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1. 发明申请

US20100112191A1 SYSTEMS AND ASSOCIATED METHODS FOR DEPOSITING MATERIALS 审中-公开
标题翻译：用于沉积材料的系统和相关方法
公开(公告)号：US20100112191A1
公开(公告)日：2010-05-06
申请号：US12262036
申请日：2008-10-30
申请人： Zhe Song , Jeffery B. Hull , Shyam Surthi
发明人： Zhe Song , Jeffery B. Hull , Shyam Surthi
IPC分类号： B05D5/12 , C23C16/54
CPC分类号： C23C16/45534 , C23C16/401 , C23C16/4412 , C23C16/45544 , H01L21/67005
摘要： Several embodiments of systems for depositing materials and associated methods of operation are disclosed herein. In one embodiment, the system includes a reaction chamber having an inlet and an outlet, a gas source coupled to the inlet of the reaction chamber, and a neutralizer source coupled to the outlet of the reaction chamber. The gas source contains a first precursor gas, a second precursor gas, and a purge gas. The neutralizer source contains a neutralizing agent configured to reduce a rate of reaction between the first precursor gas and the second precursor gas.
摘要翻译：本文公开了用于沉积材料和相关操作方法的系统的几个实施例。在一个实施例中，系统包括具有入口和出口的反应室，耦合到反应室的入口的气体源和耦合到反应室的出口的中和剂源。气源包含第一前体气体，第二前体气体和净化气体。中和剂源含有中和剂，其被配置为降低第一前体气体和第二前体气体之间的反应速率。

2. 发明申请

US20150179706A1 LINER FOR PHASE CHANGE MEMORY (PCM) ARRAY AND ASSOCIATED TECHNIQUES AND CONFIGURATIONS 有权
标题翻译：相位变化记忆体（PCM）阵列及相关技术和配置
公开(公告)号：US20150179706A1
公开(公告)日：2015-06-25
申请号：US14137864
申请日：2013-12-20
申请人： Noel Rocklein , Qian Tao , Zhe Song , Vishwanath Bhat
发明人： Noel Rocklein , Qian Tao , Zhe Song , Vishwanath Bhat
IPC分类号： H01L27/24 , H01L45/00
CPC分类号： H01L27/2481 , H01L27/2427 , H01L27/2463 , H01L45/06 , H01L45/12 , H01L45/1233 , H01L45/141 , H01L45/16 , H01L45/1675
摘要： Embodiments of the present disclosure describe a liner for a phase change memory (PCM) array and associated techniques and configurations. In an embodiment, a substrate, an array of phase change memory (PCM) elements disposed on the substrate, wherein individual PCM elements of the array of PCM elements comprise a chalcogenide material and a liner disposed on sidewall surfaces of the individual PCM elements, wherein the liner comprises aluminum (Al), silicon (Si) and oxygen (O). Other embodiments may be described and/or claimed.
摘要翻译：本公开的实施例描述了用于相变存储器（PCM）阵列和相关联的技术和配置的衬垫。在一个实施例中，衬底，设置在衬底上的相变存储器（PCM）元件的阵列，其中PCM元件阵列的各个PCM元件包括硫族化物材料和设置在各个PCM元件的侧壁表面上的衬垫，其中衬垫包括铝（Al），硅（Si）和氧（O）。可以描述和/或要求保护其他实施例。

3. 发明授权

US08501268B2 Methods of forming material over a substrate and methods of forming capacitors 有权
标题翻译：在衬底上形成材料的方法和形成电容器的方法
公开(公告)号：US08501268B2
公开(公告)日：2013-08-06
申请号：US12720305
申请日：2010-03-09
申请人： Zhe Song , Chris M. Carlson
发明人： Zhe Song , Chris M. Carlson
IPC分类号： C23C16/455 , C23C16/00 , C23C16/44
CPC分类号： C23C16/45553 , C23C16/405 , C23C16/45527 , H01G4/085 , H01G4/12 , H01G4/33 , H01L21/02159 , H01L21/02178 , H01L21/02189 , H01L21/02194 , H01L21/0228 , H01L28/40
摘要： A method of forming a material over a substrate includes performing at least one iteration of the following temporally separated ALD-type sequence. First, an outermost surface of a substrate is contacted with a first precursor to chemisorb a first species onto the outermost surface from the first precursor. Second, the outermost surface is contacted with a second precursor to chemisorb a second species different from the first species onto the outermost surface from the second precursor. The first and second precursors include ligands and different central atoms. At least one of the first and second precursors includes at least two different composition ligands. The two different composition ligands are polyatomic or a lone halogen. Third, the chemisorbed first species and the chemisorbed second species are contacted with a reactant which reacts with the first species and with the second species to form a reaction product new outermost surface of the substrate.
摘要翻译：在衬底上形成材料的方法包括进行以下时间上分离的ALD型序列的至少一次迭代。首先，将基底的最外表面与第一前体接触，以将第一种类化学吸附到来自第一前体的最外表面上。第二，最外面的表面与第二前体接触，以将与第一种不同的第二物种化学吸附到与第二前体的最外表面上。第一和第二前体包括配体和不同的中心原子。第一和第二前体中的至少一种前体包括至少两种不同的组成配体。两种不同的组成配体是多原子或单卤素。第三，化学吸附的第一物质和化学吸附的第二物质与反应物接触，反应物与第一物质和第二物质反应以形成反应产物基底的新的最外表面。

