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    • 1. 发明申请
    • POSITIVE PHOTOSENSITIVE COMPOSITION AND METHOD OF FORMING PATTERN THEREWITH
    • 正性感光组合物及其形成方法
    • US20090274975A1
    • 2009-11-05
    • US12413314
    • 2009-03-27
    • Yuko TadaAkinori Shibuya
    • Yuko TadaAkinori Shibuya
    • G03F7/039G03F7/20
    • G03F7/0397G03F7/0046G03F7/0395G03F7/0758
    • A positive photosensitive composition includes (A) a resin having a repeating unit with a lactone structure of 5.0 or below an Onishi parameter and having any of repeating units of Formula (I) that when acted on by an acid, generates a carboxylic acid, and (B) a compound that when exposed to actinic rays or radiation, generates an acid, wherein each of R1, R2 and R3 independently represents a substituted or unsubstituted alkyl group or a substituted or unsubstituted cycloalkyl group, provided that R2 and R3 may be bonded with each other to thereby form a ring structure, and Ra represents a hydrogen atom, an alkyl group or a group of the formula —CH2—O—Ra2 in which Ra2 represents a hydrogen atom, an alkyl group or an acyl group, the structure of Formula (I) having a van der Waals volume of 306×10−30 m3 or less.
    • 正型感光性组合物包含(A)具有内酯结构为5.0以下的Onishi参数的重复单元的树脂,并且具有任何式(I)的重复单元,当被酸作用时,产生羧酸,并且 (B)当暴露于光化射线或辐射时产生酸的化合物,其中R 1,R 2和R 3各自独立地表示取代或未取代的烷基或取代或未取代的环烷基,条件是R 2和R 3可以键合 由此形成环结构,R a表示氢原子,烷基或式-CH 2 -O-Ra 2的基团,其中Ra 2表示氢原子,烷基或酰基,结构 (I)的范德华体积为306×10-30m 3或更小。
    • 4. 发明申请
    • POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
    • 正极性组合物和使用其的图案形成方法
    • US20110014571A1
    • 2011-01-20
    • US12922041
    • 2009-03-26
    • Kei YamamotoAkinori Shibuya
    • Kei YamamotoAkinori Shibuya
    • G03F7/004G03F7/20
    • G03F7/0397G03F7/0007G03F7/0046G03F7/0758G03F7/2041Y10S430/111
    • A positive resist composition and a pattern forming method using the resist composition are provided, the resist composition including: (A) a resin containing a repeating structural unit represented by formula (I) as defined in the specification and being capable of decomposing by an action of an acid to increase the solubility in an alkali developer; (B) an acid generator; and (C) a mixed solvent containing at least one solvent selected from the group consisting of the following Group (a) and at least one solvent selected from the group consisting of the following Groups (b) to (d): Group (a): an alkylene glycol monoalkyl ether, Group (b): an alkylene glycol monoalkyl ether carboxylate, Group (c): a linear ketone, a branched chain ketone, a cyclic ketone, a lactone and an alkylene carbonate, and Group (d): a lactic acid ester, an acetic acid ester and an alkoxypropionic acid ester.
    • 提供了一种使用该抗蚀剂组合物的正性抗蚀剂组合物和图案形成方法,该抗蚀剂组合物包括:(A)含有本说明书中定义的式(I)表示的重复结构单元并且能够通过动作分解的树脂 的酸以增加在碱性显影剂中的溶解度; (B)酸发生剂; 和(C)含有选自下列组(a)和至少一种选自下列组(b)至(d)的组的溶剂中的至少一种溶剂的混合溶剂:组(a) 亚烷基二醇单烷基醚,(b):亚烷基二醇单烷基醚羧酸酯,(c)组:直链酮,支链酮,环酮,内酯和碳酸亚烷基酯,和(d): 乳酸酯,乙酸酯和烷氧基丙酸酯。
    • 5. 发明授权
    • Lithographic printing plate precursor
    • 平版印刷版前体
    • US07449282B2
    • 2008-11-11
    • US11116399
    • 2005-04-28
    • Akinori Shibuya
    • Akinori Shibuya
    • G03F7/00G03F7/004
    • G03F7/00G03F7/031G03F7/035Y10S430/134
    • A lithographic printing plate precursor comprising a photosensitive layer comprising: (A) a fluorescent brightening agent; (B) an activator compound being capable of inducing a chemical change by an interaction with light absorption of the fluorescent brightening agent to produce at least one of a radical, an acid and a base; (C) a compound being capable of undergoing a reaction by an effect of at least one of a radical, an acid and a base to irreversibly change in its physical or chemical properties; and (D) a polyurethane resin binder, wherein the polyurethane resin binder is synthesized from at least following compounds (i), (ii), (iii) and (iv): (i) a diisocyanate compound; (ii) a diol compound having at least one carboxyl group; (iii) a diol compound having a logP value of less than 0; and (iv) a diol compound having a logP value of 0 or more, with the proviso that each of the diol compound (iii) and the diol compound (iv) does not have a carboxyl group.
    • 包括感光层的平版印刷版原版包括:(A)荧光增白剂; (B)能够通过与荧光增白剂的光吸收相互作用而引起化学变化以产生基团,酸和碱中的至少一种的活化剂化合物; (C)能够通过自由基,酸和碱中的至少一种的作用进行反应的化合物,以不可逆地改变其物理或化学性质; 和(D)聚氨酯树脂粘合剂,其中所述聚氨酯树脂粘合剂由至少以下化合物(i),(ii),(iii)和(iv)合成:(i)二异氰酸酯化合物; (ii)具有至少一个羧基的二醇化合物; (iii)logP值小于0的二醇化合物; 和(iv)logP值为0以上的二醇化合物,条件是二醇化合物(iii)和二醇化合物(iv)中的每一个不具有羧基。