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1. 发明授权

US07396706B2 Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks 有权
标题翻译：用于形成具有不同波长峰值的基本稳定的激光输出脉冲分布的同步技术
公开(公告)号：US07396706B2
公开(公告)日：2008-07-08
申请号：US11067299
申请日：2005-02-25
申请人： Yunlong Sun , Richard Harris , William J. Jordens , Lei Sun
发明人： Yunlong Sun , Richard Harris , William J. Jordens , Lei Sun
IPC分类号： B23K26/36 , H01L35/34 , H01L21/30
CPC分类号： H01L23/5258 , B23K26/0604 , B23K26/0613 , B23K26/0622 , B23K26/067 , B23K26/361 , B23K26/40 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/14 , B23K2103/172 , B23K2103/26 , B23K2103/50 , H01L2924/0002 , H01S3/10046 , H01S3/2383 , Y10S438/94 , H01L2924/00
摘要： A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
摘要翻译：在轮廓不同时刻，不同激光波长的特殊形状的激光脉冲能量分布提供了减少的受控抖动，从而能够实现高质量处理和较小可能光斑尺寸的半导体器件微机械加工。

2. 发明申请

US20060128073A1 Multiple-wavelength laser micromachining of semiconductor devices 审中-公开
标题翻译：半波长激光微加工半导体器件
公开(公告)号：US20060128073A1
公开(公告)日：2006-06-15
申请号：US11067464
申请日：2005-02-25
申请人： Yunlong Sun , Richard Harris , Kelly Bruland , Robert Hainsey , Ho Lo , Lei Sun
发明人： Yunlong Sun , Richard Harris , Kelly Bruland , Robert Hainsey , Ho Lo , Lei Sun
IPC分类号： H01L21/82 , B23K26/16
CPC分类号： H01L23/5258 , B23K26/0604 , B23K26/0613 , B23K26/0622 , B23K26/067 , B23K26/361 , B23K26/40 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/14 , B23K2103/172 , B23K2103/26 , B23K2103/50 , H01L2924/0002 , H01S3/10046 , H01S3/2383 , Y10S438/94 , H01L2924/00
摘要： A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
摘要翻译：在轮廓不同时刻，不同激光波长的特殊形状的激光脉冲能量分布提供了减少的受控抖动，从而能够实现高质量处理和较小可能光斑尺寸的半导体器件微机械加工。

3. 发明申请

US20060126677A1 Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks 有权
标题翻译：用于形成具有不同波长峰值的基本稳定的激光输出脉冲分布的同步技术
公开(公告)号：US20060126677A1
公开(公告)日：2006-06-15
申请号：US11067299
申请日：2005-02-25
申请人： Yunlong Sun , Richard Harris , William Jordens , Lei Sun
发明人： Yunlong Sun , Richard Harris , William Jordens , Lei Sun
IPC分类号： H01S3/13
CPC分类号： H01L23/5258 , B23K26/0604 , B23K26/0613 , B23K26/0622 , B23K26/067 , B23K26/361 , B23K26/40 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/14 , B23K2103/172 , B23K2103/26 , B23K2103/50 , H01L2924/0002 , H01S3/10046 , H01S3/2383 , Y10S438/94 , H01L2924/00
摘要： A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
摘要翻译：在轮廓不同时刻，不同激光波长的特殊形状的激光脉冲能量分布提供了减少的受控抖动，从而能够实现高质量处理和较小可能光斑尺寸的半导体器件微机械加工。

