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1. 发明授权

EP1028502B1 Laser with automated beam quality control 有权
标题翻译：激光光束质量的自动化控制
公开(公告)号：EP1028502B1
公开(公告)日：2007-10-24
申请号：EP00102800.0
申请日：2000-02-10
申请人： Cymer, Inc.
发明人： Erie, Frederic G. , Buck, Jesse D. , Das, Palash P.
IPC分类号： H01S3/13 , H01S3/225
CPC分类号： G03F7/70025 , G02B5/1828 , G03F7/70483 , G03F7/70575 , H01S3/08009 , H01S3/08081 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/1392 , H01S3/225

2. 发明授权

EP0789431B1 Maintenance strategy control system for gas discharge lasers 失效
标题翻译：用于气体放电激光器的维护策略控制系统
公开(公告)号：EP0789431B1
公开(公告)日：2001-10-17
申请号：EP97300339.5
申请日：1997-01-20
申请人： Cymer, Inc.
发明人： Das, Palash P. , Stephenson, Gary R.
IPC分类号： H01S3/097 , H01S3/225 , H01S3/10 , G01R31/00
CPC分类号： H01S3/225 , H01S3/10

3. 发明公开

EP1075061A2 Automatic fluorine concentration control system for excimer laser 有权
标题翻译：自动化Flukeonentent-SteuersystemfürExcimerlaser
公开(公告)号：EP1075061A2
公开(公告)日：2001-02-07
申请号：EP00116029.0
申请日：2000-07-26
申请人： Cymer, Inc.
发明人： Padmabandu, Gamaralalage G. , Das, Palash P. , Watson, Tom A. , Zambon, Paolo
IPC分类号： H01S3/225 , H01S3/036
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F 2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines ΔE/ΔV, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on ΔE/ΔV without the need to actually measure the fluorine concentration.
The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.
摘要翻译：一种具有自动氟控制系统的准分子激光系统，可以精确控制气体放电激光室中F2“甜点”内的氟浓度。这是通过电脑控制系统进行的，该系统监视激光参数，确定DELTA E / DELTA V，脉冲能量随电压的变化，并根据DELTA E / DELTA V自动精确控制氟浓度，无需实际测量氟浓度。本发明在其中使用具有宽范围的光敏抗蚀剂的光刻环境中特别有用。本发明允许激光器在宽范围的脉冲能量输出上以最大的效率运行。

4. 发明公开

EP1075060A3 Automatic fluorine concentration control system for excimer laser 有权
公开(公告)号：EP1075060A3
公开(公告)日：2003-11-05
申请号：EP00116028.2
申请日：2000-07-26
申请人： Cymer, Inc.
发明人： Gong, Mengxiong , Carlesi, Jason R. , Binder, Michael C. , Das, Palash P.
IPC分类号： H01S3/225 , H01S3/036
CPC分类号： H01S3/03 , G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/08009 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F 2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines ΔE/ΔV, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on ΔE/ΔV without the need to actually measure the fluorine concentration.

5. 发明公开

EP1028502A2 Smart laser with automated beam quality control 有权
标题翻译： Laser mit automatisierter Steuerung derStrahlqualität
公开(公告)号：EP1028502A2
公开(公告)日：2000-08-16
申请号：EP00102800.0
申请日：2000-02-10
申请人： Cymer, Inc.
发明人： Erie, Frederic G. , Buck, Jesse D , Das, Palash P.
IPC分类号： H01S3/13 , H01S3/225
CPC分类号： G03F7/70025 , G02B5/1828 , G03F7/70483 , G03F7/70575 , H01S3/08009 , H01S3/08081 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/1392 , H01S3/225
摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an R MAX mirror in a line narrowing module and bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the R MAX tilt.
摘要翻译：智能激光器具有脉冲能量，波长和带宽的自动计算机控制，使用来自波形计的反馈信号。脉冲能量通过控制放电电压，波长控制，通过控制线窄线模块中的RMAX反射镜的位置，并通过调整线窄模块中的光栅的曲率来控制带宽。优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈控制水平和垂直光束轮廓。

6. 发明授权

EP0790681B1 External high voltage control for a laser system 失效
标题翻译：用于激光系统的外部高压驱动器
公开(公告)号：EP0790681B1
公开(公告)日：2000-07-12
申请号：EP97300340.3
申请日：1997-01-20
申请人： Cymer, Inc.
发明人： Das, Palash P. , Payne, James D. , Mixon, Curtiss L. , Eis, Richard A.
IPC分类号： H01S3/097 , H01S3/134 , H01S3/225
CPC分类号： H01S3/134 , H01S3/225

