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1. 发明授权

US07796257B2 Measuring apparatus, measuring method, and characteristic measurement unit 有权
标题翻译：测量装置，测量方法和特征测量单元
公开(公告)号：US07796257B2
公开(公告)日：2010-09-14
申请号：US12087663
申请日：2006-12-27
申请人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
发明人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J4/04
摘要： A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.
摘要翻译：测量装置包括光强度信息获取部分40，其获取与包含给定频带分量的测量光有关的光强度信息，测量光已被包括在光学系统10中的光学元件和测量对象（或样品 100），以及计算部50，其基于与测量光有关的光强度信息和测量光强度的理论表达式，计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素光。光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。

2. 发明申请

US20090051916A1 Measuring Apparatus, Measuring Method, and Characteristic Measurement Unit 有权
标题翻译：测量装置，测量方法和特性测量单元
公开(公告)号：US20090051916A1
公开(公告)日：2009-02-26
申请号：US12087663
申请日：2006-12-27
申请人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
发明人： Yukitoshi Otani , Kazuhiko Oka , Toshitaka Wakayama , Atsushi Taniguchi
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J4/04
摘要： A measuring apparatus includes a light intensity information acquisition section 40 that acquires light intensity information relating to a measurement light containing a given band component, the measurement light having been modulated by optical elements included in an optical system 10 and a measurement target (or a sample 100), and a calculation section 50 that calculates at least one matrix element of a Mueller matrix that indicates the optical characteristics of the measurement target based on the light intensity information relating to the measurement light and a theoretical expression for the light intensity of the measurement light. The light intensity information acquisition section 40 acquires the light intensity information relating to a plurality of the measurement lights obtained from the optical system 10 by changing setting of a principal axis direction of at least one of the optical elements. The calculation section 50 performs a carrier amplitude coefficient calculation process, and a matrix element calculation process that calculates the at least one matrix element based on a carrier amplitude coefficient and the theoretical expression for the carrier amplitude coefficient including the at least one matrix element.
摘要翻译：测量装置包括光强度信息获取部分40，其获取与包含给定频带分量的测量光有关的光强度信息，测量光已被包括在光学系统10中的光学元件和测量对象（或样品 100），以及计算部50，其基于与测量光有关的光强度信息和测量光强度的理论表达式，计算指示测量对象的光学特性的Mueller矩阵的至少一个矩阵元素光。光强度信息获取部40通过改变至少一个光学元件的主轴方向的设定来获取与从光学系统10获得的多个测量光有关的光强度信息。计算部分50执行载波幅度系数计算处理和基于载波幅度系数和包括至少一个矩阵元素的载波幅度系数的理论表达式来计算至少一个矩阵元素的矩阵元素计算处理。

3. 发明申请

US20090213374A1 Optical Characteristic Measuring Apparatus and Optical Characteristics Measuring Method 有权
标题翻译：光学特性测量装置和光学特性测量方法
公开(公告)号：US20090213374A1
公开(公告)日：2009-08-27
申请号：US11887410
申请日：2006-03-17
申请人： Yukitoshi Otani , Toshitaka Wakayama
发明人： Yukitoshi Otani , Toshitaka Wakayama
IPC分类号： G01J4/00
CPC分类号： G01N21/23 , G01N2021/218
摘要： An optical characteristic measuring apparatus includes an optical system 10 including first and second carrier retarders 24 and 32 having the retardations being known and differing from each other. The optical characteristic measuring apparatus performs: a spectrum extraction process of extracting a plurality of spectral peaks from a frequency spectrum obtained by analyzing a light intensity signal detected by light-receiving/spectroscopic means; and an optical characteristic element calculation process of calculating an optical characteristic element representing optical characteristics of a measurement target based on the spectral peaks and the retardations of the first and second carrier retarders.
摘要翻译：光学特性测量装置包括光学系统10，该光学系统10包括第一和第二载体延迟器24和32，其具有已知的并且彼此不同的延迟。光学特性测量装置执行：从通过分析由光接收/分光装置检测的光强度信号获得的频谱中提取多个频谱峰值的频谱提取处理; 以及基于第一和第二载波延迟器的频谱峰值和延迟来计算表示测量对象的光学特性的光学特征元素的光学特征元素计算处理。

