会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • THIN FILM FORMING METHOD AND FILM FORMING APPARATUS
    • 薄膜成型方法和薄膜成型装置
    • US20110117279A1
    • 2011-05-19
    • US12918275
    • 2009-02-17
    • Yasuharu ShinokawaKazuyoshi HondaYuma KamiyamaMasahiro YamamotoTomofumi Yanagi
    • Yasuharu ShinokawaKazuyoshi HondaYuma KamiyamaMasahiro YamamotoTomofumi Yanagi
    • B05D3/00C23C14/50
    • C23C14/562C23C14/24C23C14/541C23C16/466
    • A thin film forming apparatus (100) includes: a vacuum chamber (1); a substrate transfer mechanism (40) that is provided in the vacuum chamber (1) and feeds an elongated substrate (8) to a predetermined film forming section (4) that faces a film forming source (27); an endless belt (10) capable of moving in accordance with the feeding of the substrate (8) by the substrate transfer mechanism (40), and configured to define, along an outer peripheral surface of the endless belt itself, a transfer path of the substrate (8) in the film forming section (4) so that a thin film is formed on a surface of the substrate (8) that is being transferred linearly; a through-hole (16) formed in the endless belt (10); and a substrate cooling unit (30) for introducing a cooling gas between the endless belt (10) and a back surface of the substrate (8) through the through-hole (16) from a side of an inner peripheral surface of the endless belt (10) that is moving.
    • 薄膜形成装置(100)包括:真空室(1); 设置在所述真空室(1)中并将细长基板(8)供给到面向成膜源(27)的预定成膜部分(4)的基板传送机构(40); 能够根据基板传送机构(40)进给基板(8)而移动的环状带(10),并且被构造成沿着环状带本身的外周面限定出传送路径 在成膜部(4)中形成基板(8),使得在被直线转印的基板(8)的表面上形成薄膜; 形成在环形带(10)中的通孔(16); 以及基板冷却单元(30),用于通过所述通孔(16)从所述环形带(10)的内周面的一侧在所述环形带(10)和所述基板(8)的背面之间引入冷却气体, (10)正在移动。
    • 7. 发明申请
    • THIN FILM MANUFACTURING METHOD AND SILICON MATERIAL WHICH CAN BE USED IN THE METHOD
    • 薄膜制造方法和可用于该方法的硅材料
    • US20120100306A1
    • 2012-04-26
    • US13379282
    • 2010-07-01
    • Yuma KamiyamaKazuyoshi HondaYasuharu Shinokawa
    • Yuma KamiyamaKazuyoshi HondaYasuharu Shinokawa
    • B05D3/06C01B33/02B05D3/02
    • C23C14/246C01B33/02C23C14/14
    • Particles coming from an evaporation source 9 are deposited on a substrate 21 at a specified film forming position 33 in a vacuum so as to form a thin film on the substrate 21. A rod-shaped material 32 containing a source material of the thin film is melted above the evaporation source 9 and the melted material is supplied to the evaporation source 9 in the form of droplets 14. As the rod-shaped material 32, a rod-shaped silicon material in which a plurality of first regions each surrounded by a grain boundary are present at positions of 90% length from a center toward an outer peripheral part on a cross section perpendicular to a longitudinal direction of the material, and an area-weighted average value of major diameters of the first regions is 200 μm or less, and a plurality of second regions each surrounded by a grain boundary are present at positions of 50% length from the center toward the outer peripheral part, and an area-weighted average value of major diameters of the second regions is 1000 μm or more is used.
    • 来自蒸发源9的颗粒在真空中在指定的膜形成位置33处沉积在基板21上,以在基板21上形成薄膜。包含薄膜源材料的棒状材料32是 熔化在蒸发源9上方,并且熔融的材料以液滴14的形式供应到蒸发源9.作为棒状材料32,其中多个第一区域被颗粒包围的棒状材料 边界存在于与材料的纵向方向垂直的截面上从中心朝向外周部的长度为90%的位置,第一区域的长径的面积加权平均值为200μm以下, 并且由晶界包围的多个第二区域存在于从中心向外周部分的长度为50%的位置处,并且第二区域的主要直径的面积加权平均值 区域为1000μm以上。