专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5247329A Projection type exposure method and apparatus 失效
标题翻译：投影式曝光方法及装置
公开(公告)号：US5247329A
公开(公告)日：1993-09-21
申请号：US813002
申请日：1991-12-24
申请人： Yoshitada Oshida , Toshiei Kurosaki , Akira Inagaki , Yoshihiko Aiba
发明人： Yoshitada Oshida , Toshiei Kurosaki , Akira Inagaki , Yoshihiko Aiba
IPC分类号： G03F1/44 , G03F7/20 , G03F7/207 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/7023 , G03F7/70241
摘要： A projection type exposure apparatus and method comprising an exposure illumination light source, an exposure illumination system, a mask or reticle on which an original pattern to be projected on the exposed matter is drawn, an optical projection system, a stage for retaining the exposed matter and a mechanism for finely moving the stage along the exposure optical axis. The apparatus is provided with an exposure detection pattern area on the mask, detection illumination means for projecting on the exposure detection pattern area a light ray which is the same or almost the same in wavelength as exposure light having a desired directivity, exposure detection means for detecting the transmitted or reflected light diffracted by 1 degree after the light carrying the image formed on the exposed matter by the light passed through the above-noted optical projection system after projection by the detection illumination means onto the exposure pattern and then diffracted goes in reverse through the above-noted optical projection system and forms an image again on the exposure pattern on the above-noted mask and a control circuit for driving and controlling the above-noted fine movement mechanism by using the signal obtained by the exposure detection means.
摘要翻译：一种投影式曝光装置和方法，包括曝光照明光源，曝光照明系统，掩模或掩模版，其上将要投射在暴露物体上的原始图案被拉出，光学投影系统，用于保持暴露物质的台以及用于沿着曝光光轴精细地移动台的机构。该设备在掩模上设置曝光检测图案区域，检测照明装置用于在曝光检测图案区域上投射与具有所需方向性的曝光光相同或几乎相同的波长的光线，曝光检测装置在通过检测照明装置投影到曝光图案上之后，在通过上述光学投影系统的光在携带在曝光物体上形成的图像的光之后，将被发射或反射的光衍射1度，然后衍射反向通过上述光学投影系统并在上述掩模上的曝光图案上再次形成图像，以及通过使用由曝光检测装置获得的信号来驱动和控制上述微动机构的控制电路。

2. 发明授权

US5153916A Method and apparatus for detecting focal plane 失效
标题翻译：检测焦平面的方法和装置
公开(公告)号：US5153916A
公开(公告)日：1992-10-06
申请号：US688285
申请日：1991-04-22
申请人： Akira Inagaki , Masataka Shiba , Yoshihiko Aiba
发明人： Akira Inagaki , Masataka Shiba , Yoshihiko Aiba
IPC分类号： G02B7/36 , G02B7/28 , G03B27/34 , G03F1/44 , G03F1/76 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/66
CPC分类号： G03F7/70591 , G03F7/70641 , G03F9/70
摘要： A method and apparatus measures an image plane of a test pattern projected onto a surface of a sample disposed on a stage to precisely detect the image plane to thereby obtain a precise alignment therebetween for subsequent exposure. The test pattern is provided on a member having a conjugate surface with an upper surface of an illumination detecting unit having at least three optical sensors at different positions thereof and disposed on the stage. The upper surface of the illumination detecting unit has an analogous pattern to the test pattern on each optical sensor and, by moving the stage three dimensionally, outputs of the optical sensors are processed to obtain amounts of light and peak values thereof from which the image plane is obtained.
摘要翻译：一种方法和装置测量投影到设置在台架上的样品表面上的测试图案的图像平面，以精确地检测图像平面，从而在其间获得精确的对准以用于随后的曝光。测试图案设置在具有共轭表面的构件上，照明检测单元的上表面在其不同位置处具有至少三个光学传感器并且设置在平台上。照明检测单元的上表面具有与每个光学传感器上的测试图案类似的图案，并且通过三维地移动台，对光学传感器的输出进行处理，以获得其光像和峰值的量，获得。