4. 发明申请

US20090040522A1 Measuring Apparatus and Measuring Method 审中-公开
标题翻译：测量仪器和测量方法
公开(公告)号：US20090040522A1
公开(公告)日：2009-02-12
申请号：US12224491
申请日：2007-02-16
申请人： Yukitoshi Otani , Naoki Asato , Toshitaka Wakayama
发明人： Yukitoshi Otani , Naoki Asato , Toshitaka Wakayama
IPC分类号： G01N21/21
CPC分类号： G01N21/21 , G01J4/04 , G01N21/23
摘要： A measuring apparatus that measures the polarization state of analysis target light includes a modulation section 20 that includes a retarder 22 and an analyzer 24, a light intensity information acquisition section 30 that acquires light intensity information about modulated light obtained by modulating the analysis target light at the modulation section, and a calculation section 50 that calculates a polarization characteristic element of the analysis target light based on the light intensity information. The light intensity information acquisition section acquires the light intensity information about first modulated light to Nth modulated light respectively obtained by modulating the analysis target light at the modulation section set under first to Nth principal axis direction conditions which differ in the principal axis direction of at least one of the retarder and the analyzer. The calculation section calculates the polarization characteristic element based on a light intensity theoretical expression for the first modulated light to the Nth modulated light and first light intensity information to Nth light intensity information.
摘要翻译：测量分析对象光的偏振状态的测量装置包括：调制部20，其包括延迟器22和分析器24;光强度信息获取部30，其获取通过调制分析对象光获得的调制光的光强度信息调制部，以及基于光强度信息计算分析对象光的偏振特性元素的计算部50。光强度信息获取部获取通过调制在至少主轴方向上不同的第一至第N主轴方向条件下设定的调制部分的分析目标光，分别获得关于第一调制光至第N调制光的光强度信息减速器和分析仪之一。计算部基于第一调制光对第N调制光和第一光强度信息的光强度理论表达式计算偏振特性元素至第N光强度信息。

5. 发明授权

US08107075B2 Optical characteristic measuring apparatus and optical characteristics measuring method 有权
标题翻译：光学特性测量仪器和光学特性测量方法
公开(公告)号：US08107075B2
公开(公告)日：2012-01-31
申请号：US11887410
申请日：2006-03-17
申请人： Yukitoshi Otani , Toshitaka Wakayama
发明人： Yukitoshi Otani , Toshitaka Wakayama
IPC分类号： G01J4/00
CPC分类号： G01N21/23 , G01N2021/218
摘要： An optical characteristic measuring apparatus includes an optical system 10 including first and second carrier retarders 24 and 32 having the retardations being known and differing from each other. The optical characteristic measuring apparatus performs: a spectrum extraction process of extracting a plurality of spectral peaks from a frequency spectrum obtained by analyzing a light intensity signal detected by light-receiving/spectroscopic means; and an optical characteristic element calculation process of calculating an optical characteristic element representing optical characteristics of a measurement target based on the spectral peaks and the retardations of the first and second carrier retarders.
摘要翻译：光学特性测量装置包括光学系统10，该光学系统10包括第一和第二载体延迟器24和32，其具有已知的并且彼此不同的延迟。光学特性测量装置执行：从通过分析由光接收/分光装置检测的光强度信号获得的频谱中提取多个频谱峰值的频谱提取处理; 以及基于第一和第二载波延迟器的频谱峰值和延迟来计算表示测量对象的光学特性的光学特征元素的光学特征元素计算处理。

