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1. 发明授权

US06925693B2 Method of fabricating a piezoelectric/electrostrictive device 失效
标题翻译：制造压电/电致伸缩器件的方法
公开(公告)号：US06925693B2
公开(公告)日：2005-08-09
申请号：US09963696
申请日：2001-09-26
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
IPC分类号： H01L41/09 , H01L41/24 , H04R17/00
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49002 , Y10T29/4902 , Y10T29/49078 , Y10T29/49126 , Y10T29/49798 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.
摘要翻译：一种制造压电/电致伸缩器件的方法，包括驱动部分，可移动部分和用于保持驱动部分和可动部分的固定部分。驱动部分包括彼此面对的一对薄板部分，以及形成在至少一个薄板部分的外表面的至少一部分上的薄膜状压电/电致伸缩元件。形成包括构成薄板之一的至少一个陶瓷生片和至少形成有至少一个孔的至少一个陶瓷生片的陶瓷生坯层压体。将陶瓷生坯层压体烧结以制造陶瓷层压板。在陶瓷层叠体的薄板部分的外表面上通过成膜方法形成压电/电致伸缩元件。然后用形成在其上的压电/电致伸缩元件切割陶瓷层压体。

2. 发明授权

US06335586B1 Piezoelectric/electrostrictive device and production method thereof 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US06335586B1
公开(公告)日：2002-01-01
申请号：US09441914
申请日：1999-11-17
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49002 , Y10T29/4902 , Y10T29/49078 , Y10T29/49126 , Y10T29/49798 , Y10T83/0476 , Y10T83/0505 , Y10T83/051 , Y10T83/0577
摘要： A piezoelectric/elecrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion comprises a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element including at least a pair of electrode films and a piezoelectric/electrostrictive film formed at least on the outer surface of at least one thin plate portion of the thin plate portions. The fixing portion is coupled with the movable portion via the driving portion, a hole is defined by an inner wall of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion, and at least one side of a piezoelectric operating portion of said piezoelectric/electrostrictive element in a direction in which said thin plate portion connects with said fixing portion with the movable portion is structured to exist on the fixing portion or the movable portion. A ratio a/b of the thickness a of said hole and the width b of said thin plate portion is 0.5 to 20. Since the movable portion can be largely operated, the device can be used as a displacement element which is hardly affected by a harmful vibration in operation, and superior in mechanical strength, handling property, impact resistance, and humidity resistance, and a sensor element capable of detecting a vibration of the movable portion with fine precision.
摘要翻译：一种压电/电子装置，包括由压电/电致伸缩元件的位移驱动的驱动部分，基于驱动部分的驱动而被操作的可动部分，以及用于保持驱动部分和可动部分的固定部分。驱动部分包括彼此面对的一对薄板部分，以及至少包括一对电极膜和至少在至少一个薄板的外表面上形成的压电/电致伸缩薄膜的薄膜状压电/电致伸缩元件薄板部分的一部分。固定部分经由驱动部分与可动部分联接，孔由驱动部分的内壁，可动部分的内壁和固定部分的内壁限定，至少一侧所述压电/电致伸缩元件的压电操作部分在所述薄板部分与所述固定部分与所述可移动部分连接的方向上构造成存在于所述固定部分或所述可动部分上。所述孔的厚度a和所述薄板部的宽度b的比率a / b为0.5〜20。由于可动部能够大幅度地动作，因此能够将该装置用作几乎不受操作中的有害振动，机械强度，操作性，耐冲击性和耐湿性优异的传感器元件，以及能够精确地检测可动部的振动的传感器元件。

