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1. 发明授权

US6137570A System and method for analyzing topological features on a surface 失效
标题翻译：用于分析表面拓扑特征的系统和方法
公开(公告)号：US6137570A
公开(公告)日：2000-10-24
申请号：US107391
申请日：1998-06-30
申请人： Yung-Ho Chuang , J. Joseph Armstrong , David L. Brown , Jason Z. Lin , Bin-Ming Benjamin Tsai
发明人： Yung-Ho Chuang , J. Joseph Armstrong , David L. Brown , Jason Z. Lin , Bin-Ming Benjamin Tsai
IPC分类号： G01B11/30 , G01N21/95 , G01N21/956 , H01L21/66 , G01N21/00
CPC分类号： G01N21/9501 , G01N21/95607 , G01N21/95623 , G03F7/7065 , G01N21/4788 , G01N21/95692
摘要： Disclosed is a method and apparatus for using far field scattered and diffracted light to determine whether a collection of topological features on a surface (e.g., a semiconductor wafer) conforms to an expected condition or quality. This determination is made by comparing the far field diffraction pattern of a surface under consideration with a corresponding diffraction pattern (a "baseline"). If the baseline diffraction pattern and far field diffraction pattern varies by more than a prescribed amount or in characteristic ways, it is inferred that the surface features are defective. The method may be implemented as a die-to-die comparison of far field diffraction patterns of two dies on a semiconductor wafer. The portion of the far field scattered and diffracted light sensitive to a relevant condition or quality can also be reimaged to obtain an improved signal-to-noise ratio.
摘要翻译：公开了一种使用远场散射和衍射光来确定表面（例如，半导体晶片）上的拓扑特征的集合是否符合预期状态或质量的方法和装置。通过将考虑的表面的远场衍射图与相应的衍射图案（“基线”）进行比较来进行该确定。如果基线衍射图案和远场衍射图案变化超过规定量或以特征方式，则推断表面特征是有缺陷的。该方法可以实现为半导体晶片上的两个管芯的远场衍射图案的管芯与管芯的比较。对于相关条件或质量敏感的远场散射和衍射光的部分也可以被重新成像以获得改善的信噪比。

2. 发明授权

US07728968B2 Excimer laser inspection system 有权
标题翻译：准分子激光检查系统
公开(公告)号：US07728968B2
公开(公告)日：2010-06-01
申请号：US11594625
申请日：2006-11-08
申请人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
发明人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
IPC分类号： G01N21/00
CPC分类号： G02B17/0808 , G01N21/8806 , G01N21/9501 , G01N21/95607 , G01N2021/479 , G01N2021/8825 , G01N2021/95676 , G01N2201/06113 , G02B17/0856 , G02B17/0892 , G02B21/04 , G03F7/70225
摘要： A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
摘要翻译：一种用于检查诸如半导体晶片的样本的系统和方法，包括使用来自所述源的至少一个相对较强的波长的准分子源照射所述样本的至少一部分，检测从所述被照射部分接收的辐射，分析检测到的辐射对于存在于样品部分中的潜在缺陷。

3. 发明授权

US07136159B2 Excimer laser inspection system 有权
标题翻译：准分子激光检查系统
公开(公告)号：US07136159B2
公开(公告)日：2006-11-14
申请号：US10096318
申请日：2002-03-12
申请人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
发明人： Bin-Ming Benjamin Tsai , Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown
IPC分类号： G01N21/00
CPC分类号： G02B17/0808 , G01N21/8806 , G01N21/9501 , G01N21/95607 , G01N2021/479 , G01N2021/8825 , G01N2021/95676 , G01N2201/06113 , G02B17/0856 , G02B17/0892 , G02B21/04 , G03F7/70225
摘要： A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
摘要翻译：一种用于检查诸如半导体晶片的样本的系统和方法，包括使用来自所述源的至少一个相对较强的波长的准分子源照射所述样本的至少一部分，检测从所述被照射部分接收的辐射，分析检测到的辐射对于存在于样品部分中的潜在缺陷。

