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    • 4. 发明申请
    • Outer rotor superconductor journal bearing
    • 外转子超导体轴颈轴承
    • US20090088324A1
    • 2009-04-02
    • US11978749
    • 2007-10-30
    • Se Yong JungYoung Hee HanJeong Phil LeeTae Hyun SungByung Jun Park
    • Se Yong JungYoung Hee HanJeong Phil LeeTae Hyun SungByung Jun Park
    • H02K7/09
    • H02K7/09F16C32/0438F16C37/005
    • An outer rotor superconductor journal bearing that comprising modules and including an outer rotor superconductor journal bearing that cools a superconductor that is mechanically fixed to a module below a critical temperature, attains a strong magnetic fixing force in an axial direction and a radial direction, prevents the superconductor from being damaged due to a different thermal expansion between the superconductor and a cryostat when cooled, and is easier for assembling and repair and maintenance. Preferably, the outer rotor superconductor journal bearing includes a rotor in which a solid of revolution magnet is magnetized in an axis direction in an inner portion of an inner circumference thereof; and a stator comprising a cryostat in the shape of a cylinder in which a superconductor that is tightly adhered to an inner circumference of the rotor is mounted in an outer circumference of the cryostat.
    • 一种外转子超导体轴颈轴承,其包括模块并且包括将机械地固定到低于临界温度的模块的超导体进行冷却的外转子超导体轴颈轴承,在轴向方向和径向方向上获得强的磁固定力, 超导体在冷却时由于超导体和低温恒温器之间的不同热膨胀而被损坏,并且更容易组装和修理和维护。 优选地,外转子超导体轴颈轴承包括转子,其中旋转磁体在其内周的内部沿轴向被磁化; 以及定子,其包括气缸形状的低温恒温器,其中紧密附着在转子的内周上的超导体安装在低温恒温器的外周。
    • 5. 发明授权
    • Outer rotor superconductor journal bearing
    • 外转子超导体轴颈轴承
    • US07659646B2
    • 2010-02-09
    • US11978749
    • 2007-10-30
    • Se Yong JungYoung Hee HanJeong Phil LeeTae Hyun SungByung Jun Park
    • Se Yong JungYoung Hee HanJeong Phil LeeTae Hyun SungByung Jun Park
    • H02K7/08H02K7/09H02K9/00
    • H02K7/09F16C32/0438F16C37/005
    • An outer rotor superconductor journal bearing that comprising modules and including an outer rotor superconductor journal bearing that cools a superconductor that is mechanically fixed to a module below a critical temperature, attains a strong magnetic fixing force in an axial direction and a radial direction, prevents the superconductor from being damaged due to a different thermal expansion between the superconductor and a cryostat when cooled, and is easier for assembling and repair and maintenance. Preferably, the outer rotor superconductor journal bearing includes a rotor in which a solid of revolution magnet is magnetized in an axis direction in an inner portion of an inner circumference thereof; and a stator comprising a cryostat in the shape of a cylinder in which a superconductor that is tightly adhered to an inner circumference of the rotor is mounted in an outer circumference of the cryostat.
    • 一种外转子超导体轴颈轴承,其包括模块并且包括将机械地固定到低于临界温度的模块的超导体进行冷却的外转子超导体轴颈轴承,在轴向方向和径向方向上获得强的磁固定力, 超导体在冷却时由于超导体和低温恒温器之间的不同热膨胀而被损坏,并且更容易组装和修理和维护。 优选地,外转子超导体轴颈轴承包括转子,其中旋转磁体在其内周的内部沿轴向被磁化; 以及定子,其包括气缸形状的低温恒温器,其中紧密附着在转子的内周上的超导体安装在低温恒温器的外周。
    • 9. 发明授权
    • Method for fabricating semiconductor device, and semiconductor device, having storage node contact plugs
    • 制造半导体器件的方法以及具有存储节点接触插头的半导体器件
    • US06759704B2
    • 2004-07-06
    • US10334783
    • 2003-01-02
    • Byung Jun Park
    • Byung Jun Park
    • H01L218242
    • H01L21/76831H01L21/76804H01L21/76816H01L27/10814H01L27/10855
    • A method for fabricating a semiconductor device, and a semiconductor device, having storage node contact plugs whereby by a first interlayer dielectric layer (ILD) film having a greater etch rate is formed on a surface of a structure, and then a second ILD film having a smaller etch rate is formed on the first ILD film. After storage node contact holes having narrow width are formed by dry etching the ILD films, the width is increased by wet etching the ILD films. Since the first ILD film has a greater etch rate and is etched faster than the second ILD film, the lower width of each of the storage node contact holes is increased relatively more than the upper width. Insulating layer spacers are then formed on the internal walls of the storage node contact holes, and storage node contact plugs are formed by burying a conductive material therein.
    • 一种用于制造半导体器件的方法和具有存储节点接触插塞的半导体器件,由此通过在结构的表面上形成具有更大蚀刻速率的第一层间介电层(ILD)膜,然后形成具有 在第一ILD膜上形成较小的蚀刻速率。 在通过干蚀刻ILD膜形成具有窄宽度的存储节点接触孔之后,通过湿蚀刻ILD膜来增加宽度。 由于第一ILD膜具有更大的蚀刻速率并且被蚀刻得比第二ILD膜更快,所以每个存储节点接触孔的较低宽度相对于上部宽度增加。 然后在存储节点接触孔的内壁上形成绝缘层间隔物,并且通过在其中埋入导电材料形成存储节点接触插塞。