4. 发明申请

US20050224469A1 Efficient micro-machining apparatus and method employing multiple laser beams 审中-公开
标题翻译：高效的微加工设备和采用多个激光束的方法
公开(公告)号：US20050224469A1
公开(公告)日：2005-10-13
申请号：US11000333
申请日：2004-11-29
申请人： Donald Cutler , Brian Baird , Richard Harris , David Hemenway , Ho Lo , Brady Nilsen , Yasu Osako , Lei Sun , Yunlong Sun , Mark Unrath
发明人： Donald Cutler , Brian Baird , Richard Harris , David Hemenway , Ho Lo , Brady Nilsen , Yasu Osako , Lei Sun , Yunlong Sun , Mark Unrath
IPC分类号： B23K26/06 , B23K26/00
CPC分类号： B23K26/06
摘要： A laser beam switching system employs a laser coupled to a beam switching device that causes a laser beam to switch between first and second beam positioning heads such that while the first beam positioning head is directing the laser beam to process a workpiece target location, the second beam positioning head is moving to another target location and vice versa. A preferred beam switching device includes first and second AOMs positioned such that the laser beam passes through the AOMs without being deflected. When RF is applied to the first AOM, the laser beam is diffracted toward the first beam positioning head, and when RF is applied to the second AOM, the laser beam is diffracted toward the second beam positioning head.
摘要翻译：激光束切换系统采用耦合到光束切换装置的激光器，其使激光束在第一和第二光束定位头之间切换，使得当第一光束定位头引导激光束来处理工件目标位置时，第二光束定位头正在移动到另一个目标位置，反之亦然。优选的光束切换装置包括第一和第二AOM，其被定位成使得激光束不经偏转地穿过AOM。当RF施加到第一AOM时，激光束朝向第一光束定位头衍射，并且当RF施加到第二AOM时，激光束被朝向第二光束定位头衍射。

5. 发明申请

US20060126674A1 Lasers for synchronized pulse shape tailoring 有权
标题翻译：激光同步脉冲形状裁剪
公开(公告)号：US20060126674A1
公开(公告)日：2006-06-15
申请号：US11067470
申请日：2005-02-25
申请人： Yunlong Sun , Lei Sun
发明人： Yunlong Sun , Lei Sun
IPC分类号： H01S3/11
CPC分类号： H01S3/082 , B23K26/0622 , H01S3/07 , H01S3/0805 , H01S3/08086 , H01S3/083 , H01S3/10038 , H01S3/10046 , H01S3/109 , H01S3/117 , H01S3/127 , H01S3/1611
摘要： A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective pulse energy profile and/or pulse width characteristics imparted by the configurations of the subresonators (12, 14). The subresonators (12, 14) may share a laser medium (42) in the common section, or each distinct subresonator section (28, 36) may have its own laser medium (42). Exemplary long and short subresonators (12, 14) generate specially tailored laser pulses having a short rise time and a long pulse width at one wavelength or two different wavelengths that may be beneficial for a variety of laser and micromachining applications including memory link processing.
摘要翻译：具有不同设计配置的多个子共振器（12,14）共享公共谐振器部分（18），使得激光作用可以基本上同步，以提供合并不同的相应脉冲能量分布和/或脉冲宽度的相干激光脉冲通过子共振器（12,14）的构造赋予的特性。子共振器（12,14）可以在公共部分中共享激光介质（42），或者每个不同的子谐振器部分（28,36）可以具有其自己的激光介质（42）。示例性的长和短子谐振器（12,14）产生特定定制的激光脉冲，其具有在一个波长或两个不同波长处具有短的上升时间和长脉冲宽度，这可能对于包括存储器链路处理的各种激光和微加工应用有利。

6. 发明授权

US06887804B2 Passivation processing over a memory link 有权
标题翻译：通过内存链接进行钝化处理
公开(公告)号：US06887804B2
公开(公告)日：2005-05-03
申请号：US10361206
申请日：2003-02-07
申请人： Yunlong Sun , Robert F. Hainsey , Lei Sun
发明人： Yunlong Sun , Robert F. Hainsey , Lei Sun
IPC分类号： B23K26/04 , B23K26/06 , H01L23/525 , H01L21/82
CPC分类号： H01L23/5258 , B23K26/04 , B23K26/043 , B23K26/0613 , B23K26/0622 , H01L2924/0002 , H01L2924/09701 , Y10S438/94 , H01L2924/00
摘要： A set (50) of one or more laser pulses (52) is employed to remove passivation layer (44) over a conductive link (22). The link (22) can subsequently be removed by a different process such as chemical etching. The duration of the set (50) is preferably shorter than 1,000 ns; and the pulse width of each laser pulse (52) within the set (50) is preferably within a range of about 0.05 ps to 30 ns. The set (50) can be treated as a single “pulse” by conventional laser positioning systems (62) to perform on-the-fly material removal without stopping whenever the laser system (60) fires a set (50) of laser pulses (52) at each target area (51). Conventional wavelengths in the IR range or their harmonics in the green or UV range can be employed.
摘要翻译：使用一个（50）一个或多个激光脉冲（52）来去除导电连接件（22）上的钝化层（44）。随后可以通过诸如化学蚀刻的不同过程去除连接件（22）。组（50）的持续时间优选短于1,000ns; 并且组（50）内的每个激光脉冲（52）的脉冲宽度优选在约0.05ps至30ns的范围内。传统的激光定位系统（62）可将组（50）视为单个“脉冲”，以便在激光系统（60）激发一组（50）激光脉冲（50） 52）。在IR范围内的常规波长或其在绿色或UV范围内的谐波可以被采用。