7. 发明公开

EP0783193A1 Laser having improved beam quality and reduced operating cost 失效
标题翻译：激光mit mit。ter。。。。。。。。。。。。
公开(公告)号：EP0783193A1
公开(公告)日：1997-07-09
申请号：EP97300007.8
申请日：1997-01-02
申请人： Cymer, Inc.
发明人： Watson, Tom A. , Fomenkov, Igor V. , Partlo, William N. , deRuyter, Anthony J. , Larson, Donald G. , Das, Palash P.
IPC分类号： H01S3/036 , H01S3/04
CPC分类号： H01S3/036 , F28D2021/0077 , H01S3/04 , H01S3/041 , H01S3/225
摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber (120) and heat-generating electronics (240) that are enclosed in a baffled enclosure (210) that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system (250) that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger (250), thereby providing a continuously variable rate of heat exchange through the heat exchanger (250) to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
摘要翻译：公开了一种可用于例如光刻或医疗手术中的激光。在一个实施例中，激光器包括放电室（120）和发热电子器件（240），其被封闭在有障碍的外壳（210）中，其需要较少的冷却空气来可靠地冷却外壳中的部件比先前的未封闭的外壳。还提供了减少调节空气量的方法。在另一实施例中，激光器具有热交换系统（250），该热交换系统（250）响应于激光气体温度的变化而迅速作用，通过调节调节通过热交换器（250）的水流的流量比例阀，由此提供连续可变的通过热交换器（250）的热交换速率以保持激光气体温度恒定。公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

8. 发明公开

EP1075061A3 Automatic fluorine concentration control system for excimer laser 有权
标题翻译：用于受激准分子激光自动氟浓度控制系统
公开(公告)号：EP1075061A3
公开(公告)日：2003-11-05
申请号：EP00116029.0
申请日：2000-07-26
申请人： Cymer, Inc.
发明人： Padmabandu, Gamaralalage G. , Das, Palash P. , Watson, Tom A. , Zambon, Paolo
IPC分类号： H01S3/225 , H01S3/036 , G03F7/20
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70358 , G03F7/70558 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F 2 "sweet spot" in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines ΔE/ΔV, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on ΔE/ΔV without the need to actually measure the fluorine concentration. The present invention is especially useful in lithography environments in which photo resist having a wide range of sensitivity are used. The present invention permits operation of the laser at substantially maximum efficiency over a wide range of pulse energy outputs.

9. 发明公开

EP0790681A2 External high voltage control for a laser system 失效
标题翻译： Externe Hochspannungsansteuerungfürein Lasersystem
公开(公告)号：EP0790681A2
公开(公告)日：1997-08-20
申请号：EP97300340.3
申请日：1997-01-20
申请人： Cymer, Inc.
发明人： Das, Palash P. , Payne, James D. , Mixon, Curtiss L. , Eis, Richard A.
IPC分类号： H01S3/097
CPC分类号： H01S3/134 , H01S3/225
摘要： An external control system (110) for a laser system, used as an illumination source for a stepper system, is provided. The external control (110) allows for a measuring of the energy actually distributed to a wafer and a correction of the energy dose distribution based upon this measurement. In this way, a more precise energy dose control is achieved. The external control (110) communicates with the laser's own internal control system to provide serial inputs which allow for corrections to be made to the High Voltage setting based upon the aforementioned measurements, and coordinates with the laser's internal control system to initiate laser operation at the required intervals.
摘要翻译：提供了一种用作激光系统的外部控制系统（110），用作步进系统的照明源。外部控制（110）允许对实际分配给晶片的能量的测量和基于该测量的能量剂量分布的校正。以这种方式，实现更精确的能量剂量控制。外部控制器（110）与激光器本身的内部控制系统进行通信，以提供串行输入，其允许基于上述测量对高压设置进行校正，并且与激光器的内部控制系统协调以启动激光器的操作所需间隔。

10. 发明公开

EP0789431A2 Maintenance strategy control system for gas discharge lasers 失效
标题翻译： Wartungsstrategie-SteuerungssystemfürGasentladungslaser
公开(公告)号：EP0789431A2
公开(公告)日：1997-08-13
申请号：EP97300339.5
申请日：1997-01-20
申请人： Cymer, Inc.
发明人： Das, Palash P. , Stephenson, Gary R.
IPC分类号： H01S3/097
CPC分类号： H01S3/225 , H01S3/10
摘要： A diagnostic sub-routine for use by the control system of a gas discharge laser is disclosed. The sub-routine provides a prediction of the time remaining, based upon real-time laser system operations, for each pulse-limited sub-system within the laser. The sub-routine utilizes a calculated average pulse repetition rate over a user-defined time interval as the basis for predicting the time remaining, under current operating conditions, until the end-of-life for each pulse-limited sub-system; and continually updates the time prediction to account for changes in the lasers operation. The predicted time is reported to the operator to allow advanced scheduling of routine maintenance.
摘要翻译：激光装置包括一组使用寿命有限的子部件和一个控制系统。每个子组件与其他子组件一起工作以产生输出激光束。控制系统可操作地耦合并与每个子部件通信以监视和控制每个子部件的操作并且共同监视和控制激光系统的输出。监视功能还包括为每个子组件生成预测结束信号。然后，它为每个使用寿命受限子组件在当前激光系统操作下剩余的时间向操作者产生读数。读出是激光系统在用户指定时间段的输出，每个子部件的已知使用寿命以及激光系统的当前操作时间的函数。

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