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    • 1. 发明申请
    • POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
    • 正极性组合物和使用其的图案形成方法
    • US20110014571A1
    • 2011-01-20
    • US12922041
    • 2009-03-26
    • Kei YamamotoAkinori Shibuya
    • Kei YamamotoAkinori Shibuya
    • G03F7/004G03F7/20
    • G03F7/0397G03F7/0007G03F7/0046G03F7/0758G03F7/2041Y10S430/111
    • A positive resist composition and a pattern forming method using the resist composition are provided, the resist composition including: (A) a resin containing a repeating structural unit represented by formula (I) as defined in the specification and being capable of decomposing by an action of an acid to increase the solubility in an alkali developer; (B) an acid generator; and (C) a mixed solvent containing at least one solvent selected from the group consisting of the following Group (a) and at least one solvent selected from the group consisting of the following Groups (b) to (d): Group (a): an alkylene glycol monoalkyl ether, Group (b): an alkylene glycol monoalkyl ether carboxylate, Group (c): a linear ketone, a branched chain ketone, a cyclic ketone, a lactone and an alkylene carbonate, and Group (d): a lactic acid ester, an acetic acid ester and an alkoxypropionic acid ester.
    • 提供了一种使用该抗蚀剂组合物的正性抗蚀剂组合物和图案形成方法,该抗蚀剂组合物包括:(A)含有本说明书中定义的式(I)表示的重复结构单元并且能够通过动作分解的树脂 的酸以增加在碱性显影剂中的溶解度; (B)酸发生剂; 和(C)含有选自下列组(a)和至少一种选自下列组(b)至(d)的组的溶剂中的至少一种溶剂的混合溶剂:组(a) 亚烷基二醇单烷基醚,(b):亚烷基二醇单烷基醚羧酸酯,(c)组:直链酮,支链酮,环酮,内酯和碳酸亚烷基酯,和(d): 乳酸酯,乙酸酯和烷氧基丙酸酯。
    • 2. 发明授权
    • Positive resist composition and pattern forming method using the same
    • 正型抗蚀剂组合物和使用其的图案形成方法
    • US09012123B2
    • 2015-04-21
    • US12922041
    • 2009-03-26
    • Kei YamamotoAkinori Shibuya
    • Kei YamamotoAkinori Shibuya
    • G03F7/004G03F7/039G03F7/26G03F7/00G03F7/075G03F7/20
    • G03F7/0397G03F7/0007G03F7/0046G03F7/0758G03F7/2041Y10S430/111
    • A positive resist composition and a pattern forming method using the resist composition are provided, the resist composition including: (A) a resin containing a repeating structural unit represented by formula (I) as defined in the specification and being capable of decomposing by an action of an acid to increase the solubility in an alkali developer; (B) an acid generator; and (C) a mixed solvent containing at least one solvent selected from the group consisting of the following Group (a) and at least one solvent selected from the group consisting of the following Groups (b) to (d): Group (a): an alkylene glycol monoalkyl ether, Group (b): an alkylene glycol monoalkyl ether carboxylate, Group (c): a linear ketone, a branched chain ketone, a cyclic ketone, a lactone and an alkylene carbonate, and Group (d): a lactic acid ester, an acetic acid ester and an alkoxypropionic acid ester.
    • 提供了一种使用该抗蚀剂组合物的正性抗蚀剂组合物和图案形成方法,该抗蚀剂组合物包括:(A)含有本说明书中定义的式(I)表示的重复结构单元并且能够通过动作分解的树脂 的酸以增加在碱性显影剂中的溶解度; (B)酸发生剂; 和(C)含有选自下列组(a)和至少一种选自下列组(b)至(d)的组的溶剂中的至少一种溶剂的混合溶剂:组(a) 亚烷基二醇单烷基醚,(b):亚烷基二醇单烷基醚羧酸酯,(c)组:直链酮,支链酮,环酮,内酯和碳酸亚烷基酯,和(d): 乳酸酯,乙酸酯和烷氧基丙酸酯。
    • 10. 发明授权
    • Processor and multiprocessor system
    • 处理器和多处理器系统
    • US06584580B1
    • 2003-06-24
    • US09460519
    • 1999-12-14
    • Akihiro YamatoKei Yamamoto
    • Akihiro YamatoKei Yamamoto
    • G06F1100
    • G06F11/0793G06F11/008G06F11/0724G06F11/073G06F12/0831G06F2212/1032
    • For use in a multiprocessor system in which a plurality of processors share a main memory via a processor bus, an error processing unit (EU) that determines an error level is provided in each processor. When an L2 cache control unit (SU) that controls an L2 cache in the write-back mode, a bus interface unit (PU), and so on, are normal and snoop processing may be continued, the snoop processing is continued in the processor, in which an error occurred, regardless of whether or not the processor is reset. This prevents the system from going down even when data coherence among L2 caches is lost due to an error that occurs in one of processors.
    • 为了在多处理器系统中使用多处理器系统,其中多个处理器经由处理器总线共享主存储器,在每个处理器中提供了确定错误级别的错误处理单元(EU)。 当在回写模式下控制L2高速缓存的L2高速缓存控制单元(SU),总线接口单元(PU)等是正常的并且可以继续进行侦听处理时,在处理器中继续进行窥探处理 ,其中发生错误,而不管处理器是否被复位。 即使在L2缓存之间的数据一致性由于在​​一个处理器中发生的错误而丢失,也可以防止系统下降。