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1. 发明申请

US20030227695A1 Deformable reflecting mirrors from metallic surface layers deposited on liquids 有权
标题翻译：可变形的反射镜，沉积在液体上的金属表面层
公开(公告)号：US20030227695A1
公开(公告)日：2003-12-11
申请号：US10409311
申请日：2003-04-09
申请人： Universite Laval
发明人： Ermanno Borra , Anna Ritcey , Helene Yockel-Lelievre
IPC分类号： G02B005/08 , G02B007/195
CPC分类号： G02B26/005 , G02B26/0825 , Y10S359/90
摘要： The invention relates to a new type of reflective optical element made of a reflective metallic layer comprising reflecting nanoparticles deposited on a liquid surface. Metallic or non-metallic nanometer-sized particles are coated with a ligand. The coated particles are concentrated and deposited on the surface of a liquid where they self-assemble to give optical-quality high-reflectivity optical surfaces. Coating liquid surfaces with reflective layers allows one to make inexpensive and versatile high-quality mirrors. The surfaces of liquids can be shaped by a variety of techniques.
摘要翻译：本发明涉及一种由反射金属层制成的新型反射光学元件，其包括沉积在液体表面上的反射纳米颗粒。用配体涂覆金属或非金属纳米尺寸的颗粒。将涂覆的颗粒集中并沉积在液体的表面上，在那里它们自组装以提供光学质量的高反射率光学表面。具有反射层的涂层液体表面允许制造便宜且通用的高品质镜子。液体的表面可以通过各种技术成型。

2. 发明申请

US20040051984A1 Devices and methods for cooling optical elements in optical systems, including optical systems used in vacuum environments 审中-公开
标题翻译：用于冷却光学系统中光学元件的设备和方法，包括在真空环境中使用的光学系统
公开(公告)号：US20040051984A1
公开(公告)日：2004-03-18
申请号：US10607392
申请日：2003-06-25
申请人： Nikon Corporation
发明人： Tetsuya Oshino , Kazuya Ota , Hiroyuki Kondo , Keiichi Tanaka
IPC分类号： G02B005/08 , G02B007/195
CPC分类号： G03F7/70891 , G02B7/008
摘要： Devices are disclosed that cool optical elements with which the devices are associated, most advantageously reflective optical elements such as mirrors and reflective reticles. The devices have especial utility for reducing deformation and other undesired thermal changes of the respective optical elements, such as optical elements used in extremely demanding optical systems such as used in microlithography systems, most notably EUVL systems. Many of the subject devices typically include a heat-receiving plate or analogous feature that receives heat radiated from the optical element across a gap between the optical element and the heat-receiving plate. Some devices include a plate-cooling device for removing heat from the heat-receiving plate. Other devices employ conduction of heat away from the optical element. Yet other devices employ a flowing heat-transfer medium for removing heat from the optical element. Certain devices also are configured to provide mechanical support for the respective optical elements, notably in a manner that limits deformation of the optical elements.
摘要翻译：公开了与设备相关联的冷光学元件的装置，最有利的是反射光学元件，例如反射镜和反射型掩模版。这些装置具有特别的用途，用于减少相应光学元件的变形和其它不期望的热变化，例如用于非常苛刻的光学系统中的光学元件，例如用在微光刻系统中，尤其是EUVL系统。许多目标装置通常包括热接收板或类似特征，其接收穿过光学元件和热接收板之间的间隙从光学元件辐射的热量。一些装置包括用于从热接收板移除热量的板冷却装置。其他器件使用远离光学元件的热传导。还有其它装置采用流动的热传递介质来从光学元件去除热量。某些设备还被配置为为各个光学元件提供机械支撑，特别是以限制光学元件的变形的方式。