3. 发明授权

US06715192B2 Method for manufacturing a piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件的制造方法
公开(公告)号：US06715192B2
公开(公告)日：2004-04-06
申请号：US09970169
申请日：2001-10-03
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
IPC分类号： H04R1700
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49005 , Y10T29/49131 , Y10T29/49135 , Y10T29/49163
摘要： A fabricating method of a piezoelectric/electrostrictive device including a driving portion having thin plates facing each other and a film-like piezoelectric/electrostrictive element formed on the surface of at least one thin plate of the thin plates, and a fixing portion and a movable portion in rectangular solid form. The thin plates are spanned so that the side faces of the movable portion and the fixing portion are continuous. The fabricating method includes steps of preparing a laminated body of green sheets comprising at least one green sheet to constitute the thin plate, and at least one green sheet with at least one hole formed thereon, sintering a green-sheet laminated body, and forming a piezoelectric/electrostrictive element on an outer surface of the thin plates of the sintered body obtained.
摘要翻译：一种压电/电致伸缩器件的制造方法，包括具有彼此相对的薄板的驱动部分和形成在薄板的至少一个薄板的表面上的膜状压电/电致伸缩元件，以及固定部分和可移动的部分为矩形固体形式。这些薄板被跨越，使得可动部分和固定部分的侧面是连续的。制造方法包括以下步骤：制备包含至少一个生片的生片层压体以构成薄板;以及至少一个生片，其上形成有至少一个孔，烧结生片层压体，并形成在所获得的烧结体的薄板的外表面上的压电/电致伸缩元件。

4. 发明授权

US06342751B1 Piezoelectric/electrostrictive device and production method thereof 失效
标题翻译：压电/电致伸缩器件及其制造方法
公开(公告)号：US06342751B1
公开(公告)日：2002-01-29
申请号：US09436849
申请日：1999-11-09
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Toshikazu Hirota , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49005 , Y10T29/49131 , Y10T29/49135 , Y10T29/49163
摘要： A piezoelectric/elecrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion. Driving portion comprises a pair of thin plates facing each other, and a film-like piezoelectric/electrostrictive element formed on the outer surface of at least one thin plate of the thin plates, and the fixing portion is coupled with the movable portion via the driving portion, a hole is defined by an inner wall of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion, and a ratio a/b of the thickness a of the piezoelectric/electrostrictive device and the width b of the piezoelectric/electrostrictive device is 0.5 to 20.
摘要翻译：一种压电/电子装置，包括由压电/电致伸缩元件的位移驱动的驱动部分，基于驱动部分的驱动而被操作的可动部分，以及用于保持驱动部分和可动部分的固定部分。驱动部分包括彼此面对的一对薄板，以及形成在薄板的至少一个薄板的外表面上的薄膜状压电/电致伸缩元件，并且固定部分通过驱动与可动部分结合由驱动部的内壁，可动部的内壁和固定部的内壁形成有孔，压电/电致伸缩装置的厚度a的比a / b和压电/电致伸缩器件的宽度b为0.5至20。

5. 发明申请

US20060197413A9 Actuator Device 有权
标题翻译：执行机构
公开(公告)号：US20060197413A9
公开(公告)日：2006-09-07
申请号：US10896769
申请日：2004-07-22
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Natsumi Shimogawa , Takayoshi Akao
IPC分类号： H01L41/04
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.
摘要翻译：致动器装置具有驱动部，该驱动部具有布置在基板上的平面中的多个致动器，以及传递来自驱动部的致动器的驱动力的单个第一板部件。多个间隔件设置在第一板构件和基板之间，形成m个单元。每个致动器具有形成在基板上的空腔，振动部分和固定部分。第一板构件的刚性大于致动器的振动部的刚性。

6. 发明授权

US06968603B2 Method of producing a piezoelectric/electrostrictive device 失效
标题翻译：制造压电/电致伸缩器件的方法
公开(公告)号：US06968603B2
公开(公告)日：2005-11-29
申请号：US10122658
申请日：2002-04-15
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L41/08 , H01L41/083 , H01L41/09 , H01L41/22 , H01L41/338 , H02N2/00 , H04R17/00 , H01L41/04 , H01L41/18
CPC分类号： H01L41/0946 , H01L41/27 , Y10T29/42 , Y10T29/49789 , Y10T29/49798
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device further includes at least one beam section extending from the inner wall of the movable section to the inner wall of the fixing section.
摘要翻译：压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。一对薄壁部分的内壁，可移动部分的内壁和固定部分的内壁都由一个孔形成。压电/电致伸缩装置还包括从可动部分的内壁延伸到固定部分的内壁的至少一个梁部分。