7. 发明授权

US06947454B2 Laser pulse picking employing controlled AOM loading 有权
标题翻译：激光脉冲拾取采用受控的AOM装载
公开(公告)号：US06947454B2
公开(公告)日：2005-09-20
申请号：US10611798
申请日：2003-06-30
申请人： Yunlong Sun , Brady E. Nilsen , David M. Hemenway , Lei Sun
发明人： Yunlong Sun , Brady E. Nilsen , David M. Hemenway , Lei Sun
IPC分类号： B23K26/06 , H01S3/10
CPC分类号： B23K26/06
摘要： A laser (126) and an AOM (10) are pulsed at substantially regular and substantially similar constant high repetition rates to provide working laser outputs (40) with variable nonimpingement intervals (50) without sacrificing laser pulse-to-pulse energy stability. When a working laser output (40) is demanded, an RF pulse (38) is applied to the AOM (10) in coincidence with the laser output (24) to transmit it to a target. When no working laser output (40) is demanded, an RF pulse (38) is applied to the AOM (10) in noncoincidence with the laser output (24) so it gets blocked. So the average thermal loading on the AOM (10) remains substantially constant regardless of how randomly the working laser outputs (40) are demanded. The AOM (10) can also be used to control the energy of the working laser output (40) by controlling the power of the RF pulse (38) applied. When the RF power is changed, the RF duration (44) of the RF pulse (38) is modified to maintain the constant average RF power. Consistent loading on the AOM (10) eliminates deterioration of laser beam quality and laser beam pointing accuracy associated with thermal loading variation on the AOM (10) and is advantageous for applications such as IC chip link processing where stable working laser outputs (40) with variable output intervals (50) are needed.
摘要翻译：激光器（126）和AOM（10）以基本上规则和基本类似的恒定高重复率脉冲，以提供具有可变非限制间隔（50）的工作激光输出（40），而不牺牲激光脉冲到脉冲能量稳定性。当要求工作的激光输出（40）时，与激光输出（24）一致地向AOM（10）施加RF脉冲（38）以将其发射到目标。当不需要工作的激光输出（40）时，RF激光（38）以与激光输出（24）不一致的方式施加到AOM（10），使其被阻塞。因此，无论工作激光输出（40）如何随机地要求，AOM（10）上的平均热负载保持基本恒定。 AOM（10）也可用于通过控制所施加的RF脉冲（38）的功率来控制工作激光器输出（40）的能量。当RF功率改变时，RF脉冲（38）的RF持续时间（44）被修改以保持恒定的平均RF功率。 AOM（10）上的一致负载消除了与AOM（10）上的热负载变化相关的激光束质量和激光束指向精度的劣化，并且对于诸如IC芯片链接处理的应用是有利的，其中稳定的工作激光输出（40）与需要可变输出间隔（50）。

8. 发明授权

US07301981B2 Methods for synchronized pulse shape tailoring 有权
标题翻译：同步脉冲形状裁剪方法
公开(公告)号：US07301981B2
公开(公告)日：2007-11-27
申请号：US11067319
申请日：2005-02-25
申请人： Yunlong Sun , Lei Sun
发明人： Yunlong Sun , Lei Sun
IPC分类号： H01S3/082
CPC分类号： H01S3/082 , B23K26/0622 , H01S3/07 , H01S3/0805 , H01S3/08086 , H01S3/083 , H01S3/10038 , H01S3/10046 , H01S3/109 , H01S3/117 , H01S3/127 , H01S3/1611
摘要： A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective pulse energy profile and/or pulse width characteristics imparted by the configurations of the subresonators (12, 14). The subresonators (12, 14) may share a laser medium (42) in the common section, or each distinct subresonator section (28, 36) may have its own laser medium (42). Exemplary long and short subresonators (12, 14) generate specially tailored laser pulses having a short rise time and a long pulse width at one wavelength or two different wavelengths that may be beneficial for a variety of laser and micromachining applications including memory link processing.
摘要翻译：具有不同设计配置的多个子共振器（12,14）共享公共谐振器部分（18），使得激光作用可以基本上同步，以提供合并不同的相应脉冲能量分布和/或脉冲宽度的相干激光脉冲通过子共振器（12,14）的构造赋予的特性。子共振器（12,14）可以在公共部分中共享激光介质（42），或者每个不同的子谐振器部分（28,36）可以具有其自己的激光介质（42）。示例性的长和短子谐振器（12,14）产生特定定制的激光脉冲，其具有在一个波长或两个不同波长处具有短的上升时间和长脉冲宽度，这可能对于包括存储器链路处理的各种激光和微加工应用有利。

