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    • 4. 发明授权
    • Fluid control device
    • 流体控制装置
    • US09103337B2
    • 2015-08-11
    • US13603689
    • 2012-09-05
    • Atsuhiko HirataYoshinori AndoTakenobu MaedaYukiharu KodamaKenta Omori
    • Atsuhiko HirataYoshinori AndoTakenobu MaedaYukiharu KodamaKenta Omori
    • F04B17/03F04B43/04F04B45/047
    • F04B43/046F04B45/047F04D33/00
    • A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.
    • 流体控制装置包括振动板单元,驱动器和柔性板。 振动板单元包括具有第一和第二主表面的振动板,围绕振动板的框架板和连接振动板和框架板并将振动板弹性地支撑在框架板上的连杆部分。 驱动器位于振动板的第一主表面上,并振动振动板。 该柔性板具有面向振动板的第二主表面的孔,固定在框架板上。 振动板和连杆部分的至少一部分比框架板的厚度薄,使得振动板的部分的表面和连接部分在柔性板的侧面上的表面可以与柔性的 盘子。