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    • 1. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07655569B2
    • 2010-02-02
    • US12020761
    • 2008-01-28
    • Yuichi InabaYutaka YamadaShigehiro Morikawa
    • Yuichi InabaYutaka YamadaShigehiro Morikawa
    • H01L21/311
    • H01L27/115H01L29/42324H01L29/66825H01L29/7881
    • The invention prevents a wiring layer in a memory region from being exposed to prevent a change in wire resistance and degradation of reliability. A SiO2 film as an etching stopper film which transmits ultraviolet light is formed on pad electrodes and an interlayer insulation film. Then, the SiO2 film on the pad electrodes is etched selectively and the SiO2 film in an EPROM region is left. A silicon nitride film and a polyimide film are then formed on the SiO2 film and on the pad electrodes where the SiO2 film is removed, as a protection film which does not transmit ultraviolet light. The silicon nitride film and the polyimide film on the pad electrodes and in the EPROM region are then selectively removed by etching. Since the SiO2 film functions as an etching stopper at this time, the interlayer insulation film under the SiO2 film is prevented from being etched and a control gate line metal layer is prevented from being exposed.
    • 本发明防止存储区域中的布线层暴露,以防止电线电阻的变化和可靠性的劣化。 在焊盘电极和层间绝缘膜上形成作为透射紫外光的蚀刻停止膜的SiO 2膜。 然后,选择性地蚀刻焊盘电极上的SiO 2膜,并且留下EPROM区域中的SiO 2膜。 然后在SiO 2膜上除去SiO 2膜的焊盘电极上形成氮化硅膜和聚酰亚胺膜作为不透射紫外线的保护膜。 然后通过蚀刻选择性地去除焊盘电极和EPROM区域中的氮化硅膜和聚酰亚胺膜。 由于SiO 2膜此时用作蚀刻阻挡层,因此可以防止SiO 2膜下的层间绝缘膜被蚀刻,防止控制栅线金属层露出。
    • 2. 发明申请
    • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20090011603A1
    • 2009-01-08
    • US12020761
    • 2008-01-28
    • Yuichi InabaYutaka YamadaShigehiro Morikawa
    • Yuichi InabaYutaka YamadaShigehiro Morikawa
    • H01L21/311
    • H01L27/115H01L29/42324H01L29/66825H01L29/7881
    • The invention prevents a wiring layer in a memory region from being exposed to prevent a change in wire resistance and degradation of reliability. A SiO2 film as an etching stopper film which transmits ultraviolet light is formed on pad electrodes and an interlayer insulation film. Then, the SiO2 film on the pad electrodes is etched selectively and the SiO2 film in an EPROM region is left. A silicon nitride film and a polyimide film are then formed on the SiO2 film and on the pad electrodes where the SiO2 film is removed, as a protection film which does not transmit ultraviolet light. The silicon nitride film and the polyimide film on the pad electrodes and in the EPROM region are then selectively removed by etching. Since the SiO2 film functions as an etching stopper at this time, the interlayer insulation film under the SiO2 film is prevented from being etched and a control gate line metal layer is prevented from being exposed.
    • 本发明防止存储区域中的布线层暴露,以防止电线电阻的变化和可靠性的劣化。 在焊盘电极和层间绝缘膜上形成作为透射紫外光的蚀刻停止膜的SiO 2膜。 然后,选择性地蚀刻焊盘电极上的SiO 2膜,并且留下EPROM区域中的SiO 2膜。 然后在SiO 2膜上除去SiO 2膜的焊盘电极上形成氮化硅膜和聚酰亚胺膜作为不透射紫外线的保护膜。 然后通过蚀刻选择性地去除焊盘电极和EPROM区域中的氮化硅膜和聚酰亚胺膜。 由于SiO 2膜此时用作蚀刻阻挡层,因此可以防止SiO 2膜下的层间绝缘膜被蚀刻,防止控制栅线金属层露出。
    • 6. 发明授权
    • Electrode device for microwave surgery
    • 微波手术用电极装置
    • US07195626B2
    • 2007-03-27
    • US10516611
    • 2003-06-02
    • Koichi WakikaidoYoshimasa KurumiShigeyuki NakaShigehiro Morikawa
    • Koichi WakikaidoYoshimasa KurumiShigeyuki NakaShigehiro Morikawa
    • A61B18/18
    • A61B18/18A61B18/1815A61B2090/3954
    • Disclosed is an electrode device for microwave surgery which is provided with a marker securely fixed to the central electrode, which marker can provide a magnetic susceptibility artifact of a uniform size and shape free of fluctuation among electrode devices. The electrode device comprise a central conductor body, a tubular insulator body which covers the central conductor body except its distal end, a tubular external electrode which covers the tubular insulator body except its distal end part, and a central electrode which covers the distal end part of the central conductor body. The central conductor body, the insulator body, the external electrode and the central electrode are made of a nonmagnetic material, and a cylindrical member made of a magnetic material is fit around the distal end part of the central conductor body. At least one projection is defined on the lateral face of the central conductor body at the distal side of the cylindrical member, and the cylindrical member engages with the projection in the distal direction.
