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    • 1. 发明授权
    • Process and apparatus for cleaning exhaust gas
    • 废气净化工艺及设备
    • US06331281B1
    • 2001-12-18
    • US09414348
    • 1999-10-07
    • Suehachi TeruYasusada MiyanoNoboru AkitaKenji OtsukaTakashi Shimada
    • Suehachi TeruYasusada MiyanoNoboru AkitaKenji OtsukaTakashi Shimada
    • B01D5358
    • B01D53/8634Y02A50/2346
    • There are disclosed a process for cleaning ammonia-containing exhaust gas which comprises bringing the exhaust gas into contact with an ammonia decomposition catalyst (e.g. nickel, ruthenium) under heating to decompose most of the ammonia into nitrogen and hydrogen, subsequently bringing the resultant mixed gas into contact with an ammonia adsorbent (e.g. synthetic zeolite) for adsorbing undecomposed ammonia, and then heating regenerating the adsorbent, while bringing reproduced exhaust gas containing the ammonia desorbed from the adsorbent into contact under heating, with the ammonia decomposition catalyst or another ammonia decomposition catalyst; and an apparatus for carrying out the process. It is made possible by the process and apparatus to efficiently and completely clean ammonia-containing exhaust gas exhausted from a semiconductor manufacturing process and the like without generating useless byproduct and dispensing with secondary treatment.
    • 公开了一种清洗含氨废气的方法,该方法包括在加热下将废气与氨分解催化剂(例如镍,钌)接触以将大部分氨分解成氮和氢,随后将所得混合气体 与用于吸附未分解氨的氨吸附剂(例如合成沸石)接触,然后加热再生吸附剂,同时使含有从吸附剂解吸的氨的再生废气与加热下的氨分解催化剂或另一种氨分解催化剂接触 ; 以及用于执行该过程的装置。 通过该方法和装置可以有效且完全地清洁从半导体制造工艺等排出的含氨废气,而不会产生无用的副产物和分配二次处理。
    • 2. 发明授权
    • Partial combustion of hydrogen sulphide
    • 部分燃烧硫化氢
    • US06352680B1
    • 2002-03-05
    • US09337765
    • 1999-06-22
    • Richard William WatsonStephen Rhys GravilleJohn Allen Wainford
    • Richard William WatsonStephen Rhys GravilleJohn Allen Wainford
    • B01D5358
    • C01B17/0417C01B17/04C01B17/0413F23D14/22
    • Sulfur vapor is formed by partial oxidation of hydrogen sulphide. A burner is operated so as to establish a flame in a furnace in or into which the burner fires. There is supplied to the flame from the first region of the mouth of the burner at least one flow of a first combustible gas comprising hydrogen sulfide. At least one second flow of a first oxidizing gas is caused to issue from the mouth of the burner and mix in the flame with the first combustible gas. There is supplied to the flame from a second region of the mouth of the burner surrounding and spaced from the said first region at least one third flow of a second combustible gas comprising hydrogen sulfide. At least one fourth flow of a second oxidizing gas is caused to issue from a region or regions of the mouth of the burner surrounded by said second region and mix in the flame with the second combustible gas. At least one fifth, outermost flow of a third oxidizing gas is caused to mix in the flame with the second combustible gas. A resultant gas mixture including sulfur vapor, water vapor, sulfur dioxide, hydrogen and residual hydrogen sulfide is withdrawn from the furnace.
    • 通过硫化氢的部分氧化形成硫蒸汽。 操作燃烧器,以便在燃烧器所在的炉子中或在燃烧炉中燃烧时产生火焰。 从燃烧器口部的第一区域向火焰供应包含硫化氢的第一可燃气体的至少一个流。 使第一氧化气体的至少一秒流从燃烧器的口发出并与火焰中的第一可燃气体混合。 从燃烧器口部的第二区域向所述第一区域提供包括硫化氢的第二可燃气体的至少一个第三流,并且与所述第一区域间隔开。 使第二氧化气体的至少四次流从由所述第二区域围绕的燃烧器的口部的区域或区域发射,并与火焰中的第二可燃气体混合。 使第三氧化气体的至少五分之一的最外流与火焰中的第二可燃气体混合。 从炉中取出包含硫蒸汽,水蒸气,二氧化硫,氢气和残余硫化氢的所得气体混合物。