4. 发明申请

US20110223320A1 Methods Of Forming Material Over A Substrate And Methods Of Forming Capacitors 有权
标题翻译：在基板上形成材料的方法和形成电容器的方法
公开(公告)号：US20110223320A1
公开(公告)日：2011-09-15
申请号：US12720305
申请日：2010-03-09
申请人： Zhe Song , Chris M. Carlson
发明人： Zhe Song , Chris M. Carlson
IPC分类号： B05D5/12 , C23C16/40
CPC分类号： C23C16/45553 , C23C16/405 , C23C16/45527 , H01G4/085 , H01G4/12 , H01G4/33 , H01L21/02159 , H01L21/02178 , H01L21/02189 , H01L21/02194 , H01L21/0228 , H01L28/40
摘要： A method of forming a material over a substrate includes performing at least one iteration of the following temporally separated ALD-type sequence. First, an outermost surface of a substrate is contacted with a first precursor to chemisorb a first species onto the outermost surface from the first precursor. Second, the outermost surface is contacted with a second precursor to chemisorb a second species different from the first species onto the outermost surface from the second precursor. The first and second precursors include ligands and different central atoms. At least one of the first and second precursors includes at least two different composition ligands. The two different composition ligands are polyatomic or a lone halogen. Third, the chemisorbed first species and the chemisorbed second species are contacted with a reactant which reacts with the first species and with the second species to form a reaction product new outermost surface of the substrate.
摘要翻译：在衬底上形成材料的方法包括进行以下时间上分离的ALD型序列的至少一次迭代。首先，将基底的最外表面与第一前体接触，以将第一种类化学吸附到来自第一前体的最外表面上。第二，最外面的表面与第二前体接触，以将与第一种不同的第二物种化学吸附到与第二前体的最外表面上。第一和第二前体包括配体和不同的中心原子。第一和第二前体中的至少一种前体包括至少两种不同的组成配体。两种不同的组成配体是多原子或单卤素。第三，化学吸附的第一物质和化学吸附的第二物质与反应物接触，反应物与第一物质和第二物质反应以形成反应产物基底的新的最外表面。

5. 发明授权

US08577822B2 Data-driven approach to modeling sensors wherein optimal time delays are determined for a first set of predictors and stored as a second set of predictors 有权
标题翻译：用于建模传感器的数据驱动方法，其中针对第一组预测器确定最佳时间延迟并存储为第二组预测器
公开(公告)号：US08577822B2
公开(公告)日：2013-11-05
申请号：US12567380
申请日：2009-09-25
申请人： Andrew Kusiak , Zhe Song
发明人： Andrew Kusiak , Zhe Song
IPC分类号： G06F17/00
CPC分类号： G05B17/02
摘要： A method, computer program product and system are provided for modeling non-controllable parameters affecting system performance. The method may include receiving historical values for each of a plurality of system parameters and grouping the system parameters into controllable, non-controllable, and performance parameters. The method may further include determining a first set of predictors from the non-controllable parameters using the historical values of these non-controllable parameters and, for each predictor in the first set, determining optimal time instances at which a value of each predictor is measured using non-uniform time scales. These optimal time instances may then be saved as a second set of predictors. One or more constraints may then be established for each of the controllable parameters. Finally, a dynamic model based on the second set of predictors, the controllable parameters, and the performance parameters may be constructed and optimized.
摘要翻译：提供了一种方法，计算机程序产品和系统，用于建模影响系统性能的不可控参数。该方法可以包括接收多个系统参数中的每一个的历史值，并将系统参数分组为可控的，不可控的和性能参数。该方法可以进一步包括使用这些不可控参数的历史值从不可控参数确定第一组预测值，并且对于第一组中的每个预测器，确定测量每个预测器的值的最佳时间实例使用不均匀的时标。这些最佳时间实例然后可以被保存为第二组预测器。然后可以为每个可控参数建立一个或多个约束。最后，可以构建和优化基于第二组预测变量的动态模型，可控参数和性能参数。

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