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    • 1. 发明授权
    • Automated chemical management system having improved analysis unit
    • 自动化学管理系统具有改进的分析单位
    • US06814855B2
    • 2004-11-09
    • US09931283
    • 2001-08-16
    • Lyndon W. GrahamDakin Fulton
    • Lyndon W. GrahamDakin Fulton
    • G01N2728
    • G01N27/4161G01N27/48
    • A method and apparatus for measuring a target constituent of an electroplating solution using an electroanalytical technique is set forth. In accordance with the method, at least two electrodes are employed to execute the electroanalytical technique. Gasses that are trapped or generated at the surface of one or both of the electrodes of the pair are reduced and/or removed by directing a flow of solution toward the electrode surface. This flow of solution against the electrode surface acts to automatically flush the generated gasses (typically in the form of small bubbles) from the electrode surface and generally eliminates the need for manual purging by an operator. Elimination of these gasses reduces or eliminates variability in the open circuit potential, and concomitant noise that would otherwise occur in the electroanalytical measurements.
    • 阐述了使用电分析技术测量电镀溶液的目标成分的方法和装置。 根据该方法,使用至少两个电极来执行电分析技术。 通过将溶液流引向电极表面而减少和/或去除在一对电极的一个或两个电极的表面处被捕获或产生的气体。 针对电极表面的这种溶液流动用于自动地从电极表面冲洗产生的气体(通常为小气泡的形式),并且通常消除了操作者手动清除的需要。 消除这些气体会降低或消除开路电位的变化性,否则会在电分析测量中产生伴随的噪音。