会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • Baking apparatus for manufacturing a semiconductor device
    • 用于制造半导体器件的烘烤设备
    • US20040048219A1
    • 2004-03-11
    • US10655306
    • 2003-09-05
    • Chang-Ju Yun
    • F27D001/00
    • H01L21/67103F27B17/0025
    • A baking apparatus for manufacturing a semiconductor device remarkably enhances the uniformity of the CD (Critical Dimension) of a wafer by creating a uniform temperature distribution. The apparatus includes a processing having an open upper part, a hot plate disposed in the chamber and on which a wafer is to be mounted, a cover covering the upper part of the chamber; and a thin film made of material having a low emissivity extending over the inner surface of the cover. The inventive structure prevents the emission of heat to the outside so that the temperature within the processing chamber can be rapidly stabilized.
    • 通过产生均匀的温度分布,用于制造半导体器件的烘烤装置显着地增强了晶片的CD(临界尺寸)的均匀性。 该装置包括具有敞开的上部的处理,设置在该室中的加热板并且其上安装有晶片的处理,覆盖该室的上部的盖; 以及由在盖的内表面上延伸的低发射率的材料制成的薄膜。 本发明的结构防止向外部发热,使得处理室内的温度可以快速稳定。
    • 5. 发明申请
    • Apparatus for dense chip packaging using heat pipes and thermoelectric coolers
    • 使用热管和热电冷却器的密集芯片封装的设备
    • US20020062648A1
    • 2002-05-30
    • US09726291
    • 2000-11-30
    • Uttam Shyamalindu Ghoshal
    • F25B021/02F27D001/00F25D023/12F28D015/00
    • H01L23/427F25B23/006F25D19/006F28D15/0233F28D15/04F28F2210/02H01L23/38H01L2924/0002H01L2924/00
    • An apparatus for dense chip packaging using heat pipes and thermoelectric coolers is provided. The apparatus includes an evaporator region, a condenser region, and a capillary region. The evaporator region includes one or more hot point elements used to transfer heat from a heat source to a transport fluid. The transport fluid changes state to a vapor when heat is applied to the transport fluid. The vapor travels to the condenser region via vapor channels and is condensed to a fluid once again by transferring heat from the vapor to a heat sink. The condensed fluid is then returned to the evaporator region by way of capillary forces and capillaries formed in a capillary structure. The capillaries formed in the capillary structure have a tree-like or fractal geometry. The apparatus may further include a flexible region that allows the apparatus to be bent around corners and edges.
    • 提供了一种使用热管和热电冷却器进行致密芯片封装的设备。 该装置包括蒸发器区域,冷凝器区域和毛细管区域。 蒸发器区域包括用于将热量从热源传送到输送流体的一个或多个热点元件。 当将热量施加到输送流体时,输送流体将状态改变为蒸气。 蒸汽通过蒸汽通道行进到冷凝器区域,并通过将热量从蒸汽传递到散热器而再次被冷凝成流体。 冷凝的流体然后通过毛细管力和形成在毛细结构中的毛细管返回到蒸发器区域。 在毛细结构中形成的毛细管具有树状或分形几何形状。 该装置还可以包括允许装置围绕拐角和边缘弯曲的柔性区域。
    • 9. 发明申请
    • Gasifier system and method
    • 气化器系统及方法
    • US20020174811A1
    • 2002-11-28
    • US10061362
    • 2002-02-04
    • Stan E. Abrams
    • F23B007/00F23L001/00F27D001/00F23B005/04F23B005/00F23G007/06F23C009/00F23B001/12F23H003/00F23M005/06
    • F23G5/0276F23G5/006F23G5/16F23G5/444F23G2201/303F23G2203/105F23G2203/8016F23G2205/122F23G2205/18F23G2206/203F23G2900/50006F23J2217/40F23J2217/50F23L15/00F23N1/02F23N5/003F23N2023/02F23N2023/08F23N2037/16Y02E20/12Y02E20/348
    • An energy conversion system which comprises a solid fuel fed combustor system having a first chamber portion with an inlet feed for feeding a metered amount of a solid fuel thereto, a first burner stage having a first traveling conveyor firebelt, a metered amount of air introduced in progressively increasing proportions along the length of the first traveling conveyor. A second burner stage having a second traveling conveyor firebelt with air introduced in a progressively decreasing amount along the length of said second traveling conveyor firebelt and a controller for controlling air introduced to the system. The chamber has a sloped common roof section common to the burner stages and is made of radiative energy reflective fire brick and angled to reflect radiative energy generated from fuel traveling on the traveling conveyor firebelts and directing the radiative energy on fuel traveling on the first firebelt. The air introduced is controlled in amounts so as to automatically minimize excess air to the firebelt conveyors to minimize the quantity of carbon monoxide and nitrogen oxides and other pollutants.
    • 一种能量转换系统,包括固体燃料供给的燃烧器系统,其具有第一室部分,其具有用于向其中供给计量的固体燃料的入口进料,第一燃烧器台具有第一行进输送机防火带,将计量的空气引入 沿着第一行进输送机的长度逐渐增加的比例。 第二燃烧器台具有沿着所述第二行进输送机防火带的长度以逐渐减小的量引入的空气的第二行进输送机防火带和用于控制引入到所述系统的空气的控制器。 该室具有与燃烧器阶段相同的倾斜的共同屋顶部分,并且由辐射能反射的火砖制成,并且成角度以反映在行进的输送机防火带上行驶的燃料产生的辐射能量并将辐射能量引导到在第一火带上行驶的燃料。 所引入的空气的量被控制以便自动地最小化到带式输送机的过量空气,以使一氧化碳和氮氧化物和其它污染物的量最小化。