    • 公开了一种用于微波手术的电极装置,其具有牢固地固定到中心电极的标记,该标记可以提供在电极装置之间没有波动的均匀尺寸和形状的磁化率伪影。 所述电极装置包括:中心导体体,覆盖除了前端部之外的中心导体本体的管状绝缘子体;覆盖所述管状绝缘子体的除了前端部之外的管状外部电极;以及覆盖所述前端部的中央电极 的中心导体。 中心导体体,绝缘体,外部电极和中心电极由非磁性材料制成,并且由磁性材料制成的圆柱形构件安装在中心导体的远端部分周围。 至少一个凸起限定在中心导体本体的圆柱形构件的远侧的侧面上,并且圆柱形构件在远端方向上与突起接合。
    • 7. 发明申请
    • Microwave surgery electronic device
    • 微波手术电子设备
    • US20050149009A1
    • 2005-07-07
    • US10516611
    • 2003-06-02
    • Koichi WakikaidoYoshimasa KurumiShigeyuki NakaShigehiro Morikawa
    • Koichi WakikaidoYoshimasa KurumiShigeyuki NakaShigehiro Morikawa
    • A61B18/18A61B19/00
    • A61B18/18A61B18/1815A61B2090/3954
    • Disclosed is an electrode device for microwave surgery which is provided with a marker securely fixed to the central electrode, which marker can provide a magnetic susceptibility artifact of a uniform size and shape free of fluctuation among electrode devices. The electrode device comprise a central conductor body, a tubular insulator body which covers the central conductor body except its distal end, a tubular external electrode which covers the tubular insulator body except its distal end part, and a central electrode which covers the distal end part of the central conductor body. The central conductor body, the insulator body, the external electrode and the central electrode are made of a nonmagnetic material, and a cylindrical member made of a magnetic material is fit around the distal end part of the central conductor body. At least one projection is defined on the lateral face of the central conductor body at the distal side of the cylindrical member, and the cylindrical member engages with the projection in the distal direction.
    • 公开了一种用于微波手术的电极装置,其具有牢固地固定到中心电极的标记,该标记可以提供在电极装置之间没有波动的均匀尺寸和形状的磁化率伪影。 所述电极装置包括:中心导体体,覆盖除了前端部之外的中心导体本体的管状绝缘子体;覆盖所述管状绝缘子体的除了前端部之外的管状外部电极;以及覆盖所述前端部的中央电极 的中心导体。 中心导体体,绝缘体,外部电极和中心电极由非磁性材料制成,并且由磁性材料制成的圆柱形构件安装在中心导体的远端部分周围。 至少一个凸起限定在中心导体本体的圆柱形构件的远侧的侧面上,并且圆柱形构件在远端方向上与突起接合。
    • 9. 发明授权
    • Weaving welding method
    • 焊接方法
    • US5063281A
    • 1991-11-05
    • US427102
    • 1989-10-06
    • Toru MizunoShigehiro Morikawa
    • Toru MizunoShigehiro Morikawa
    • B23K9/12B23K9/02G05B19/4093
    • B23K9/0216
    • A weaving welding method is provided which permits an accurate and continuous weaving welding along various weld lines including a complicated weld line which is a combination of straight lines and arcs, based on a simple determination. In accordance with the previously predetermined start and end points of a first section of a desired weld line, the predetermined weaving width and the detected orientation of a welding torch, a weaving swing plane is determined which includes an intersection line at which a first plane traversing the desired weld line at right angles thereto intersects a second plane perpendicular to the axis of the welding torch, and is parallel to the desired weld line (S2). The torch is then moved along the desired weld line while moved in a weaving pattern with a predetermined weaving width in a direction traversing the desired weld line, such that the distal end thereof is moved on the weaving swing plane (S3). During the execution of these steps, the desired weld line is corrected in accordance with the detected value of the welding current, so as to be coincident with the center line of a groove of a workpiece (S 4). Then, the above process is carried out for the second section of the desired weld line.