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    • 7. 发明申请
    • METHOD OF AND APPARATUS FOR MATCHING A LOAD TO A SOURCE
    • 用于匹配来源的方法和装置
    • WO1998027646A1
    • 1998-06-25
    • PCT/US1997023716
    • 1997-12-19
    • LAM RESEARCH CORPORATION
    • LAM RESEARCH CORPORATIONWILLIAMS, NormanJEWETT, Russel, F., Jr.
    • H03H07/40
    • H01J37/32082H01J37/32183
    • An arrangement and method for matching a load and a power source, such as an r.f. power source for a vacuum plasma processing chamber, includes a match network coupled between the power source and the load. The match network has at least two controllably variable electrical characteristics. A sensor is provided that senses at least two parameters of the load. A drive controller responds to the sensed parameters of the load to independently control varying a first one of the electrical characteristics of the match network as a function of only one of the parameters of the load, and a second one of the electrical characteristics of the match network as a function of another one of the parameters of the load. This is done until the power source and the load are in a matched condition. The separation of the match variables to establish a nearly one-to-one correspondence with the load parameters allows independent adjustment of the match variables to provide fast and unambiguous reaching of the matched condition.
    • 用于匹配负载和电源的布置和方法,例如r.f. 用于真空等离子体处理室的电源包括耦合在电源和负载之间的匹配网络。 匹配网络具有至少两个可控制的可变电气特性。 提供了一个传感器,可以检测负载的至少两个参数。 驱动控制器响应感测到的负载参数以独立地控制根据负载的仅一个参数来改变匹配网络的电特性中的第一个,并且匹配的电特性中的第二个 网络作为另一个负载参数的函数。 直到电源和负载处于匹配状态才能完成。 匹配变量的分离以与负载参数建立几乎一一对应的关系,允许对匹配变量进行独立调整,以提供快速且明确地达到匹配条件。
    • 8. 发明申请
    • METHOD AND APPARATUS FOR MATCHING A VARIABLE LOAD IMPEDANCE WITH AN RF POWER GENERATOR IMPEDANCE
    • 用于匹配具有RF发电机阻抗的可变负载阻抗的方法和装置
    • WO1997048183A1
    • 1997-12-18
    • PCT/US1997010291
    • 1997-06-11
    • RF POWER PRODUCTS, INC.
    • RF POWER PRODUCTS, INC.MAVRETIC, AntonCISZEK, AndrewSTACH, Joseph
    • H03H07/40
    • H03H7/40
    • A method and apparatus for matching the variable impedance of a load with the fixed impedance of a radio frequency (RF) power generator to provide maximum power transfer. The impedance matching network further allows an RF power generator to vary the frequency of the voltage applied to a load, e.g., a plasma chamber as may be utilized in semi-conductor or flat panel plasma display manufacturing processes. The impedance matching network further utilizes fixed solid state components to adjust the impedance of the attached load to provide maximum power transfer between the generator and the load. A parallel switched capacitor network is controlled by an electrical switching means such as PIN diodes to turn fixed capacitors on or off. A means for varying the frequency of the applied voltage is used to match the impedance of the load with the impedance of the RF power generator within milliseconds.
    • 一种用于将负载的可变阻抗与射频(RF)发电机的固定阻抗匹配以提供最大功率传输的方法和装置。 阻抗匹配网络还允许RF功率发生器改变施加到诸如半导体或平板等离子体显示器制造工艺中的负载(例如等离子体室)的电压的频率。 阻抗匹配网络进一步利用固定固态分量来调节所连接负载的阻抗,从而在发电机和负载之间提供最大功率传输。 并联开关电容网络由诸如PIN二极管之类的电开关装置来控制以打开或关闭固定电容器。 用于改变施加电压的频率的手段用于将负载的阻抗与毫微秒内的RF发生器的阻抗相匹配。