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1. 发明专利

CZ7302U1 Detection system of raster electronic microscope 未知
公开(公告)号：CZ7302U1
公开(公告)日：1998-06-17
申请号：CZ772398
申请日：1997-03-13
申请人： PRECIOSA
发明人： AUTRATA RUDOLF PROF ING DRSC , JIRAK JOSEF DOC ING , SPINKA JIRI ING , BLAZEK KAREL ING
IPC分类号： H01J37/28 , H01J37/244 , H01J37/26 , H01J037/28 , H01J037/244 , H01J037/26

2. 发明申请

US20040000646A1 Array for achromatic imaging of a pulsed particle ensemble 失效
标题翻译：用于脉冲粒子集合的消色差成像的阵列
公开(公告)号：US20040000646A1
公开(公告)日：2004-01-01
申请号：US10418231
申请日：2003-04-17
发明人： Gerd Schonhense , Heinrich Spiecker
IPC分类号： H01J037/244
CPC分类号： H01J37/153
摘要： An array for achromatic imaging of a pulsed ensemble of charged particles is described. The device comprises an imaging system with a round lens optics (2, 7), a low-energy drift space (3) and an accelerator (4-6) driven by at least one rapidly switchable voltage U(t), such that the velocity and/or trajectory of the particles in the ensemble is influenced and the particles starting from point (1) with different energies are crossing the image plane in one point (8), i.e. the chromatic aberration of the optics is compensated.
摘要翻译：描述了带电粒子的脉冲整体的消色差成像阵列。该装置包括具有圆形透镜光学器件（2,7），低能量漂移空间（3）和由至少一个可快速切换的电压U（t）驱动的加速器（4-6））的成像系统，使得受影响的是粒子的速度和/或轨迹，从具有不同能量的点（1）开始的粒子在一个点（8）中与图像平面交叉，即补偿了光学的色差。

3. 发明申请

US20030183764A1 Method for charging a structure comprising an insulating body 失效
标题翻译：一种用于对包括绝缘体的结构进行充电的方法
公开(公告)号：US20030183764A1
公开(公告)日：2003-10-02
申请号：US10362212
申请日：2003-02-26
发明人： Janick Bigarre , Patrick Hourquebie , Jerome Matallana
IPC分类号： H01J037/252 , H01J037/244
CPC分类号： G01R27/2617 , G01R31/305
摘要： Process for charging a structure (1) formed from an insulating body (2) sandwiched between two electrodes (3, 4), characterized in that it comprises the following steps: A Faraday cage (9) is placed in contact with one of the electrodes (3) of the structure (1), the potential of the other electrode (4) being made equal to a reference potential. Electrons originating from a controlled electron emission device (6) are introduced into the Faraday cage (9), the electrons reaching the electrode (3) with which it is in contact in order to charge the structure (1). Application particularly for the determination of properties of insulating materials.
摘要翻译：用于对由夹在两个电极（3,4）之间的绝缘体（2）形成的结构（1）进行充电的方法，其特征在于包括以下步骤：将法拉第笼（9）放置成与一个电极（1）的（3），使另一个电极（4）的电位等于参考电位。源自受控电子发射器件（6）的电子被引入法拉第笼（9）中，电子到达与其接触的电极（3），以便为结构（1）充电。特别适用于绝缘材料性能的测定。

4. 发明申请

US20020079449A1 SEM having a detector surface segmented into a number of separate regions 审中-公开
标题翻译： SEM将检测器表面分割成多个分开的区域
公开(公告)号：US20020079449A1
公开(公告)日：2002-06-27
申请号：US10011618
申请日：2001-12-06
发明人： Marcellinus Petrus Carolus Michael Krijn , Jan Martijn Krans
IPC分类号： H01J037/28 , H01J037/244
CPC分类号： H01J37/28 , H01J2237/24465 , H01J2237/24485 , H01J2237/24564 , H01J2237/2817
摘要： The invention relates to a SEM with an electrostatic objective lens 14, 16 and a detector 6, 8 for through-the-lens detection of electrons 24. In accordance with the invention a voltage contrast (voltage range of the order of magnitude of from 1 to 10 V) is achieved by subdividing this detector surface 9 into separate regions, preferably concentric annular regions 36 and 38, and by electronically combining the signals from these regions.
摘要翻译：本发明涉及具有静电物镜14,16和用于通过透镜检测电子24的检测器6,7的SEM。根据本发明，电压对比度（电压范围为1级数量级至10V）通过将该检测器表面9细分成分离的区域，优选地同心环形区域36和38以及通过电子组合来自这些区域的信号来实现。

