会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Using hydrogen gas in a post-etch radio frequency-plasma contact cleaning process
    • 在蚀刻后的射频等离子体接触清洁过程中使用氢气
    • US06796314B1
    • 2004-09-28
    • US09949326
    • 2001-09-07
    • Wesley P. Graff
    • Wesley P. Graff
    • B08B700
    • H01L21/02063B08B7/00H01L21/02046H01L21/31116H01L21/76805H01L21/76814
    • Provided is a method for removing etch byproducts inside a contact hole while minimizing lateral etching of the contact hole. After an etching process, a wafer having a contact hole is placed inside a plasma reaction chamber. The contact hole contains etch byproducts that may degrade the quality of electrical connections. A radio frequency (RF) source creates a RF field inside the reaction chamber. A gas mixture containing chemicals that are reactive with the etch byproducts is introduced into the reaction chamber. The gas mixture becomes ionized by the RF field and reacts with the etch byproducts in the contact hole, removing the etch byproducts. The gas mixture may include approximately 10-60 vol. % hydrogen gas, a gas that reacts with the etch byproducts (e.g., NF3), and nitrogen. The hydrogen gas at least significantly reduces lateral etching of the contact hole by the reactive gas.
    • 提供了一种用于在最小化接触孔的横向蚀刻的同时去除接触孔内的蚀刻副产物的方法。 在蚀刻处理之后,将具有接触孔的晶片放置在等离子体反应室内。 接触孔包含可能降低电连接质量的腐蚀副产物。 射频(RF)源在反应室内产生RF场。 将含有与蚀刻副产物反应的化学物质的气体混合物引入反应室。 气体混合物通过RF场离子化,并与接触孔中的蚀刻副产物反应,除去蚀刻副产物。 气体混合物可以包括约10-60体积% %氢气,与蚀刻副产物(例如NF3)反应的气体和氮气。 氢气至少显着地减少了反应气体对接触孔的横向蚀刻。
    • 9. 发明授权
    • Method of cleaning pressurized containers containing liquified petroleum gas
    • 清洗含液化石油气的加压容器的方法
    • US06635119B1
    • 2003-10-21
    • US09689150
    • 2000-10-12
    • Joseph P. TunneyPaul Buchan
    • Joseph P. TunneyPaul Buchan
    • B08B700
    • F26B21/14B08B9/08F17C13/00F17C2221/014F17C2221/035F17C2223/0153F17C2223/033F17C2227/0309F17C2227/044F17C2227/048F17C2250/0447F17C2260/038F17C2260/048F17C2270/0173
    • The present invention relates to a method of cleaning a container having an amount of liquefied petroleum gas contained therein. The container is first inspected thoroughly for leaks. Heated nitrogen gas is then fed into the container. The heated nitrogen gas may be transported from a nitrogen storage tank to the container via at least one pipe. Liquid nitrogen may be fed into a vaporizer for vaporizing the liquid nitrogen. The nitrogen gas may then be heated via a steamer to expand the nitrogen gas and ensure that no liquid nitrogen enters the container. The heated nitrogen gas may vaporize any liquid liquefied petroleum gas contained therein. Further, the heated nitrogen gas may transport the liquefied petroleum gas to a flare for incineration. The heated nitrogen gas may be added any number of times to reduce the concentration of the liquefied petroleum gas therein to a desired level. The container may then be steam cleaned and opened to enter and thoroughly clean or inspect the inside of the container.
    • 本发明涉及一种清洗容纳有液化石油气的容器的方法。 首先彻底检查容器是否有泄漏。 然后将加热的氮气进料到容器中。 加热的氮气可以经由至少一个管道从氮储存罐输送到容器。 液氮可以进料到蒸发器中以蒸发液氮。 然后可以经由蒸汽机加热氮气以膨胀氮气,并确保没有液氮进入容器。 加热的氮气可能会蒸发其中所含的任何液化石油气。 此外,加热的氮气可以将液化石油气输送到用于焚烧的火炬。 加热的氮气可以加入任何次数,以将其中的液化石油气的浓度降低到所需的水平。 然后可以将容器蒸汽清洁并打开以进入并彻底清洁或检查容器的内部。