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    • 2. 发明授权
    • Method for growing silicon carbide single crystal
    • 生长碳化硅单晶的方法
    • US08702864B2
    • 2014-04-22
    • US12812613
    • 2009-01-14
    • Yukio TerashimaYasuyuki Fujiwara
    • Yukio TerashimaYasuyuki Fujiwara
    • C30B9/00
    • C30B29/36C30B17/00
    • In a method for growing a silicon carbide single crystal on a silicon carbide single crystal substrate by contacting the substrate with a solution containing C prepared by dissolving C into the melt that contains Cr and X, which consists of at least one element of Ce and Nd, such that a proportion of Cr in a whole composition of the melt is in a range of 30 to 70 at. %, and a proportion of X in the whole composition of the melt is in a range of 0.5 at. % to 20 at. % in the case where X is Ce, or in a range of 1 at. % to 25 at. % in the case where X is Nd, and the silicon carbide single crystal is grown from the solution.
    • 在碳化硅单晶衬底上生长碳化硅单晶的方法中,通过使衬底与含有C的溶液接触,所述溶液通过将C溶解到含有Cr和X的熔体中,所述熔体包含​​至少一种Ce和Nd元素 使得熔体的整个组成中的Cr的比例在30〜70at 3的范围内。 %,并且熔体的整个组成中的X的比例在0.5at。的范围内。 %至20 at。 在X为Ce的情况下,或在1at的范围内。 %至25点。 在X为Nd的情况下,从溶液中生长碳化硅单晶。
    • 3. 发明授权
    • Method for growing silicon carbide single crystal
    • 生长碳化硅单晶的方法
    • US08685163B2
    • 2014-04-01
    • US12599520
    • 2008-11-18
    • Yukio TerashimaYasuyuki Fujiwara
    • Yukio TerashimaYasuyuki Fujiwara
    • C30B19/02
    • C30B9/10C30B19/02C30B29/36
    • A method for growing a silicon carbide single crystal on a single crystal substrate comprising the steps of heating silicon in a graphite crucible to form a melt, bringing a silicon carbide single crystal substrate into contact with the melt, and depositing and growing a silicon carbide single crystal from the melt, wherein the melt comprises 30 to 70 percent by atom, based on the total atoms of the melt, of chromium and 1 to 25 percent by atom, based on the total atoms of the melt, of X, where X is at least one selected from the group consisting of nickel and cobalt, and carbon. It is possible to improve morphology of a surface of the crystal growth layer obtained by a solution method.
    • 一种用于在单晶衬底上生长碳化硅单晶的方法,包括以下步骤:在石墨坩埚中加热硅以形成熔体,使碳化硅单晶衬底与熔体接触,并沉积和生长碳化硅单 晶体,其中熔体包含30至70%原子,基于熔体的总原子,铬和1至25%原子,基于熔体的总原子X,其中X为 选自镍和钴中的至少一种和碳。 可以改善通过溶液法获得的晶体生长层的表面的形态。
    • 7. 发明申请
    • METHOD FOR GROWING SILICON CARBIDE SINGLE CRYSTAL
    • 生产碳化硅单晶的方法
    • US20100288187A1
    • 2010-11-18
    • US12812613
    • 2009-01-14
    • Yukio TerashimaYasuyuki Fujiwara
    • Yukio TerashimaYasuyuki Fujiwara
    • C30B11/02
    • C30B29/36C30B17/00
    • In a method for growing a silicon carbide single crystal on a silicon carbide single crystal substrate by contacting the substrate with a solution containing C prepared by dissolving C into the melt that contains Cr and X, which consists of at least one element of Ce and Nd, such that a proportion of Cr in a whole composition of the melt is in a range of 30 to 70 at. %, and a proportion of X in the whole composition of the melt is in a range of 0.5 at. % to 20 at. % in the case where X is Ce, or in a range of 1 at. % to 25 at. % in the case where X is Nd, and the silicon carbide single crystal is grown from the solution.
    • 在碳化硅单晶衬底上生长碳化硅单晶的方法中,通过使衬底与含有C的溶液接触,所述溶液通过将C溶解在含有Cr和X的熔体中而形成,所述Cr和X由至少一种Ce和Nd元素组成 使得熔体的整个组成中的Cr的比例在30〜70at 3的范围内。 %,并且熔体的整个组成中的X的比例在0.5at。的范围内。 %至20 at。 在X为Ce的情况下,或在1at的范围内。 %至25点。 在X为Nd的情况下,从溶液中生长碳化硅单晶。