4. 发明授权

US07126100B1 System and method for sensing using adjustable modulation transfer function (MTF) 有权
标题翻译：使用可调调制传递函数（MTF）进行感测的系统和方法
公开(公告)号：US07126100B1
公开(公告)日：2006-10-24
申请号：US10850818
申请日：2004-05-21
申请人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
发明人： Yung-Ho Chuang , J. Joseph Armstrong , David Lee Brown , Bin-Ming Benjamin Tsai
IPC分类号： H01L27/00
CPC分类号： H01L27/14625 , H04N5/3559 , H04N5/357
摘要： A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as aliasing and maintaining contrast.
摘要翻译：公开了一种使用可变栅极电压源的可变调制传递函数（MTF）设计，用于检查样本。该设计将可变栅极电压施加到传感器的每个像素，其中将可变栅极电压施加到每个像素来调整像素的MTF。 MTF调整改善了检查过程中遇到的不良影响，如混叠和维持对比度。

5. 发明申请

US20120314286A1 Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier 有权
标题翻译：使用激光脉冲乘法器的半导体检测和计量系统
公开(公告)号：US20120314286A1
公开(公告)日：2012-12-13
申请号：US13487075
申请日：2012-06-01
申请人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
发明人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
IPC分类号： G02B27/28
CPC分类号： H01S3/0057 , G01N21/21 , G01N21/9501 , G01N2201/06113 , G01N2201/0683 , G01N2201/0697 , G02B5/0816 , G02B5/3083 , G02B27/281 , G02B27/283 , G02B27/286 , H01S3/083
摘要： A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.
摘要翻译：脉冲倍增器包括偏振分束器，波片和一组反射镜。偏振分束器接收输入激光脉冲。波片从偏振分束器接收光，并产生第一组脉冲和第二组脉冲。第一组脉冲具有与第二组脉冲不同的极化。偏振分束器，波片和一组反射镜产生环形腔。偏振分束器将第一组脉冲发射为脉冲乘法器的输出，并将第二组脉冲反射到环形腔中。该脉冲倍增器可以以最小的总功率损耗来降低每脉冲的峰值功率，同时增加每秒的脉冲数。

6. 发明授权

US09793673B2 Semiconductor inspection and metrology system using laser pulse multiplier 有权
公开(公告)号：US09793673B2
公开(公告)日：2017-10-17
申请号：US13487075
申请日：2012-06-01
申请人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
发明人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
IPC分类号： G02B5/30 , G02B27/28 , H01S3/05 , H01S3/083 , H01S3/00 , G01N21/21 , G01N21/95 , G02B5/08
CPC分类号： H01S3/0057 , G01N21/21 , G01N21/9501 , G01N2201/06113 , G01N2201/0683 , G01N2201/0697 , G02B5/0816 , G02B5/3083 , G02B27/281 , G02B27/283 , G02B27/286 , H01S3/083
摘要： A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

7. 发明申请

US20110073982A1 Inspection system using back side illuminated linear sensor 审中-公开
标题翻译：使用背面照明线性传感器的检查系统
公开(公告)号：US20110073982A1
公开(公告)日：2011-03-31
申请号：US11805907
申请日：2007-05-25
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David L. Brown
IPC分类号： H01L31/00 , G01N21/00
CPC分类号： G01N21/9501 , G01N21/95623 , G01N2021/8822 , G01N2021/95676
摘要： An improved inspection system using back-side illuminated linear sensing for propagating charge through a sensor is provided. Focusing optics may be used with a back side illuminated linear sensor to inspect specimens, the back side illuminated linear sensor operating to advance an accumulated charge from one side of each pixel to the other side. The design comprises controlling voltage profiles across pixel gates from one side to the other side in order to advance charge between to a charge accumulation region. Controlling voltage profiles comprises attaching a continuous polysilicon gate across each pixel within a back side illuminated linear sensor array. Polysilicon gates and voltages applied thereto enable efficient electron advancement using a controlled voltage profile.
摘要翻译：提供了一种使用背面照明线性检测的改进的检测系统，用于通过传感器传播电荷。聚焦光学元件可以与背面照明的线性传感器一起使用以检查样品，背面照射的线性传感器操作以将累积的电荷从每个像素的一侧推进到另一侧。该设计包括控制从一侧到另一侧的像素栅极之间的电压分布，以便在电荷累积区域之间推进电荷。控制电压分布包括在背侧照明线性传感器阵列内的每个像素上连接连续的多晶硅栅极。多晶硅栅极和施加于其上的电压使得能够使用受控电压分布进行有效的电子前进。