7. 发明申请

US20050168109A1 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US20050168109A1
公开(公告)日：2005-08-04
申请号：US10959420
申请日：2004-10-06
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Ikeda , Koji Kimura , Kazuyoshi Shibata
IPC分类号： B06B1/06 , H01L41/08 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/338 , H02N2/00 , H02N2/02 , H02N2/04
CPC分类号： H01L41/094 , H01L41/0831 , H01L41/0946 , H01L41/1132 , H01L41/273
摘要： A piezoelectric/electrostrictive device is provided, including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the thin plate sections. The piezoelectric/electrostrictive device also includes movable sections defined by at least first end portions of the thin plate sections and a material which is different from that of the thin plate section
摘要翻译：提供一种压电/电致伸缩器件，包括一对相互相对的薄板部分和用于支撑薄板部分的固定部分。压电/电致伸缩元件布置在每个薄板部分上。压电/电致伸缩装置还包括由薄板部分的至少第一端部限定的可移动部分和与薄板部分不同的材料

8. 发明授权

US06570297B1 Piezoelectric/electrostrictive device 失效
标题翻译：压电/电致伸缩器件
公开(公告)号：US06570297B1
公开(公告)日：2003-05-27
申请号：US09643163
申请日：2000-08-21
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Masato Komazawa , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/27
摘要： A piezoelectric/electrostrictive device (P/E) includes driving, movable and fixing portions. One end of a first P/E element and P/E operating portion on the end are positioned on the fixing portion and an opposite end of the P/E operating portion of the first P/E element is positioned on a first thin plate portion. One end of a second P/E element and P/E operating portion on the end are positioned on the movable portion and an opposite end of the P/E operating portion of the second P/E element is positioned on a second thin plate portion. A hole formed by inner walls of the driving, movable and fixing portions has a central axis that extends in an axial direction substantially parallel to the thin plate portions and substantially perpendicular to the length direction, and the device is free of any other holes extending in any direction other than the axial direction.
摘要翻译：压电/电致伸缩装置（P / E）包括驱动，可移动和固定部分。第一P / E元件的一端和端部上的P / E操作部分位于固定部分上，并且第一P / E元件的P / E操作部分的相对端位于第一薄板部分上。第二P / E元件的一端和端部上的P / E操作部分位于可动部分上，并且第二P / E元件的P / E操作部分的相对端位于第二薄板部分上。由驱动，可移动和固定部分的内壁形成的孔具有中心轴线，所述中心轴线在基本上平行于薄板部分并且基本上垂直于长度方向的轴向方向上延伸，并且该装置没有任何其它孔延伸轴向以外的任何方向。

9. 发明授权

US06538362B1 Piezoelectric/electrostrictive device and method of manufacturing same 失效
公开(公告)号：US06538362B1
公开(公告)日：2003-03-25
申请号：US09613536
申请日：2000-07-10
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0926 , H01L41/0946 , H01L41/1876 , H01L41/27 , Y10T29/42 , Y10T29/49005 , Y10T29/49574 , Y10T29/49789
摘要： A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.

10. 发明授权

US06518690B2 Piezoelectric/electrostrictive film type elements and process for producing the same 有权
标题翻译：压电/电致伸缩膜型元件及其制造方法
公开(公告)号：US06518690B2
公开(公告)日：2003-02-11
申请号：US09837546
申请日：2001-04-18
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Masao Takahashi
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura , Masao Takahashi
IPC分类号： H01L41187
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译：具有优异耐久性的集成压电/电致伸缩膜型元件包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过成膜方法集成在陶瓷基板上的压电/电致伸缩操作部分，压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制在 0.1〜30％。

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