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    • 1. 发明授权
    • Method of fabricating semiconductor device including a recessed channel
    • 制造包括凹陷通道的半导体器件的方法
    • US08835257B2
    • 2014-09-16
    • US13312176
    • 2011-12-06
    • Young-Pil KimHyung-Ik LeeWoo-Sung JeonKi-Hong KimJung-Yun WonIn-Sun Jung
    • Young-Pil KimHyung-Ik LeeWoo-Sung JeonKi-Hong KimJung-Yun WonIn-Sun Jung
    • H01L21/762H01L27/105H01L27/108
    • H01L27/1052H01L21/76224H01L27/10876
    • A method including forming an isolation trench; forming first and second liners on the isolation trench; filling the isolation trench an insulating material to form an isolation region and an active region; forming a preliminary gate trench including a first region across the isolation region to expose the first liner, the second liner, and the insulating material, and a second region across the active region to expose a portion of the substrate, the first region having a first sidewall with a planar shape, and the second region having a second sidewall with a concave central area such that an interface between the first and second regions has a pointed portion; removing a portion of the first liner exposed by the first region to form a dent having a first depth by which the pointed portion protrudes; removing the pointed portion to form a gate trench; and forming a gate electrode.
    • 一种包括形成隔离沟槽的方法; 在隔离槽上形成第一和第二衬垫; 将绝缘沟槽填充绝缘材料以形成隔离区域和有源区域; 形成包括隔离区域的第一区域的初步栅极沟槽,以露出第一衬垫,第二衬垫和绝缘材料,以及横跨有源区域的第二区域以暴露衬底的一部分,第一区域具有第一 侧壁具有平面形状,并且所述第二区域具有第二侧壁,所述第二侧壁具有凹形中心区域,使得所述第一和第二区域之间的界面具有尖锐部分; 去除由所述第一区域暴露的所述第一衬垫的一部分以形成具有所述尖部突出的第一深度的凹陷; 去除尖部以形成栅沟; 并形成栅电极。
    • 2. 发明申请
    • METHOD OF FABRICATING SEMICONDUCTOR DEVICE INCLUDING A RECESSED CHANNEL
    • 制造包含通道的半导体器件的方法
    • US20120231605A1
    • 2012-09-13
    • US13312176
    • 2011-12-06
    • Young-Pil KIMHyung-Ik LeeWoo-Sung JeonKi-Hong KimJung-Yun WonIn-Sun Jung
    • Young-Pil KIMHyung-Ik LeeWoo-Sung JeonKi-Hong KimJung-Yun WonIn-Sun Jung
    • H01L21/762
    • H01L27/1052H01L21/76224H01L27/10876
    • A method including forming an isolation trench; forming first and second liners on the isolation trench; filling the isolation trench an insulating material to form an isolation region and an active region; forming a preliminary gate trench including a first region across the isolation region to expose the first liner, the second liner, and the insulating material, and a second region across the active region to expose a portion of the substrate, the first region having a first sidewall with a planar shape, and the second region having a second sidewall with a concave central area such that an interface between the first and second regions has a pointed portion; removing a portion of the first liner exposed by the first region to form a dent having a first depth by which the pointed portion protrudes; removing the pointed portion to form a gate trench; and forming a gate electrode.
    • 一种包括形成隔离沟槽的方法; 在隔离沟槽上形成第一和第二衬垫; 将绝缘沟槽填充绝缘材料以形成隔离区域和有源区域; 形成包括隔离区域的第一区域的初步栅极沟槽,以露出第一衬垫,第二衬垫和绝缘材料,以及横跨有源区域的第二区域以暴露衬底的一部分,第一区域具有第一 侧壁具有平面形状,并且所述第二区域具有第二侧壁,所述第二侧壁具有凹形中心区域,使得所述第一和第二区域之间的界面具有尖锐部分; 去除由所述第一区域暴露的所述第一衬垫的一部分以形成具有所述尖部突出的第一深度的凹陷; 去除尖部以形成栅沟; 并形成栅电极。
    • 8. 发明申请
    • COMPRESSION SCHEME FOR IMPROVING CACHE BEHAVIOR IN DATABASE SYSTEMS
    • 用于改进数据库系统中的缓存行为的压缩方案
    • US20120124010A1
    • 2012-05-17
    • US13360483
    • 2012-01-27
    • Sang K. ChaKi-Hong KimKeun-Joo Kwon
    • Sang K. ChaKi-Hong KimKeun-Joo Kwon
    • G06F17/30
    • G06F17/30321G06F17/30327G06F17/30333Y10S707/99931Y10S707/99932Y10S707/99933Y10S707/99942
    • The apparatuses and methods described herein may operate to identify, from an index structure stored in memory, a reference minimum bounding shape that encloses at least one minimum bounding shape. Each of the at least one minimum bounding shape may correspond to a data object associated with a leaf node of the index structure. Coordinates of a point of the at least one minimum bounding shape may be associated with a set of first values to produce a relative representation of the at least one minimum bounding shape. The set of first values may be calculated relative to coordinates of a reference point of the reference minimum bounding shape such that each of the set of first values comprises a first number of significant bits fewer than a second number of significant bits representing a second value associated with a corresponding one of absolute coordinates of the point.
    • 本文描述的装置和方法可以操作以从存储在存储器中的索引结构中识别包围至少一个最小边界形状的参考最小边界形状。 所述至少一个最小边界形状中的每一个可对应于与所述索引结构的叶节点相关联的数据对象。 所述至少一个最小边界形状的点的坐标可以与一组第一值相关联,以产生所述至少一个最小边界形状的相对表示。 可以相对于参考最小限制形状的参考点的坐标来计算第一值集合,使得该组第一值中的每一个包括少于第二数量的有效位,第二数量的有效位少于表示相关联的第二值的第二数量的有效位 与点的绝对坐标相对应。