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    • 3. 发明授权
    • Double-sided patterning system using dual-wavelength output of an
excimer laser
    • 使用准分子激光器的双波长输出的双面图案化系统
    • US5933216A
    • 1999-08-03
    • US951864
    • 1997-10-16
    • Thomas J. Dunn
    • Thomas J. Dunn
    • G03F7/20G03D27/52
    • G03F7/70425
    • A high-performance projection optical system uses the multiple spectral peaks of an excimer laser system by using an optical dispersive system to physically separate the broadband laser output into separate narrowband beams which can be used for imaging different substrate surfaces simultaneously. The separated narrowband beams are directed along different optical paths and used to illuminate the object planes of different, identical projection lenses. The projection lenses are designed for the narrowed bandwidth corresponding to one spectral peak of the excimer laser rather than the broadband, multiple-peak laser output This dramatically simplifies both the design and the construction of the projection lens, leading to substantial cost-savings. The conversion of the single-beam, broadband spectral output into a multiple-beam, narrowband source is accomplished by optical dispersion means consisting of either several prisms in series, one or more prisms followed by a mirror reflecting back through the prisms, or one or more reflective gratings. The separated narrowband beams are useful for imaging top and bottom of a single substrate with exact registration useful for via-hole connections. Other uses include simultaneous imaging of multiple substrates, using one or more stages.
    • 高性能投影光学系统使用准分子激光系统的多个光谱峰值,通过使用光学色散系统将宽带激光器输出物理分离成单独的窄带束,其可以同时用于成像不同的衬底表面。 分离的窄带光束沿着不同的光路被引导,并用于照亮不同的相同投影透镜的物平面。 投影镜头设计用于对应于准分子激光器的一个光谱峰值的窄带宽,而不是宽带多峰激光输出。这极大地简化了投影镜头的设计和构造,从而节省了大量成本。 将单光束宽带光谱输出转换为多光束窄带光源的光学色散装置由串联的多个棱镜组成,一个或多个棱镜随后是通过棱镜反射的镜子,或者一个或多个 更多的反光栅。 分离的窄带束可用于单个基板的顶部和底部成像,具有用于通孔连接的精确配准。 其他用途包括使用一个或多个阶段同时成像多个底物。