介质装置包括至少一个半导体衬底波塞唱至少一个空间电荷区和呈现的接收表面，用于接收，以便在流体介质在所述基板和所述液体介质之间界面构成，用于产生点光束做了生产系统是振幅调制，并通过所述流体介质中，用于测量在执行照明，以便产生一个传送的光电大小的值的测量系统做了灯的界面中的至少一个区光电大小的值的矩阵，以及对由测量系统和angepasst输送到使用矩阵确定性矿上流体介质的电子签名特性的光电大小的处理值的处理器系统。

8. 发明公开

EP2741072A4 PUMP-PROBE MEASUREMENT DEVICE 有权
标题翻译：测定装置，泵PROBE
公开(公告)号：EP2741072A4
公开(公告)日：2015-07-08
申请号：EP12819852
申请日：2012-07-31
申请人： JAPAN SCIENCE & TECH AGENCY
发明人： SHIGEKAWA HIDEMI , TAKEUCHI OSAMU
IPC分类号： G01N21/17 , B82Y35/00 , G01N21/55 , G01N21/63 , G01Q60/12 , H01J37/244 , H01J37/26
CPC分类号： G01N21/55 , B82Y35/00 , G01N21/1717 , G01N21/636 , G01N2021/1719 , G01N2021/1725 , G01N2021/1789 , G01N2021/1791 , G01N2201/0697 , G01Q60/12 , H01J37/244 , H01J37/26 , H01J2237/24507 , H01J2237/24564 , H01J2237/2818
摘要： A pump probe measuring device (1) comprises: an ultrashort optical pulse laser generator (2) for generating a first ultrashort optical pulse train which is a pump light (3a), second and third ultrashort optical pulse trains (3b), (3c) which are probe lights; an optical shutter unit (6) to which the second and the third ultrashort pulse trains (3b), (3c) are introduced; and a detecting unit (20) including an irradiation optical system (8) for directing the pump light (3a), the first probe light (3b) and the second probe light (3c) to a sample (7), a sensor (11) for detecting a probe signal from the sample (7), and a phase-sensitive detecting means (12) connected to the sensor (11). An optical shutter control unit (10) periodically modulates the delay time of the first probe light (3b) and that of the second probe light (3c) with respect to the pump light (3a), and the modulated first and second probe lights (3a), (3b) illuminate the sample (7) alternately to detect the probe signals from the sample (7) by the phase-sensitive detecting means (12) in synchronization with the periodic modulation signal of the delay time.

9. 发明公开

EP2139033A3 Method for determining the doping profile of a partially activated doped semiconductor region 审中-公开
标题翻译：一种用于确定部分活化型半导体区域的掺杂分布方法
公开(公告)号：EP2139033A3
公开(公告)日：2012-04-04
申请号：EP09163837.9
申请日：2009-06-26
申请人： IMEC , Katholieke Universiteit Leuven
发明人： Bogdanowicz, Janusz
IPC分类号： H01L21/66 , G01N21/17
CPC分类号： G01N21/55 , G01N21/1717 , G01N2021/1719 , G01N2021/1725 , G01N2021/1731 , H01L22/12
摘要： A method is disclosed for determining the inactive doping concentration of a semiconductor region using a PMOR method, the method comprising: providing a set of at least two semiconductor regions having substantially the same known as-implanted concentration but known varying junction depth, determining on at least of these semiconductor regions the as-implanted concentration, partially activate at least two semiconductor regions from the semiconductor set, measure by PMOR on the partially activated semiconductor regions the signed amplitude of the reflected probe signal as function of junction depth and for at least two laser separation values, measure by PMOR on the partially activated semiconductor regions the DC probe reflectivity as function of junction depth, extracting from these measurements the active doping concentration thereby assuming crystal mobility and, calculating the inactive doping concentration using the determined total as-implanted concentration and active doping concentration. The method may further comprise the step of extracting thermal diffusivity, refraction index, absorption coefficient, and/or SRHF lifetime from these measurements.
摘要翻译：一种方法，光盘游离缺失确定性采矿使用PMOR方法，该方法包括一个半导体区域的非活性掺杂浓度：提供具有基本相同的被称为注入浓度的一组至少两个半导体区域的，但已知的变化的结深度，确定性采矿上在至少论文半导体区域中的植入的浓度的，部分激活从所述半导体组至少两个半导体区域，在部分激活的半导体区域测量由PMOR所述反射的测试信号的带符号的振幅为结深度的函数和用于至少两个激光分离值，在部分激活的半导体区域测量由PMOR直流探针反射率结深度的函数，从合成的测量中提取的有效掺杂浓度，由此假设晶体的流动性和，计算使用所述确定性开采总的惰性掺杂浓度作为注入浓度和活性掺杂浓度。该方法可以包括另外的从合成的测量中提取的热扩散率，折射率，吸收系数的步骤，和/或SRHF寿命。

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