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1. 发明授权

US06345238B1 Linear temperature sensor 失效
标题翻译：线性温度传感器
公开(公告)号：US06345238B1
公开(公告)日：2002-02-05
申请号：US09364464
申请日：1999-07-30
申请人： Shaun Goodwin
发明人： Shaun Goodwin
IPC分类号： G01K120
CPC分类号： G01K7/10
摘要： A linear temperature sensor that incorporates passive bipolar semiconductor devices and is capable of high accuracy over a very wide temperature range. The passive bipolar semiconductor device splits a voltage drop between the bipolar semiconductor and a resistor, such that the voltage drop varies approximately linearly in negative dependence on temperature. Optionally the linearity may be improved by providing sufficient current to produce a self-heating effect which compensates for non-linear deviations in performance at low temperatures.
摘要翻译：线性温度传感器，采用无源双极型半导体器件，能够在非常宽的温度范围内实现高精度。无源双极半导体器件分离双极半导体和电阻器之间的电压降，使得电压降与温度呈负相关的近似线性变化。可选地，可以通过提供足够的电流来产生补偿低温下性能的非线性偏差的自发热效应来改善线性度。

2. 发明授权

US06512991B1 Method and apparatus for reducing deposition variation by modeling post-clean chamber performance 有权
标题翻译：通过建模后清洁室性能来减少沉积变化的方法和装置
公开(公告)号：US06512991B1
公开(公告)日：2003-01-28
申请号：US09614312
申请日：2000-07-12
申请人： Bradley M. Davis , Allen L. Evans , Craig W. Christian
发明人： Bradley M. Davis , Allen L. Evans , Craig W. Christian
IPC分类号： G01K120
CPC分类号： G01K7/42
摘要： A method for reducing deposition thickness variation in a processing tool comprises storing a post-clean performance model of the processing tool; receiving at least one of a showerhead age and a tool idle time associated with the processing tool as an input parameter; determining temperature control parameters based on the input parameter and the post-clean performance model; and modifying an operating recipe of the processing tool based on the temperature control parameters. A processing system includes a processing tool and an automatic process controller. The processing tool is adapted to process wafers in accordance with an operating recipe. The automatic process controller is adapted to store a post-clean performance model of the processing tool, receive at least one of a showerhead age and a tool idle time associated with the processing tool as an input parameter, determine temperature control parameters based on the input parameter and the post-clean performance model, and modify the operating recipe of the processing tool based on the temperature control parameters.
摘要翻译：一种用于减少处理工具中的沉积厚度变化的方法包括：存储处理工具的后清洁性能模型; 接收与处理工具相关联的喷头年龄和工具空闲时间中的至少一个作为输入参数; 根据输入参数和清洁后性能模型确定温度控制参数; 以及基于所述温度控制参数来修改所述处理工具的操作配方。处理系统包括处理工具和自动过程控制器。处理工具适于根据操作配方处理晶片。自动过程控制器适于存储处理工具的后清洁性能模型，接收与处理工具相关联的喷头年龄和工具空闲时间中的至少一个作为输入参数，基于输入来确定温度控制参数参数和清洁后性能模型，并根据温度控制参数修改加工工具的操作配方。

3. 发明授权

US06471398B2 Temperature management apparatus for foodstuff in storage cabinet 失效
标题翻译：储物柜食品温度管理装置
公开(公告)号：US06471398B2
公开(公告)日：2002-10-29
申请号：US09307576
申请日：1999-05-10
申请人： Yoshiyuki Ukai
发明人： Yoshiyuki Ukai
IPC分类号： G01K120
CPC分类号： F25D29/00 , F25D17/06 , F25D2317/0655 , F25D2317/0661 , F25D2400/36 , F25D2500/04 , F25D2700/12 , F25D2700/16 , G01K7/42 , G05D23/1917
摘要： A temperature management apparatus for foodstuffs stored in a storage cabinet, wherein a temperature sensor is placed in the storage cabinet to detect an inside temperature of the cabinet thereby to calculate an ambient temperature of the foodstuffs based on the detected inside temperature, and wherein an internal temperature of the foodstuffs is presumed on a basis of the calculated ambient temperature. The temperature management apparatus is provided with a foodstuff temperature indicator for indicating the presumed internal temperature of the foodstuffs and an alarm device for issuing an alarm sound when the presumed internal temperature of the foodstuffs becomes lower than a lower limit temperature or higher than an upper limit temperature.
摘要翻译：一种用于存储在储藏柜中的食品的温度管理装置，其中温度传感器放置在存储柜中以检测柜体的内部温度，从而基于检测到的内部温度计算食品的环境温度，并且其中内部在计算出的环境温度的基础上推定食品的温度。温度管理装置设置有用于指示食品的推定的内部温度的食品温度指示器，以及当食品的推定的内部温度低于下限温度或高于上限时发出报警声的报警装置温度。

4. 发明授权

US06431747B1 Heat flux differential scanning calorimeter sensor 有权
标题翻译：热通量差示扫描量热仪传感器
公开(公告)号：US06431747B1
公开(公告)日：2002-08-13
申请号：US09643870
申请日：2000-08-23
申请人： Robert L. Danley
发明人： Robert L. Danley
IPC分类号： G01K120
CPC分类号： G01K17/00 , G01K17/04 , G01N25/4833 , G01N25/4866
摘要： A sensor for a heat flux differential scanning calorimeter in which one absolute temperature measurement and two differential temperature measurements are used. The sensor is calibrated and used based on a four-term model heat flow equation. The calibration is carried out in two experiments which are used to calculate the sensor thermal resistance for the sample and reference positions, respectively, and the sensor heat capacity for the sample and reference positions, respectively. Differential scanning calorimeters using this sensor exhibit improved resolution, improved baseline performance and improved dynamic response.
摘要翻译：用于热通量差示扫描量热计的传感器，其中使用一个绝对温度测量和两个差分温度测量。传感器基于四项模型热流方程校准和使用。在两个实验中进行校准，分别用于计算样品和参考位置的传感器热阻，以及样品和参考位置的传感器热容。使用该传感器的差示扫描量热仪表现出改进的分辨率，改进的基线性能和改善的动态响应。

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