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    • 6. 发明公开
    • SYSTEMS, DEVICES, AND METHODS FOR REDUCING SURFACE DIELECTRIC CHARGING IN A RF MEMS ACTUATOR ELEMENT
    • 系统,装置和方法用于降低表面介电填充到RF MEMS致动器
    • EP3127133A1
    • 2017-02-08
    • EP15773541.6
    • 2015-04-01
    • Wispry, Inc.
    • MOLINERO-GILES, DavidCUNNINGHAM, Shawn, J.DEREUS, Dana
    • H01H59/00
    • H01H59/0009B81B3/0086B81B2203/04H01H49/00H01H2059/0018H01H2059/0072
    • The present subject matter relates to systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element. In particular, a micro-electro-mechanical systems (MEMS) can comprise a fixed electrode positioned on a substrate, a moveable electrode positioned substantially above the fixed electrode and separated from the fixed electrode by a gap, and at least one standoff bump positioned between the fixed electrode and the moveable electrode, wherein the at least one standoff bump extends into the gap. In this configuration, one or both of the fixed electrode or the moveable electrode can be patterned to define one or more hole that is substantially aligned with the one or more of the at least one standoff bump. The bump and the hole can both help to reduce the rate of surface dielectric charging and the total amount of charge generated.
    • 本主题涉及系统,装置,和用于减少RF MEMS致动器元件表面介质充电的方法。 特别地,微机电系统(MEMS)可包括定位在基片的固定电极,通过间隙与所述固定电极上方大致位于和从固定电极分离的可动电极,以及至少一个支座凸起之间定位 固定电极和可动电极,worin所述至少一个支座凸块延伸到所述间隙中。 在该配置中,一个或两个固定电极或可动电极的可被图案化以限定一个或多个孔并基本上与所述一个或多个所述至少一个支座凸块的对准。 凸块和孔既可以有助于减少表面介电充电的速率和电荷所产生的总量。