6. 发明申请

US20090033936A1 Optical characteristic measuring apparatus and optical characteristic measuring method 审中-公开
标题翻译：光学特性测量装置和光学特性测量方法
公开(公告)号：US20090033936A1
公开(公告)日：2009-02-05
申请号：US11922006
申请日：2006-06-09
申请人： Yukitoshi Otani , Toshitaka Wakayama
发明人： Yukitoshi Otani , Toshitaka Wakayama
IPC分类号： G01N21/21
CPC分类号： G01N21/23
摘要： An optical characteristic measuring apparatus including a carrier retarder of which the retardation is known and a quarter-wave plate without wavelength dependence, wherein light emitted from a light source (light-emitting device) is incident on a measurement target through a first polarizer (polarizer), the carrier retarder, and the quarter-wave plate, and the light which has passed through the measurement target is incident on a photodetector through a second polarizer (analyzer). A spectral peak is extracted from a frequency spectrum obtained by analyzing a light intensity signal detected by the photodetector. The optical characteristic element of the measurement target is calculated based on the extracted spectral peak and the retardation of the carrier retarder.
摘要翻译：一种光学特性测量装置，包括具有已知延迟的载波延迟器和没有波长依赖性的四分之一波片，其中从光源（发光器件）发射的光通过第一偏振器（偏振器）入射到测量目标），载波延迟器和四分之一波片，并且已经通过测量对象的光通过第二偏振器（分析器）入射到光电检测器。从通过分析由光电检测器检测的光强度信号获得的频谱中提取频谱峰值。基于提取的光谱峰值和载波延迟器的延迟来计算测量目标的光学特征元素。

7. 发明授权

US06906809B2 Surface shape measuring system 有权
标题翻译：表面形状测量系统
公开(公告)号：US06906809B2
公开(公告)日：2005-06-14
申请号：US10343071
申请日：2001-07-12
申请人： Hisatoshi Fujiwara , Toru Yoshizawa , Yukitoshi Otani
发明人： Hisatoshi Fujiwara , Toru Yoshizawa , Yukitoshi Otani
IPC分类号： G01B11/24 , G01B11/25 , G06T1/00
CPC分类号： G01B11/254
摘要： A grating (3) is disposed to face the measurement target surface of a measurement target object (11). A light source (1) irradiates the grating (3) with illumination light. A camera (6) captures a moire fringe image formed on the grating (3) by light passing through the grating 3 and reflected by the measurement target surface. A moving means (9) changes the distance (H) between the grating 3 and the measurement target surface. An analyzing means (8) performs an analysis process of obtaining 3-D shape information of the measurement target surface from the image picked up by the camera (6) in at least two cases in which the distance (H) is set to different values, and obtains, on the basis of the 3-D shape information in each case and the distance H, true 3-D shape information from which the measurement error caused by the inclination of the measurement target surface is eliminated.
摘要翻译：光栅（3）被设置为面对测量目标物体（11）的测量目标表面。光源（1）用光照射光栅（3）。相机（6）通过光通过光栅3并被测量目标表面反射，捕获在光栅（3）上形成的莫尔条纹图像。移动装置（9）改变光栅3和测量目标表面之间的距离（H）。分析装置（8）在将距离（H）设定为不同值的至少两种情况下，进行从由照相机（6）拾取的图像获得测量对象面的3-D形状信息的分析处理并且根据每种情况下的3-D形状信息和距离H，获得消除了由测量对象表面的倾斜引起的测量误差的真实3-D形状信息。

8. 发明申请

US20100103417A1 Optical Characteristic Measuring Apparatus, Optical Characteristic Measuring Method, and Optical Characteristic Measuring Unit 审中-公开
标题翻译：光学特性测量装置，光学特性测量方法和光学特性测量单元
公开(公告)号：US20100103417A1
公开(公告)日：2010-04-29
申请号：US12225384
申请日：2007-03-16
申请人： Yukitoshi Otani , Mizue Ebisawa
发明人： Yukitoshi Otani , Mizue Ebisawa
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01J4/04 , G01N21/23
摘要： An optical characteristic measuring device includes: an optical system (10), a light intensity information acquisition unit (40) for acquiring light intensity information on the light to be measured, and an operation process unit (60). The optical system (10) introduces the light emitted from a light source (12) to a sample (100) via a polarizer (22), a ½ wavelength plate (24), and a first ¼ wavelength plate (26), and introduces the light emitted from the sample (100) to a reception unit (14) via a second ¼ wavelength plate (34) and a detector (36). The ½ wavelength plate (24), the first and the second ¼ wavelength plate (26, 34) and the detector (36) are configured so as to be rotated. The light intensity information
摘要翻译：一种光学特性测量装置，包括：光学系统（10），用于获取关于待测光的光强度信息的光强度信息获取单元（40），以及操作处理单元（60）。光学系统（10）通过偏振器（22），1/2波长板（24）和第一¼波长板（26）将从光源（12）发射的光引入样品（100），并引入经由第二波长板（34）和检测器（36）从样品（100）发射到接收单元（14）的光。 1/2波长板（24），第一和第二波长板（26,34）和检测器（36）构造成旋转。光强信息

