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1. 发明专利

CZ7302U1 Detection system of raster electronic microscope 未知
公开(公告)号：CZ7302U1
公开(公告)日：1998-06-17
申请号：CZ772398
申请日：1997-03-13
申请人： PRECIOSA
发明人： AUTRATA RUDOLF PROF ING DRSC , JIRAK JOSEF DOC ING , SPINKA JIRI ING , BLAZEK KAREL ING
IPC分类号： H01J37/28 , H01J37/244 , H01J37/26 , H01J037/28 , H01J037/244 , H01J037/26

2. 发明专利

CZ6007U1 Detection system of scanning electron microscope 未知
公开(公告)号：CZ6007U1
公开(公告)日：1997-06-11
申请号：CZ640797
申请日：1997-03-13
申请人： PRECIOSA
发明人： AUTRATA RUDOLF PROF ING DRSC , JIRAK JOSEF DOC ING , SPINKA JIRI ING , BLAZEK KAREL ING
IPC分类号： H01J37/28 , H01J037/28

3. 发明专利

AU2001277393B2 Environmental scanning electron microscope 未知
公开(公告)号：AU2001277393B2
公开(公告)日：2005-09-01
申请号：AU2001277393
申请日：2001-08-03
申请人： GERASIMOS DANILATOS
发明人： DANILATOS GERASIMOS DANIEL
IPC分类号： H01J037/28 , H01J037/301

4. 发明申请

US20040227081A1 Electron beam apparatus 失效
标题翻译：电子束装置
公开(公告)号：US20040227081A1
公开(公告)日：2004-11-18
申请号：US10875178
申请日：2004-06-25
发明人： Mitsugu Sato , Hideo Todokoro
IPC分类号： H01J037/28
CPC分类号： H01J37/1474 , H01J37/05 , H01J37/153 , H01J2237/1536 , H01J2237/2817
摘要： An electron beam (4) to be irradiated onto a sample (10) is two-dimensionally scanned by a scanning coil (9), and secondary electrons generated from the sample (10) by the scanning are detected by a secondary electron detector (13). A deflection coil (15) for image shifting is used for electrically deflecting the primary electron beam to shift a field of view for image shift in an arbitrary direction by an arbitrary amount. By the image shift, the primary electron beam (4) to be irradiated onto the sample is energy dispersed to degrade the resolution. However, an EnullB field producer (30) for dispersion control gives the primary electron beam energy dispersion in the opposite direction and having the equal magnitude. Therefore, the energy dispersion produced in the primary electron beam by the image shift is automatically corrected.
摘要翻译：通过扫描线圈（9）对被照射在样品（10）上的电子束（4）进行二维扫描，用二次电子检测器（13）检测从样品（10）通过扫描产生的二次电子）。用于图像偏移的偏转线圈（15）用于使一次电子束电偏转以使任意方向上的图像偏移的视场移动任意量。通过图像偏移，待照射到样品上的一次电子束（4）能量分散以降低分辨率。然而，用于色散控制的ExB场生成器（30）给出相反方向上的一次电子束能量色散并且具有相等的幅度。因此，通过图像偏移在一次电子束中产生的能量色散被自动校正。

5. 发明申请

US20040188611A1 Scanning electron microscope and sample observing method using it 有权
标题翻译：扫描电子显微镜和使用它的样品观察方法
公开(公告)号：US20040188611A1
公开(公告)日：2004-09-30
申请号：US10750838
申请日：2004-01-05
发明人： Shuichi Takeuchi , Mine Nakagawa , Mitsugu Sato , Atsushi Takane , Kazutaka Nimura
IPC分类号： H01J037/28 , G01N023/225
CPC分类号： H01J37/21 , H01J37/28
摘要： The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.
摘要翻译：本发明提供一种能够更宽范围地理解样品的三维形状的样本观察方法。本发明的观察方法，通过使焦点深度扩大获得的图像的整个图像的整个区域的高度（高度差）从不同的视野角的多张图像对焦在整个图像上。功能，从而由每个像素创建高度信息的地图（Z图），并将三维图像显示为鸟瞰图。该方法还显示为从反映具有不同颜色的合成信息的图像信号获得的Z映射上反映表面结构的图像信号中叠加的Z映射，这使得可以清楚地了解内部独特成分的物质的空间分布例子。

6. 发明申请

US20040113074A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20040113074A1
公开(公告)日：2004-06-17
申请号：US10730106
申请日：2003-12-09
申请人： Hitachi, Ltd.
发明人： Naomasa Suzuki , Toshiro Kubo , Noriaki Arai , Mitsugu Sato , Hideo Todokoro , Yoichi Ose
IPC分类号： H01J037/28
CPC分类号： H01J37/28 , H01J2237/04753 , H01J2237/04756
摘要： Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.
摘要翻译：实现高分辨率的图像观察，获得样品的不规则信息。通过设置在磁场泄漏型物镜7的电子源1侧的检测器10a，10b来检测与样品8的表面小角度方向发射的反射电子12a，样本图像为形成。从样本图像中出现的光和阴影的效果获得样本的不规则信息。

