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    • 9. 发明授权
    • Fabrication method for vertical PNP structure with Schottky barrier
diode emitter utilizing ion implantation
    • 使用离子注入的肖特基势垒二极管发射体垂直PNP结构的制作方法
    • US4412376A
    • 1983-11-01
    • US355059
    • 1982-03-05
    • David E. De BarRaymond W. HamakerGeoffrey B. Stephens
    • David E. De BarRaymond W. HamakerGeoffrey B. Stephens
    • H01L21/265H01L21/8222H01L27/082H01L29/47H01L29/73H01L21/283
    • H01L21/26513H01L21/8222H01L27/0826H01L29/47H01L29/7308
    • A vertical PNP bipolar transistor structure with Schottky Barrier diode emitter is disclosed which simplifies the structure and process steps for combining a complementary PNP in an NPN integrated circuit and improves the speed and density of the vertical PNP. The PNP emitter is formed with a Schottky contact such that only the PNP base region is contained in the NPN emitter junction structure. The structure uses a separately masked ion/implant for the NPN intrinsic base implant which also forms the PNP collector region so that the PNP base doping profile can intercept the PNP collector profile at a lower concentration resulting in lower collector/base capacitance, lower series collector resistance and higher collector/base breakdown voltage for the PNP. Since the base doping concentration is lower in the structure and the emitter has no sidewall capacitance, the PNP emitter-base capacitance is greatly reduced. These features result in an improved frequency response for the PNP structure.
    • 公开了具有肖特基势垒二极管发射极的垂直PNP双极晶体管结构,其简化了在NPN集成电路中组合互补PNP的结构和工艺步骤,并提高了垂直PNP的速度和密度。 PNP发射极由肖特基接触形成,使得只有PNP基极区域包含在NPN发射极结结构中。 该结构使用单独掩蔽的离子/注入用于NPN本征基极注入,其也形成PNP集电极区域,使得PNP基极掺杂分布可以以较低的浓度截取PNP集电极分布,导致较低的集电极/基极电容,下部集电极 电阻和更高的集电极/基极击穿电压。 由于基极掺杂浓度在结构中较低,并且发射极没有侧壁电容,因此PNP发射极 - 基极电容大大降低。 这些特征导致PNP结构的频率响应得到改善。