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1. 发明申请

US20110304856A1 LIGHTWAVE INTERFERENCE MEASUREMENT APPARATUS 审中-公开
标题翻译： LIGHTWAVE干扰测量装置
公开(公告)号：US20110304856A1
公开(公告)日：2011-12-15
申请号：US13149198
申请日：2011-05-31
申请人： Zongtao GE , Masaaki TOMIMIZU , Hideo KANDA , Hiroyuki IWAZAKI , Noboru KOIZUMI , Takayuki SAITO , Seiji MOCHITATE , Takeshi OGASAWARA , Takashi NAKAJIMA
发明人： Zongtao GE , Masaaki TOMIMIZU , Hideo KANDA , Hiroyuki IWAZAKI , Noboru KOIZUMI , Takayuki SAITO , Seiji MOCHITATE , Takeshi OGASAWARA , Takashi NAKAJIMA
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01M11/0207 , G01M11/025 , G01M11/0271
摘要： A microinterferometer applies low coherent measurement light, which travels along an optical axis in a converging manner, to a front surface of a flange. A part of the measurement light is reflected inside an interferometric optical system, and becomes reference light. Apart of the measurement light passed through the interferometric optical system is reflected from the front surface of the flange, and is incident again upon the interferometric optical system. By combining the reflected light with the reference light, interference light is obtained. While a sample rotating stage rotates a sample lens through 360 degrees, a first imaging camera having one-dimensional image sensor captures 3600 images of the interference light, i.e., the image of the interference light is captured every time the sample lens is rotated by 0.1 degrees. Based on the images of interference fringes, the shape of the front surface of the flange is analyzed.
摘要翻译：微型干涉仪将以相聚的方式沿光轴行进的低相干测量光应用于凸缘的前表面。测量光的一部分在干涉光学系统内反射，成为参考光。除了通过干涉光学系统的测量光之外，还从法兰的前表面反射，并再次入射到干涉光学系统上。通过将反射光与参考光组合，获得干涉光。当样品旋转台将样品透镜旋转360度时，具有一维图像传感器的第一成像相机捕获干涉光的3600张图像，即每次将样品透镜旋转0.1次时捕获干涉光的图像度。基于干涉条纹的图像，分析法兰前表面的形状。

2. 发明申请

US20100097619A1 OPTICAL WAVE INTERFERENCE MEASURING APPARATUS 有权
标题翻译：光波干扰测量装置
公开(公告)号：US20100097619A1
公开(公告)日：2010-04-22
申请号：US12571993
申请日：2009-10-01
申请人： Zongtao GE , Hideo KANDA , Takayuki SAITO , Noboru KOIZUMI
发明人： Zongtao GE , Hideo KANDA , Takayuki SAITO , Noboru KOIZUMI
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01M11/025 , G01M11/0271
摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.
摘要翻译：测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域方向。每当相对位置改变时，测试表面都会在旋转轴上旋转。在由Mirau物镜干涉光学系统会聚的同时行进的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置的每一个处捕获干涉条纹。基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

3. 发明申请

US20100033831A1 LIQUID CRYSTAL SEALING APPARATUS 审中-公开
标题翻译：液晶密封装置
公开(公告)号：US20100033831A1
公开(公告)日：2010-02-11
申请号：US12493533
申请日：2009-06-29
申请人： Hidenori TAKAHASHI , Hideo KANDA
发明人： Hidenori TAKAHASHI , Hideo KANDA
IPC分类号： G02B27/30 , G02F1/1339
CPC分类号： G02F1/1339
摘要： A liquid crystal sealing apparatus that radiates light to a sealing layer for sealing liquid crystal between a pair of substrates to cure the sealing layer includes: a laser beam source that emits laser beams as the light; and an optical system V that shapes the laser beams such that regions irradiated with the laser beams emitted from the laser beam source are substantially identical to the shape of the sealing layer. According to the liquid crystal sealing apparatus, since laser beams are used as light, it is possible to substantially restrict the irradiation regions to the sealing layer. Therefore, a mask for covering a liquid crystal region is not needed, and it is possible to radiate light with sufficiently high intensity to the sealing layer. As a result, it is possible to reliably seal the liquid crystal.
摘要翻译：一种液晶密封装置，其将光照射到用于将液晶密封在一对基板之间以固化密封层的密封层包括：激光束源，其发射作为光的激光束; 以及光学系统V，其使激光束成形，使得从激光束源发射的激光束照射的区域与密封层的形状基本相同。根据液晶密封装置，由于使用激光作为光，因此可以将照射区域基本上限制在密封层上。因此，不需要用于覆盖液晶区域的掩模，并且可以向密封层辐射具有足够高强度的光。结果，可以可靠地密封液晶。

4. 发明申请

US20110304855A1 APPARATUS FOR MEASURING SURFACE MISALIGNMENT AND ANGULAR MISALIGNMENT 审中-公开
标题翻译：用于测量表面缺陷和角度误差的装置
公开(公告)号：US20110304855A1
公开(公告)日：2011-12-15
申请号：US13157791
申请日：2011-06-10
申请人： Nobuaki UEKI , Hideo KANDA
发明人： Nobuaki UEKI , Hideo KANDA
IPC分类号： G01B11/14
CPC分类号： G01M11/0221
摘要： Through a first diffraction grating, two conical fluxes different in wavefront propagation angle relative to its optical axis are applied to a first surface. Through a second diffraction grating, two conical fluxes different in wavefront propagation angle relative to its optical axis are applied to a second surface. Two sets of interference fringes formed by the fluxes reflected from the first surface and a reference beam are analyzed to obtain surface misalignment and angular misalignment of the first surface relative to the optical axis. Similarly, two sets of interference fringes formed by the fluxes reflected from the second surface and the reference beam are analyzed to obtain surface misalignment and angular misalignment of the second surface relative to the optical axis. Surface misalignment and angular misalignment of a sample lens are obtained from the measurement results of the first and second surfaces.
摘要翻译：通过第一衍射光栅，将相对于其光轴的波前传播角度不同的两个锥形通量施加到第一表面。通过第二衍射光栅，将相对于其光轴的波前传播角度不同的两个锥形通量施加到第二表面。分析由从第一表面和参考光束反射的光束形成的两组干涉条纹，以获得第一表面相对于光轴的表面未对准和角度偏移。类似地，分析由从第二表面和参考光束反射的光束形成的两组干涉条纹，以获得第二表面相对于光轴的表面未对准和角度偏移。从第一表面和第二表面的测量结果可以获得样品透镜的表面未对准和角度偏移。

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