3. 发明申请

US20040035570A1 Cooling apparatus and method, and exposure apparatus having the cooling apparatus 有权
标题翻译：冷却装置和方法以及具有冷却装置的曝光装置
公开(公告)号：US20040035570A1
公开(公告)日：2004-02-26
申请号：US10631927
申请日：2003-07-31
发明人： Shinichi Hara
IPC分类号： F25B021/02 , G05D023/00 , F24H003/00 , G03C001/725 , G02B007/195 , G03C001/735 , G03C001/73 , G02B005/08
CPC分类号： H01L35/00 , F25B21/02 , F25B2321/0212 , F25D19/00 , G03F7/70233 , G03F7/70891
摘要： A cooling apparatus for cooling an optical element provided in a vacuum atmosphere includes a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer, and a controller for controlling temperature of the radiation cooling part.
摘要翻译：用于冷却设置在真空气氛中的光学元件的冷却装置包括：与光学元件隔开的辐射冷却部件，用于通过辐射热传递来冷却光学元件;以及控制器，用于控制辐射冷却部件的温度。

4. 发明申请

US20040156130A1 Homogenizing optical sheet, method of manufacture, and illumination system 有权
标题翻译：均质光学片，制造方法和照明系统
公开(公告)号：US20040156130A1
公开(公告)日：2004-08-12
申请号：US10748618
申请日：2003-12-30
发明人： Karlton David Powell , Mircea Michael Bayer
IPC分类号： G02B005/08 , G02B007/195
CPC分类号： G02B19/0066 , G02B3/0025 , G02B3/0031 , G02B3/005 , G02B3/0056 , G02B3/0062 , G02B3/0068 , G02B19/0014 , G02B19/0095 , G02B27/09 , G02B27/0927 , G02B27/0961 , G02F1/133526
摘要： An optical sheet that accepts light transmitted at or within a specific entrance cone angle that then redirects and transmits the light within an exit cone that is substantially normal to the sheet's plane. The intensity of the light within the exit cone is substantially uniform for any light source entering the sheet within the sheet's acceptance angle. The optical sheet is made of transparent material with microlens arrays formed on its opposite front and back surfaces. The thickness of the optical sheet is sufficient so that the microlens on the opposite surfaces are separated a distance equal to the microlens focal length, with each microlens on the front and back surfaces having substantially similar size and shape, with centers transversely aligned. When used with one or more light sources located on one surface, the transmitted light through the optical sheet is uniform in intensity across a second surface. When used with a second optical sheet, aligned parallel to the first optical sheet, the transmitted light is uniform across and throughout angles within the exit cone at a second surface. An economical method of manufacturing the optical sheet is also provided.
摘要翻译：接受在特定入口锥角处或之内透射的光，其然后在基本上垂直于片材平面的出口锥体内重定向并透射光。出口锥体内的光的强度对于在片材的接受角度内进入片材的任何光源是基本均匀的。光学片由透明材料制成，在其相对的前表面和后表面上形成有微透镜阵列。光学片的厚度足够使得相对表面上的微透镜被分离等于微透镜焦距的距离，前表面和后表面上的每个微透镜具有基本相似的尺寸和形状，其中心横向对准。当与位于一个表面上的一个或多个光源一起使用时，通过光学片的透射光在第二表面上的强度是均匀的。当与平行于第一光学片的第二光学片一起使用时，透射光在第二表面处的出射锥体内的整个角度是均匀的。还提供了一种制造光学片的经济方法。

5. 发明申请

US20030169520A1 Mirror assembly with thermal contour control 失效
标题翻译：具有热轮廓控制的镜面组件
公开(公告)号：US20030169520A1
公开(公告)日：2003-09-11
申请号：US10095621
申请日：2002-03-11
发明人： Michael Goldstein
IPC分类号： G02B005/08 , G02B007/195
CPC分类号： G03F7/70891 , G02B7/1815 , G02B26/06
摘要： A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.
摘要翻译：用于补偿镜子中的加热效应的系统。镜子的不同区域与掩埋温度传感器相关联。监控每个温度传感器，并用于创建当前温度的映射。当前温度的映射可以根据基线值进行校正，然后用于补偿温度差异。

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