9. 发明申请

US20060126678A1 Methods for synchronized pulse shape tailoring 有权
标题翻译：同步脉冲形状裁剪方法
公开(公告)号：US20060126678A1
公开(公告)日：2006-06-15
申请号：US11067319
申请日：2005-02-25
申请人： Yunlong Sun , Lei Sun
发明人： Yunlong Sun , Lei Sun
IPC分类号： H01S3/13
CPC分类号： H01S3/082 , B23K26/0622 , H01S3/07 , H01S3/0805 , H01S3/08086 , H01S3/083 , H01S3/10038 , H01S3/10046 , H01S3/109 , H01S3/117 , H01S3/127 , H01S3/1611
摘要： A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective pulse energy profile and/or pulse width characteristics imparted by the configurations of the subresonators (12, 14). The subresonators (12, 14) may share a laser medium (42) in the common section, or each distinct subresonator section (28, 36) may have its own laser medium (42). Exemplary long and short subresonators (12, 14) generate specially tailored laser pulses having a short rise time and a long pulse width at one wavelength or two different wavelengths that may be beneficial for a variety of laser and micromachining applications including memory link processing.
摘要翻译：具有不同设计配置的多个子共振器（12,14）共享公共谐振器部分（18），使得激光作用可以基本上同步，以提供合并不同的相应脉冲能量分布和/或脉冲宽度的相干激光脉冲通过子共振器（12,14）的构造赋予的特性。子共振器（12,14）可以在公共部分中共享激光介质（42），或者每个不同的子谐振器部分（28,36）可以具有其自己的激光介质（42）。示例性的长和短子谐振器（12,14）产生特定定制的激光脉冲，其具有在一个波长或两个不同波长处具有短的上升时间和长脉冲宽度，这可能对于包括存储器链路处理的各种激光和微加工应用有利。

10. 发明授权

US07289549B2 Lasers for synchronized pulse shape tailoring 有权
标题翻译：激光同步脉冲形状裁剪
公开(公告)号：US07289549B2
公开(公告)日：2007-10-30
申请号：US11067470
申请日：2005-02-25
申请人： Yunlong Sun , Lei Sun
发明人： Yunlong Sun , Lei Sun
IPC分类号： H01S3/082
CPC分类号： H01S3/082 , B23K26/0622 , H01S3/07 , H01S3/0805 , H01S3/08086 , H01S3/083 , H01S3/10038 , H01S3/10046 , H01S3/109 , H01S3/117 , H01S3/127 , H01S3/1611
摘要： A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective pulse energy profile and/or pulse width characteristics imparted by the configurations of the subresonators (12, 14). The subresonators (12, 14) may share a laser medium (42) in the common section, or each distinct subresonator section (28, 36) may have its own laser medium (42). Exemplary long and short subresonators (12, 14) generate specially tailored laser pulses having a short rise time and a long pulse width at one wavelength or two different wavelengths that may be beneficial for a variety of laser and micromachining applications including memory link processing.
摘要翻译：具有不同设计配置的多个子共振器（12,14）共享公共谐振器部分（18），使得激光作用可以基本上同步，以提供合并不同的相应脉冲能量分布和/或脉冲宽度的相干激光脉冲通过子共振器（12,14）的构造赋予的特性。子共振器（12,14）可以在公共部分中共享激光介质（42），或者每个不同的子谐振器部分（28,36）可以具有其自己的激光介质（42）。示例性的长和短子谐振器（12,14）产生特定定制的激光脉冲，其具有在一个波长或两个不同波长处具有短的上升时间和长脉冲宽度，这可能对于包括存储器链路处理的各种激光和微加工应用有利。

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