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    • 2. 发明授权
    • Method of manufacturing semiconductor device wherein silicon substrates
are bonded together
    • 制造半导体器件的方法,其中硅衬底结合在一起
    • US4700466A
    • 1987-10-20
    • US825544
    • 1986-02-03
    • Akio NakagawaHiromichi OhashiTsuneo OguraMasaru Shimbo
    • Akio NakagawaHiromichi OhashiTsuneo OguraMasaru Shimbo
    • H01L29/78H01L21/02H01L21/18H01L21/20H01L21/306H01L21/336H01L27/12H01L29/74H01L29/861H01L21/461
    • H01L21/02052H01L21/187
    • A method of manufacturing a semiconductor device, wherein a semiconductor wafer having a first impurity-doped layer and a second impurity-doped layer having a higher impurity concentration than that of the first impurity-doped layer is formed. A first silicon substrate, having a first impurity-doped layer and a third impurity-doped layer which has a higher impurity concentration than that of the first impurity-doped layer and the same conductivity type as that of the second impurity-doped layer, and whose surface is mirror-polished, is brought into contact with a second silicon substrate which has a higher impurity concentration than that of the first impurity-doped layer and the same conductivity type as that of the second impurity-doped layer, and whose surface is mirror-polished, so that the mirror-polished surfaces thereof are in contact with each other. The contacting substrates are then placed in a clean atmosphere so that virtually no foreign substances are present therebetween, and annealed at a temperature of not less than 200.degree. C. so as to bond them together, thereby forming the second impurity-doped layer consisting of the third impurity doped layer and the second silicon substrate.
    • 一种制造半导体器件的方法,其中形成具有第一杂质掺杂层和杂质浓度高于第一杂质掺杂层的第二杂质掺杂层的半导体晶片。 具有第一杂质掺杂层和第三杂质掺杂层的第一硅衬底,其具有比第一杂质掺杂层高的杂质浓度和与第二杂质掺杂层相同的导电类型,以及 其表面经镜面抛光与第二硅衬底接触,第二硅衬底的杂质浓度高于第一杂质掺杂层的杂质浓度并且具有与第二杂质掺杂层相同的导电类型,并且其表面为 镜面抛光,使得其镜面抛光表面彼此接触。 然后将接触的基材放置在清洁的气氛中,实际上不存在异物,并在不低于200℃的温度下进行退火,以将它们结合在一起,由此形成第二杂质掺杂层,由 第三杂质掺杂层和第二硅衬底。