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    • 3. 发明授权
    • Gallium nitride thin film on sapphire substrate having reduced bending deformation
    • 蓝宝石衬底上的氮化镓薄膜具有减小的弯曲变形
    • US07592629B2
    • 2009-09-22
    • US11544006
    • 2006-10-06
    • Chang Ho LeeSun Hwan Kong
    • Chang Ho LeeSun Hwan Kong
    • H01L31/12H01L31/256
    • C30B25/18C30B29/406H01L21/0242H01L21/0243H01L21/0254H01L21/02658H01L33/007
    • A gallium nitride thin film on sapphire substrate having reduced bending deformation and a method for manufacturing the same. An etching trench structure is formed on a sapphire substrate by primary nitradation and HCl treatment and a gallium nitride film is grown thereon by secondary nitradation. The gallium nitride thin film on sapphire substrate comprises an etching trench structure formed on a sapphire substrate, wherein a function graph of a curvature radius Y according to a thickness X of a gallium nitride film satisfies Equation 1 below, and corresponds to or is located above a function graph drawn when Y0 is 6.23±1.15, A is 70.04 ±1.92, and T is 1.59±0.12: Y=Y0+A·e−(X−1)/T,  [Equation 1] where Y is the curvature radius m, X is the thickness of the gallium nitride film, and Y0, A, and T are positive numbers.
    • 减少弯曲变形的蓝宝石衬底上的氮化镓薄膜及其制造方法。 通过初步氮化和HCl处理在蓝宝石衬底上形成蚀刻沟槽结构,并通过二次氮化在其上生长氮化镓膜。 蓝宝石衬底上的氮化镓薄膜包括形成在蓝宝石衬底上的蚀刻沟槽结构,其中根据氮化镓膜的厚度X的曲率半径Y的函数图满足下面的等式1,并且对应于或位于上面 当Y0为6.23±1.15时,A为70.04±1.92,T为1.59±0.12:<?在线公式描述=“在线公式”end =“lead”?> Y = Y0 + Ae-(X-1)/ T,[等式1] <?in-line-formula description =“In-line formula”end =“tail”?>其中Y是曲率半径m,X是 氮化镓膜,Y0,A,T为正数。