5. 发明申请

US20040262533A1 Advanced ion beam detector for ion implantation tools 有权
标题翻译：用于离子植入工具的先进离子束检测器
公开(公告)号：US20040262533A1
公开(公告)日：2004-12-30
申请号：US10786456
申请日：2004-02-25
发明人： Christian Krueger
IPC分类号： H01J037/244
CPC分类号： H01J37/244 , H01J2237/24405 , H01J2237/31703
摘要： The present invention provides an improved Faraday cup configuration that allows determination of a non-zero angle of incidence and/or a beam divergence with high accuracy. Moreover, by substantially simultaneously and continuously displaying information of a plurality of Faraday cups, the set-up of an implantation tool may be significantly facilitated and may be carried out in a substantially automated manner.
摘要翻译：本发明提供了一种改进的法拉第杯配置，其允许以高精度确定非零入射角和/或光束发散。此外，通过基本上同时且连续地显示多个法拉第杯的信息，可以显着地促进植入工具的设置并且可以以基本上自动化的方式进行。

6. 发明申请

US20040069952A1 Beam adjusting sample, beam adjusting method and beam adjusting device 有权
标题翻译：光束调整样品，光束调节方法和光束调节装置
公开(公告)号：US20040069952A1
公开(公告)日：2004-04-15
申请号：US10679416
申请日：2003-10-07
申请人： PIONEER CORPORATION
发明人： Masahiro Katsumura , Yoshiaki Kojima , Yasumitsu Wada , Hiroaki Kitahara
IPC分类号： H01J037/244
CPC分类号： H01J37/28 , H01J2237/21
摘要： A beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other is employed. A beam is applied to the beam adjusting sample to detect an amount of the beam passing through the beam adjusting sample. The beam vertically scans the two edges.
摘要翻译：采用具有平板表面并具有彼此正交的两个边缘的平坦表面的光束调节样品。光束被施加到光束调整样本以检测通过光束调节样本的光束的量。光束垂直扫描两个边缘。

7. 发明申请

US20030116717A1 Detector arrangement and detection method 有权
标题翻译：检测器布置和检测方法
公开(公告)号：US20030116717A1
公开(公告)日：2003-06-26
申请号：US10294609
申请日：2002-11-15
发明人： Rainer Knippelmeyer
IPC分类号： H01J037/244
CPC分类号： H01J37/244
摘要： A detector arrangement for detecting position information contained in a beam (5) of charged particles is provided, comprising a plurality of position-sensitive detectors (17), each for supplying an image containing the position information of a position-dependent distribution of intensity, integrated in terms of time, of charged particles impinging on a detection area (19) of the detector (17), a control system (47) configured to receive the image supplied by the detectors (17), and a deflector (3) configured to direct the beam (5) of charged particles to the detection area (19) of a first detector (17) selectable from the plurality of detectors (17), the deflector (3) being controllable by the control system (47) to select the detector (17) from the plurality of detectors (17) to which the beam (5) is to be directed.
摘要翻译：提供一种用于检测包含在带电粒子束（5）中的位置信息的检测器装置，包括多个位置敏感检测器（17），每个位置敏感检测器用于提供包含强度位置相关分布的位置信息的图像，在时间上集成了撞击在检测器（17）的检测区域（19）上的带电粒子，配置成接收由检测器（17）提供的图像的控制系统（47）和配置成将带电粒子束（5）引导到可从多个检测器（17）中选择的第一检测器（17）的检测区域（19），偏转器（3）由控制系统（47）控制以选择来自多个检测器（17）的检测器（17），梁（5）将被引导到该检测器。