9. 发明授权

US5375009A Optical isolator device having a wider cutoff wavelength band for a return light beam 失效
标题翻译：具有用于返回光束的较宽截止波长带的光隔离器装置
公开(公告)号：US5375009A
公开(公告)日：1994-12-20
申请号：US111019
申请日：1993-08-24
申请人： Yukitoshi Otani , Kenichi Koike
发明人： Yukitoshi Otani , Kenichi Koike
IPC分类号： G02B27/28 , G02F1/09 , G02B5/30 , G02F1/095
CPC分类号： G02F1/093 , Y10S372/703
摘要： In an optical isolator device comprising a plurality of optical isolator elements each of which comprises a pair of polarizers and a magneto-optical element disposed between said polarizers, the optical isolator elements have element cutoff wavelength bands which are different from one another. The optical isolator elements are arranged in series with an optical axis in common. Each element cutoff wavelength band is defined by an element cutoff central wavelength for a return light beam. The optical isolator device has a device cutoff wavelength band for the return light beam that is defined by a device cutoff central wavelength. When the optical isolator elements are equal in number to two, both of the optical isolator elements have a common wavelength area where the element cutoff wavelength bands overlap each other. One of the optical isolator elements has an element cutoff central wavelength shorter than the device cutoff central wavelength, while another of the optical isolator elements has another element cutoff central wavelength longer than the device cutoff central wavelength.
摘要翻译：在包括多个光隔离器元件的光隔离器器件中，每个光隔离器元件包括一对偏振器和设置在所述偏振器之间的磁光元件，光隔离器元件具有彼此不同的元件截止波长带。光隔离器元件与光轴串联布置。每个元件截止波长带由返回光束的元件截止中心波长限定。光隔离器器件具有由器件截止中心波长限定的返回光束的器件截止波长带。当光隔离器元件数量相等时，两个光隔离器元件具有共同的波长区域，其中元件截止波段彼此重叠。光隔离器元件之一具有比器件截止中心波长短的元件截止中心波长，而另一个光隔离器元件具有比器件截止中心波长长的另一元件截止中心波长。

10. 发明授权

US06665059B2 Method of measuring an inner stress state of disk substrate 失效
标题翻译：测量盘基片内应力状态的方法
公开(公告)号：US06665059B2
公开(公告)日：2003-12-16
申请号：US09781557
申请日：2001-02-13
申请人： Toshiyuki Kanno , Eiji Ishibashi , Toru Yoshizawa , Yukitoshi Otani
发明人： Toshiyuki Kanno , Eiji Ishibashi , Toru Yoshizawa , Yukitoshi Otani
IPC分类号： G01B1116
CPC分类号： G01B11/16 , G01B11/18
摘要： A measuring method capable of automatically analyzing quantitatively the inner state of a disk is provided. Linearly polarized light from a light source enters a retarder to produce a desired elliptically polarized state. The elliptically polarized light is then passed through a half-wave plate to rotate the direction of a principal axis of the ellipse. The light is expanded into two dimensions by lens systems and to obtain planar information, and is further transmitted through a disk substrate so that the birefringence of a specimen, which depends on an inner stress state and a polymer orientation state, changes the phase of the light. The light wave with its phase changed is passed through a polarizer arranged perpendicular to the principal axis of the retarder. The CCD detects the light wave as a light intensity.
摘要翻译：提供能够定量地自动分析盘内部状态的测量方法。来自光源的线偏振光进入延迟器以产生期望的椭圆极化状态。然后将椭圆偏振光通过半波片以旋转椭圆的主轴的方向。光被透镜系统扩展成二维并获得平面信息，并且进一步透过盘基片，使得取决于内应力状态和聚合物取向状态的试样的双折射率改变了光。其相位改变的光波通过垂直于延迟器主轴布置的偏振片。 CCD将光波检测为光强度。

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