8. 发明授权

US07672043B2 Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth 有权
标题翻译：反射折射成像系统表现出增强的深紫外光谱带宽
公开(公告)号：US07672043B2
公开(公告)日：2010-03-02
申请号：US10903494
申请日：2004-07-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B5/08
CPC分类号： G03F7/70225 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70341
摘要： A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. The objective may provide, in certain instances, a spectral bandwidth up to approximately 193 to 266 nanometers and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may include more than one lens and may be formed of a material different from at least one other lens in the objective.
摘要翻译：提供了用于成像试样的相对高的光谱带宽目标和用于成像试样的方法。该目的包括具有至少一个聚焦透镜的透镜组，该至少一个聚焦透镜被配置为接收光能并形成中间图像，定向成接收中间图像并提供中间光能的至少一个场透镜，以及定位成接收中间图像的中间图像光能并向样品施加光能。在某些情况下，目标可以提供高达约193至266纳米的光谱带宽，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。场透镜可以包括多于一个透镜，并且可以由与物镜中的至少一个其它透镜不同的材料形成。

9. 发明授权

US07646533B2 Small ultra-high NA catadioptric objective 有权
标题翻译：小超高NA反射折射目标
公开(公告)号：US07646533B2
公开(公告)日：2010-01-12
申请号：US11093850
申请日：2005-03-29
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B17/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/02 , G02B21/04 , G03F7/70225 , G03F7/70275 , G03F7/70341
摘要： A relatively high spectral bandwidth objective employed for use in imaging a specimen and method for imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form focused light energy. The focused light energy forms an intermediate image. The objective further includes at least one field lens located in proximity to an intermediate image, and a catadioptric arrangement positioned to receive the intermediate light energy from the at and form controlled light energy. The catadioptric arrangement may include at least one Mangin element and can include a meniscus lens element.
摘要翻译：提供了用于成像试样的相对高的光谱带宽目标和用于成像试样的方法。该目的包括透镜组，其具有被配置为接收光能并形成聚焦光能的至少一个聚焦透镜。聚焦光能形成中间图像。该目的还包括位于中间图像附近的至少一个场透镜，以及定位用于从中接收中间光能并形成受控光能的反射折射装置。折反射装置可以包括至少一个Mangin元件并且可以包括弯月形透镜元件。

10. 发明授权

US07609373B2 Reducing variations in energy reflected from a sample due to thin film interference 有权
标题翻译：减少由于薄膜干扰而导致样品反射的能量的变化
公开(公告)号：US07609373B2
公开(公告)日：2009-10-27
申请号：US11223851
申请日：2005-09-09
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01B11/0625 , G01N21/21 , G01N21/95607 , G01N2021/8809
摘要： A system and method for inspecting a multi-layer sample, such as a silicon wafer, is disclosed. The design reduces variations in total reflected energy due to thin film interference. The design includes illuminating the sample at two incident angle ranges, where the two incident angle ranges are such that variation in total reflected energy at a first incident angle range may be employed to balance variation in total reflected energy at a second incident angle range. Defects are detected using die-to-die subtraction of the sample illuminated at the two incident angle ranges.
摘要翻译：公开了一种用于检查诸如硅晶片的多层样品的系统和方法。该设计减少了由于薄膜干扰导致的总反射能量的变化。该设计包括以两个入射角度范围照射样品，其中两个入射角范围使得可以采用在第一入射角范围的总反射能量的变化来平衡在第二入射角范围内的总反射能量的变化。使用在两个入射角度范围照射的样品的模 - 阴相减去检测缺陷。

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