8. 发明申请

US20020117628A1 Detection system 失效
标题翻译：检测系统
公开(公告)号：US20020117628A1
公开(公告)日：2002-08-29
申请号：US10078539
申请日：2002-02-21
发明人： Ian Radley , Santokh Singh Bhadare , Christopher Tyrrell
IPC分类号： H01J037/244
CPC分类号： F25B9/145 , F25B9/10 , F25B2309/1408 , F25B2309/1413 , F25B2309/1424 , F25D19/006 , G01T1/244 , G01T7/00 , H01J37/244 , H01J37/256 , H01J2237/2555
摘要： A detection system for detecting X-ray radiation from a sample located in a microbeam instrument. The detection system comprises: a. a pulse tube cooler; b. a compressor connected to the pulse tube cooler; c. a sensor coupled to the pulse tube cooler; and, d. a housing containing the pulse tube cooler and the sensor. The pulse tube cooler, the sensor and at least part of the housing are sufficiently small to be positioned inside the microbeam instrument in use, thereby allowing the X-ray radiation from the sample to be detected by the sensor.
摘要翻译：一种用于检测来自位于微束仪器中的样品的X射线辐射的检测系统。检测系统包括：a。脉冲管冷却器; b。连接到脉冲管冷却器的压缩机; C。耦合到所述脉冲管冷却器的传感器; 和，d。包含脉冲管冷却器和传感器的外壳。脉冲管冷却器，传感器和壳体的至少一部分足够小以在使用中定位在微束仪器的内部，从而允许来自样品的X射线辐射由传感器检测。

9. 发明申请

US20020053643A1 Convergent charged particle beam apparatus and inspection method using same 有权
标题翻译：收敛带电粒子束装置及其检验方法
公开(公告)号：US20020053643A1
公开(公告)日：2002-05-09
申请号：US10012400
申请日：2001-12-12
发明人： Maki Tanaka , Masahiro Watanabe , Takashi Hiroi , Hiroyuki Shinada , Taku Ninomiya
IPC分类号： H01J037/244
CPC分类号： H01J37/21 , G01N2001/2893 , H01J2237/2817 , H01J2237/304
摘要： A convergent charged particle beam apparatus and method includes an electron beam image observation arrangement which observes an electron beam image of a surface of a specimen mounted on a movable stage inside of a vacuum chamber when an electron beam converged by an electron optical system is irradiated and scanned over the surface of the specimen and detecting secondary charged particles produced from the specimen so as to provide electron image data of the surface. A height detector optically detects a surface height of the specimen by irradiating light from outside of the vacuum chamber onto the specimen and detecting reflected light from the specimen with a detector disposed outside of the vacuum chamber. A controller controls a focal point of the converged and focused electron beam in accordance with the output from the height detector, and a display displays the electron image of the surface of the specimen.
摘要翻译：收敛带电粒子束装置和方法包括电子束图像观察装置，当照射由电子光学系统会聚的电子束时，其观察安装在真空室内的可移动载物台上的样品的表面的电子束图像，在试样的表面上扫描，并检测从样品产生的二次带电粒子，以提供表面的电子图像数据。高度检测器通过将来自真空室外部的光照射到样本上并用设置在真空室外部的检测器检测来自样品的反射光来光学地检测样品的表面高度。控制器根据高度检测器的输出控制会聚聚焦电子束的焦点，显示器显示样品表面的电子图像。

10. 发明申请

US20020008201A1 Specimen inspection instrument 失效
标题翻译：标本检验仪器
公开(公告)号：US20020008201A1
公开(公告)日：2002-01-24
申请号：US09876853
申请日：2001-06-07
申请人： JEOL Ltd.
发明人： Yukihiro Tanaka , Sadao Matsumoto , Toru Ishimoto , Hirofumi Miyao
IPC分类号： H01J037/28 , H01J037/244
CPC分类号： H01J37/28 , G01R31/2653 , G01R31/305 , H01J37/244 , H01J2237/24495 , H01J2237/24564
摘要： A specimen inspection instrument has a specimen-moving mechanism mounted within a specimen chamber. An electrical current, induced across the specimen by the mechanism, is detected with a detector. The specimen is examined based on the obtained detector output signal. An amplifier for amplifying the detector output signal is placed outside the specimen chamber. A first lead wire passes the detector output signal to the outside amplifier through the wall of the specimen chamber. A second lead wire connects a conductive partition member with a conducting member and with a reference input terminal of the amplifier that determines a reference potential for the output from the amplifier.
摘要翻译：样品检查仪器具有安装在样品室内的样品移动机构。用检测器检测通过该机构在试样上感应的电流。根据获得的检测器输出信号检查样本。用于放大检测器输出信号的放大器放置在样品室外部。第一引线将检测器输出信号通过样品室的壁传递到外部放大器。第二导线将导电分隔构件与导电构件和放大器的参考输入端连接，该放大器的参考输入端确定放大器的输出的参考电位。

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