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    • 6. 发明授权
    • Method for controlling a semiconductor manufacturing process by failure
analysis feedback
    • 通过故障分析反馈控制半导体制造工艺的方法
    • US5923553A
    • 1999-07-13
    • US759424
    • 1996-10-05
    • Min-Ho Yi
    • Min-Ho Yi
    • H01L21/66G05B15/02G05B19/418H01L21/02G06F19/00
    • G05B19/41875G05B2219/31426G05B2219/32209G05B2219/32221Y02P90/14Y02P90/22
    • A method for controlling a semiconductor manufacturing process by failure analysis feedback compares a previous failure analysis result with current real-time process conditions. The method uses the steps of: a) establishing a monitoring data base with abnormal process condition data, the abnormal process condition data being obtained by a correlation between a yield for each manufactured lot and corresponding process conditions for semiconductor equipment when the yield is lowered or semiconductor equipment malfunctions have occurred; b) establishing an equipment data base by obtaining real-time process conditions for on-line semiconductor equipment; c) comparing the real-time process conditions for the on-line semiconductor equipment with the abnormal process conditions of the monitoring data base; and d) stopping the operation of the on-line semiconductor equipment when differences between the real-time and abnormal process conditions fall below a predetermined level.
    • 通过故障分析反馈来控制半导体制造过程的方法将先前的故障分析结果与当前实时处理条件进行比较。 该方法采用以下步骤:a)建立具有异常处理条件数据的监测数据库,异常过程条件数据通过每个制造批次的产量与半导体设备的相应工艺条件之间的相关性获得,当产量降低时, 发生半导体设备故障; b)通过获得在线半导体设备的实时处理条件建立设备数据库; c)将在线半导体设备的实时处理条件与监控数据库的异常处理条件进行比较; 以及d)当实时和异常处理条件之间的差异低于预定水平时,停止在线半导体设备的操作。
    • 9. 发明申请
    • Semiconductor wafer manufacturing execution system with recipe distribution management database
    • 半导体晶圆制造执行系统配方配方管理数据库
    • US20030204281A1
    • 2003-10-30
    • US10136757
    • 2002-04-30
    • Yeaun-Jyh SuChen-Chung YuChih-Huang LinChu-Shan Yu
    • G06F019/00
    • G05B19/41865G05B2219/31331G05B2219/31426G05B2219/32214G05B2219/45031H01L21/67276Y02P90/12Y02P90/14Y02P90/20
    • A semiconductor manufacturing execution system (MES) is disclosed, including a memory module, a comparing module, and an outputting module. The memory module stores a basic database and a recipe distribution management (RDM) database. The basic database includes multiple basic records, and the RDM database includes multiple RDM records. The comparing module compares operation data, received from a manufacturing machine, to each of the RDM records, and secondarily to each of the basic records, to determine whether the operation data matches at least one of the RDM and basic records. The outputting module outputs a limiting signal to the manufacturing machine if the operation data matches at least one of the RDM records. The limiting signal prevents the manufacturing machine from executing a process corresponding to the operation data. The outputting module may also output a first alarm signal to the manufacturing machine, and a second alarm signal to the user interface, if the operation data does not match at least one of the RDM and basic records. The semiconductor MES may also embody methods for adding new RDM records to the RDM database, editing RDM records in the RDM database, and/or deleting RDM records from the RDM database.
    • 公开了一种半导体制造执行系统(MES),包括存储器模块,比较模块和输出模块。 内存模块存储基本数据库和配方分发管理(RDM)数据库。 基本数据库包括多个基本记录,RDM数据库包含多个RDM记录。 比较模块将从制造机器接收的操作数据与每个RDM记录进行比较,然后将其与每个基本记录进行比较,以确定操作数据是否与RDM和基本记录中的至少一个匹配。 如果操作数据与RDM记录中的至少一个匹配,输出模块向制造机器输出限制信号。 限制信号防止制造机器执行与操作数据相对应的处理。 如果操作数据与RDM和基本记录中的至少一个不匹配,则输出模块还可以向制造机器输出第一报警信号和向用户界面输出第二报警信号。 半导体MES还可以包括用于将新的RDM记录添加到RDM数据库,在RDM数据库中编辑RDM记录和/或从RDM数据库中删除RDM记录的方法。