3. 发明授权

US08658102B2 Chemical analysis apparatus and chemical analysis method 有权
标题翻译：化学分析仪器和化学分析方法
公开(公告)号：US08658102B2
公开(公告)日：2014-02-25
申请号：US12785835
申请日：2010-05-24
申请人： Hajime Katou , Ryo Miyake , Hiroyasu Uchida , Katsuhiro Kambara , Takenori Okusa , Shigenori Watari , Yoichiro Suzuki , Tomonori Mimura , Miki Taki , Akira Inagaki
发明人： Hajime Katou , Ryo Miyake , Hiroyasu Uchida , Katsuhiro Kambara , Takenori Okusa , Shigenori Watari , Yoichiro Suzuki , Tomonori Mimura , Miki Taki , Akira Inagaki
IPC分类号： B06B1/06
CPC分类号： G01N35/1002 , B01F11/0283 , B01F2215/0037 , G01N35/025 , G01N2035/00554 , Y10S707/962 , Y10S707/99933 , Y10S707/99942 , Y10S707/99943 , Y10S707/99956
摘要： A chemical analysis apparatus comprising reaction containers containing therein a substance to be analyzed; an agitating mechanism spaced from the substance to be analyzed and agitating said substance to be analyzed with a liquid in said reaction container; and, a measuring portion for measuring physical properties of the substance to be analyzed, said agitating mechanism having a sound supply portion supplying sound waves to the substance to be analyzed, wherein said sound supply portion comprises a mechanism changing, in time, intensity of ultrasonic waves to be irradiated so as to apply pulsation to a swirl flow in the reaction container.
摘要翻译：一种化学分析装置，包括含有待分析物质的反应容器; 与待分析物质间隔开的搅拌机构，并在所述反应容器中用液体搅拌待分析物质; 以及用于测量被分析物质的物理性质的测量部分，所述搅拌机构具有向待分析物质供应声波的声音供给部分，其中所述声音供应部分包括时间上改变超声波强度的机构要被照射的波浪以便对反应容器中的涡流施加脉动。

4. 发明授权

US07492521B2 Optical sheet, backlight unit, electro-optical device, electronic apparatus and method for manufacturing the optical sheet 失效
标题翻译：光学片，背光单元，电光装置，电子设备以及光学片的制造方法
公开(公告)号：US07492521B2
公开(公告)日：2009-02-17
申请号：US11422205
申请日：2006-06-05
申请人： Hironori Hasei , Akira Inagaki
发明人： Hironori Hasei , Akira Inagaki
IPC分类号： G02B27/10
CPC分类号： G02B3/0031 , G02B3/0056
摘要： A method for manufacturing an optical sheet, comprises: (a) discharging a first lens material in liquid form being a material for a micro lens on a sheet in a dot array; (b) semi-curing the first lens material arranged on the sheet; (c) discharging a second lens material in liquid form being a material for the micro lens towards gap portions between the dots of the first lens material; and (d) forming a micro lens array by full curing the first and the second lens materials.
摘要翻译：一种制造光学片的方法，包括：（a）将作为微透镜材料的液体形式的第一透镜材料排放在点阵列的片材上; （b）半固化布置在片材上的第一透镜材料; （c）将液晶形式的第二透镜材料排出为用于所述微透镜的材料朝向所述第一透镜材料的所述点之间的间隙部分; 和（d）通过完全固化第一和第二透镜材料形成微透镜阵列。

