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1. 发明授权

US5859868A Solid-state laser device which is pumped by light output from laser diode 失效
标题翻译：由激光二极管的光输出泵浦的固体激光器件
公开(公告)号：US5859868A
公开(公告)日：1999-01-12
申请号：US788915
申请日：1997-01-22
申请人： Yukio Kyusho , Motohiro Arai
发明人： Yukio Kyusho , Motohiro Arai
IPC分类号： H01S3/094 , H01S3/0941 , H01S5/40 , H01S3/091
CPC分类号： H01S3/09415 , H01S5/4025
摘要： The diameter of the spot of the light output from a laser diode is reduced through a coupled optical system so as to be smaller than the incidence aperture of a tapered total reflection rod. The light output from the coupling optics is focused into the incidence aperture of the total reflection rod. The total reflection rod is equipped with a smaller emission aperture than the diameter of the incidence aperture and further reduces the spot of the focused light. That is, the light passing through the total reflection rod is reduced to a smaller diameter while being totally reflected internally. A laser medium is in optical contact with the emission aperture of the total reflection rod and is pumped by the light which is output from the total reflection rod.
摘要翻译：从激光二极管输出的光的光斑的直径通过耦合的光学系统减小，以便小于锥形全反射棒的入射孔。来自耦合光学器件的光输出聚焦到全反射棒的入射孔内。全反射棒具有比入射孔的直径更小的发射孔径，并进一步减少聚焦光的斑点。也就是说，通过全反射棒的光在内部被完全反射的同时被减小到更小的直径。激光介质与全反射棒的发射孔光学接触，并由从全反射棒输出的光泵送。

2. 发明申请

US20080127030A1 LASER REPAIR SYSTEM AND GLASS MASK USED FOR THE SAME 审中-公开
标题翻译：激光修复系统和玻璃面罩
公开(公告)号：US20080127030A1
公开(公告)日：2008-05-29
申请号：US11734697
申请日：2007-04-12
申请人： Yukio Kyusho
发明人： Yukio Kyusho
IPC分类号： G06F17/50
CPC分类号： G03B27/52 , G03F1/36 , G03F1/72
摘要： To provide an optical-proximity-correction (OPC) mask and a laser repair system using the same, which realize the correction working having a resolution equal to or higher than the resolution of a working optical system.It is possible to realize the working having a ratio R approx. ½ of the conventional ratio by using the pattern of a Cr film formed on a glass substrate same as a photomask as a mask and moreover using a mask in which an OPC pattern such as a serif is formed on the pattern instead of a variable XY slit mechanism used in a general mask repair system.Moreover, it is possible to accept defects of various sizes and shapes by mounting a conventional variable XY slit mechanism and a slit mechanism using an OPC mask and switching the mechanisms.
摘要翻译：为了提供光学邻近校正（OPC）掩模和使用该掩模的激光修复系统，其实现具有等于或高于工作光学系统的分辨率的分辨率的校正工作。可以实现比例R约为的工作。通过使用形成在与光掩模相同的玻璃基板上的Cr膜的图案作为掩模，并且使用其中在图案上形成诸如衬线的OPC图案的掩模，而不是可变XY狭缝，机制用于一般面罩修复系统。此外，通过使用OPC掩模安装常规的可变XY狭缝机构和狭缝机构并切换机构，可以接受各种尺寸和形状的缺陷。

3. 发明授权

US4802185A Transversely excited atmospheric laser 失效
标题翻译：横激激光大气激光
公开(公告)号：US4802185A
公开(公告)日：1989-01-31
申请号：US66925
申请日：1987-06-29
申请人： Yukio Kyusho
发明人： Yukio Kyusho
IPC分类号： H01S3/03 , H01S3/097 , H01S3/0971 , H01S3/223
CPC分类号： H01S3/2232 , H01S3/09713
摘要： An atmospheric laser which is transversely excited includes main and preliminary discharge electrodes. Life of laser gas used to promote ionization between the main discharge electrodes is lengthened by providing a sufficient number of preliminary discharge electrodes, at a distance sufficiently close to the main discharge electrodes to promote preliminary ionization in a preliminary discharge space, prior to discharge in the main discharge space. According to preferred embodiments of the invention, one of the rare gases such as He is provided in the preliminary discharge space, and a mixture of CO.sub.2, N.sub.2, and He is provided in the main discharge. In order to enable the preliminary discharge electrodes to be closer to the main discharge electrodes, air may be used in place of one of the rare gases in the preliminary discharge space, so that the overall apparatus may be made yet smaller.
摘要翻译：横向激发的大气激光包括主放电电极和初步放电电极。用于促进主放电电极之间的离子化的激光气体的寿命通过在足够接近主放电电极的距离处提供足够数量的预放电电极来延长，以促进在初步放电空间中的初始电离，然后在主放电空间。根据本发明的优选实施例，在预备放电空间中设置诸如He之类的稀有气体之一，并且在主放电中设置有CO 2，N 2和He的混合物。为了使预备放电电极更靠近主放电电极，可以使用空气来代替预备放电空间中的一种稀有气体，使得整个装置可以更小。

4. 发明授权

US06879605B2 Method and apparatus for performing pattern defect repair using Q-switched mode-locked pulse laser 失效
标题翻译：使用Q开关锁模脉冲激光进行图案缺陷修复的方法和装置
公开(公告)号：US06879605B2
公开(公告)日：2005-04-12
申请号：US09915059
申请日：2001-07-24
申请人： Yukio Kyusho , Yoichi Yoshino , Yukio Morishige
发明人： Yukio Kyusho , Yoichi Yoshino , Yukio Morishige
IPC分类号： G02F1/11 , B23K26/00 , B23K26/06 , B23K26/073 , G02F1/37 , G03F1/72 , H01L21/027 , H01L23/525 , H01S3/00 , H01S3/117 , H01S3/10
CPC分类号： G03F1/72 , B23K26/0622 , H01L23/525 , H01L2924/0002 , H01L2924/00
摘要： A method for repairing a pattern by using a laser and a laser-based pattern repair apparatus are provided which are capable of reducing splashes, rolling-up, and damage to a glass substrate to a minimum in pattern defects repairing processing by removing a thin metal layer such as a chromium layer. A part of a string of pulses obtained by slicing, using an optical shutter, pulses from laser light having a pulse width of 10 ps to 300 ps emitted from a Q-switched mode-locked pulse laser is used to produce multi-pulses which are divided into two portions in terms of time base correction using an optical delaying unit.
摘要翻译：提供了一种通过使用激光和基于激光的图案修复装置来修复图案的方法，其能够通过去除薄金属来减少图案缺陷修复处理中的玻璃基板的飞溅，卷起和损坏层如铬层。使用光学快门通过使用从Q开关锁模脉冲激光器发射的具有10ps至300ps的脉冲宽度的激光的脉冲进行切片获得的脉冲串的一部分被用于产生多脉冲，使用光学延迟单元在时基校正方面分为两部分。

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