7. 发明申请

US20030218133A1 Charged particle beam column and method for directing a charged particle beam 有权
标题翻译：带电粒子束柱和引导带电粒子束的方法
公开(公告)号：US20030218133A1
公开(公告)日：2003-11-27
申请号：US10154530
申请日：2002-05-22
申请人： Applied Materials Israel Ltd
发明人： Igor Petrov , Zvika Rosenberg
IPC分类号： H01J037/28
CPC分类号： H01J37/28 , H01J37/1472 , H01J37/153 , H01J37/244
摘要： A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam propagation towards a focusing assembly, passes through a beam shaper, that affects the cross section of the primary charged particle beam to compensate for aberrations of focusing caused by astigmatism effect of a focusing field produced by an objective lens arrangement of the focusing assembly, and then passes through a beam axis alignment system, that aligns the axis of the primary charged particle beam with respect to the optical axis of the objective lens arrangement.
摘要翻译：提出了一种方法和带电粒子束柱，用于将初级带电粒子束引导到样品上。沿着波束传播的初始轴向聚焦组件传播的主要带电粒子束通过束形成器，其影响初级带电粒子束的横截面以补偿由聚焦场的散光效应引起的聚焦像差由聚焦组件的物镜布置产生，然后通过光束轴对准系统，其使主要带电粒子束的轴线相对于物镜装置的光轴对准。

8. 发明申请

US20030071214A1 Method and scanning electron microscope for measuring width of material on sample 有权
标题翻译：用于测量样品材料宽度的方法和扫描电子显微镜
公开(公告)号：US20030071214A1
公开(公告)日：2003-04-17
申请号：US10246453
申请日：2002-09-19
发明人： Goroku Shimoma , Tadashi Otaka , Mitsugu Sato , Hideo Todokoro , Shunichi Watanabe , Tadanori Takahashi , Masahiro Kawawa , Masanori Gunji , Terumichi Nishino
IPC分类号： H01J037/28
CPC分类号： H01J37/28 , H01J2237/2814
摘要： A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.
摘要翻译：一种宽度测量方法，用于减少或消除由光束直径尺寸导致的样品宽度测量误差，其中宽度测量对象的宽度测量值已经在从其上具有待宽度测量对象的样品发射的二次粒子获得的二次信号的基础用相对于束直径的尺寸值的值进行校正。

9. 发明申请

US20020109088A1 Inspection method, apparatus and system for circuit pattern 失效
公开(公告)号：US20020109088A1
公开(公告)日：2002-08-15
申请号：US10116059
申请日：2002-04-05
发明人： Yasuhiko Nara , Kazuhisa Machida , Mari Nozoe , Hiroshi Morioka , Yasutsugu Usami , Takashi Hiroi , Kohichi Hayakawa , Maki Ito
IPC分类号： H01J037/28
CPC分类号： G03F7/70616 , G03F1/84 , G03F7/7065 , G06T7/001 , G06T2207/30141 , H01J37/226 , H01J2237/082 , H01J2237/2817 , H01L22/12
摘要： Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by irradiating white light, a laser beam, or a charged particle beam are set, its operating efficiency can be improved. An inspection target region of an inspection-subject substrate is displayed, and a designated map picture plane and an image of an optical microscope or an electron beam microscope of a designated region are displayed in parallel, thereby enabling a defect distribution and a defect image to be simultaneously seen. Item names of inspecting conditions and a picture plane to display, input, or instruct the contents of the inspecting conditions are integrated, those contents are overlapped to the picture plane and layer-displayed, and all of the item names are displayed in parallel in a tab format in the upper portion of the picture plane of the contents. When a desired item name is clicked, the picture plane is switched and the contents corresponding to the clicked item name are displayed.

10. 发明申请

US20020088941A1 Scanning electronic beam apparatus 有权
标题翻译：扫描电子束装置
公开(公告)号：US20020088941A1
公开(公告)日：2002-07-11
申请号：US10021332
申请日：2001-10-29
发明人： Akira Yonezawa
IPC分类号： H01J037/28
CPC分类号： H01J37/145 , H01J37/28 , H01J2237/244 , H01J2237/281
摘要： The secondary electrons, from a sample placed within a lens magnetic field, are detected by a plurality of secondary electron detectors, thereby effectively observing a concave/convex in a sample surface. In a scanning electronic beam apparatus having upper and lower electrodes built in a single-pole magnetic-field type lens to place a sample within a lens magnetic field, a negative voltage is applied to the sample and the lower electrode opposed thereto while a zero or positive voltage is applied to the upper electrode, whereby an electric field for suppressing the helical motion of a secondary electron given off from the sample due to electron-beam irradiation is caused within a region of from the sample to an objective lens magnetic field space closer to an electron source. The secondary electron is detected by a division-type MCP or a plurality of scintillator-type secondary electron detectors arranged sandwiching the optical axis.
摘要翻译：来自放置在透镜磁场内的样品的二次电子被多个二次电子检测器检测，从而有效地观察样品表面中的凹/凸。在具有内置在单极磁场型透镜中的上电极和下电极以将样品置于透镜磁场内的扫描电子束装置中，对与其相对的样品和下电极施加负电压，同时将零或向上部电极施加正电压，从而在从样品到物镜的磁场空间更靠近的区域内产生用于抑制由于电子束照射而从样品发出的二次电子的螺旋运动的电场到电子源。二次电子由分割型MCP或多个闪烁体型二次电子检测器检测，其夹持光轴。

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