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    • 6. 发明授权
    • Apparatus for monitoring the optical quality of a beam radiation
    • 用于监测光束辐射的光学质量的装置
    • US4245156A
    • 1981-01-13
    • US973192
    • 1978-12-26
    • James E. HarveyJohn H. Bluege
    • James E. HarveyJohn H. Bluege
    • G01J9/00G01M11/00G01D5/36
    • G01J9/00G01M11/00
    • An improved apparatus for monitoring the optical quality of a beam of coherent radiation or an image from an incoherent source is disclosed. The apparatus includes a disk capable of being rotated and having a plurality of rings of slit sets radially disposed within the disk symmetrically about a central axis at a plurality of radial positions wherein each ring of slit sets includes a plurality of slit sets, symmetrically disposed about the ring, each adapted for passing a focused beam of radiation therethrough. A suitable beam steering mechanism such as an adjustable mirror is adapted for directing focused radiation from a first ring to a second ring for varying the intensity of the radiation passing through the slits to detector means for improved signal processing and for varying the parameters of the slits passing the radiation for optimizing the measurement of various beam parameters for determining the optical quality of the radiation. Detector means positioned behind the disk in optical line-of-sight communication with the adjustable mirror through the slits in the plurality of slit sets in each ring are adapted for providing data signals which when combined with synchronization signals, passing through the same slit as the radiation producing the data signal, results in error signals proportional to beam jitter, defocus and astigmatism. The apparatus is adapted for measuring quickly the optical quality of a beam having a signal-to-noise ratio variable between a low and a high value.
    • 公开了一种用于监测相干辐射束的光学质量或来自非相干源的图像的改进的装置。 该设备包括能够旋转的盘,并且具有多个径向设置在盘内的狭缝组的环围绕中心轴对称地在多个径向位置处,其中每个狭缝组环包括多个狭缝组,其围绕 所述环,每个适于使聚焦的辐射束通过其中。 合适的光束转向机构(诸如可调镜)适于将来自第一环的聚焦辐射引导到第二环,用于将通过狭缝的辐射的强度改变为检测器装置,以改善信号处理和改变狭缝的参数 通过辐射来优化用于确定辐射的光学质量的各种光束参数的测量。 检测器意味着位于光盘后面的光学视距通过每个环中的多个狭缝组中的缝隙与可调镜相连,适于提供数据信号,当与同步信号组合时,其通过与 产生数据信号的辐射导致与光束抖动,散焦和散光成比例的误差信号。 该装置适于快速测量具有低值和高值之间的信噪比变量的光束的光学质量。