5. 发明授权

US5121449A Information detecting system of scanning type 失效
标题翻译：扫描型信息检测系统
公开(公告)号：US5121449A
公开(公告)日：1992-06-09
申请号：US513911
申请日：1990-04-24
申请人： Masataka Shiba , Ryuichi Funatsu , Motoya Taniguchi , Minoru Tanaka , Akira Inagaki
发明人： Masataka Shiba , Ryuichi Funatsu , Motoya Taniguchi , Minoru Tanaka , Akira Inagaki
IPC分类号： G02F1/335 , G02B6/12 , G11B7/12
CPC分类号： G02B6/12004 , G11B7/1245
摘要： Disclosed is an information detecting system of scanning type which comprises a substrate formed with an optical waveguide layer, a laser oscillator emitting a laser beam, a SAW type beam deflecting device formed on the optical waveguide layer, a beam irradiating section irradiating a specimen with the laser beam derived from the optical waveguide layer, a controller controlling the frequency of a high-frequency voltage applied to the SAW type beam deflecting device so as to scan the specimen with the laser beam directed from the beam irradiating section, and a detecting section detecting the position and/or the intensity of the laser beam scanning the specimen with respect to the SAW control signal controlled by the controller.
摘要翻译：公开了一种扫描型信息检测系统，其包括形成有光波导层的基板，发射激光束的激光振荡器，形成在光波导层上的SAW型光束偏转装置，用该光波导层照射试样的光束照射部衍生自光波导层的激光束，控制施加到SAW型光束偏转装置的高频电压的频率的控制器，以便用从光束照射部分引导的激光束扫描样本;以及检测部分检测相对于由控制器控制的SAW控制信号扫描样本的激光束的位置和/或强度。

6. 发明授权

US07628667B2 Method for manufacturing display, display, and electronic device 失效
标题翻译：制造显示，显示和电子设备的方法
公开(公告)号：US07628667B2
公开(公告)日：2009-12-08
申请号：US11566817
申请日：2006-12-05
申请人： Akira Inagaki
发明人： Akira Inagaki
IPC分类号： H01J9/00
CPC分类号： G02F1/13394 , G02F1/1368
摘要： A method for manufacturing a display including a column spacer for controlling a distance between a switching element substrate and an opposed substrate opposed to the switching element substrate that includes: a bank film formation step for forming a bank film on the switching element substrate; a concave section formation step for selectively etching the bank film to form banks; a spacer formation step for selectively forming the bank film to form the column spacer; and a functional fluid placement step for placing functional fluid in a concave section between the banks.
摘要翻译：一种制造显示器的方法，包括用于控制开关元件基板和与开关元件基板相对的相对基板之间的距离的柱间隔件，该列间隔件包括：在开关元件基板上形成堤膜的堤形成膜步骤; 凹部形成步骤，用于选择性地蚀刻银膜以形成堤; 用于选择性地形成堤膜以形成柱间隔物的间隔物形成步骤; 以及功能流体放置步骤，用于将功能流体放置在堤之间的凹部中。

7. 发明申请

US20070009387A1 Chemical analysis apparatus and chemical analysis method 有权
标题翻译：化学分析仪器和化学分析方法
公开(公告)号：US20070009387A1
公开(公告)日：2007-01-11
申请号：US11522379
申请日：2006-09-18
申请人： Hajime Katou , Ryo Miyake , Hiroyasu Uchida , Katsuhiro Kambara , Takenori Okusa , Shigenori Watari , Yoichiro Suzuki , Tomonori Mimura , Miki Taki , Akira Inagaki
发明人： Hajime Katou , Ryo Miyake , Hiroyasu Uchida , Katsuhiro Kambara , Takenori Okusa , Shigenori Watari , Yoichiro Suzuki , Tomonori Mimura , Miki Taki , Akira Inagaki
IPC分类号： G01N33/00
CPC分类号： G01N35/1002 , B01F11/0283 , B01F2215/0037 , G01N35/025 , G01N2035/00554 , Y10S707/962 , Y10S707/99933 , Y10S707/99942 , Y10S707/99943 , Y10S707/99956
摘要： A chemical analysis apparatus in which a sample to be analyzed and a reagent are placed into a reaction container, and sound waves are irradiated to said reaction container so as to agitate them, wherein said chemical analysis apparatus comprises a piezoelectric element producing said sound waves, and drivers for driving said piezoelectric element, said sound waves being intermittently irradiated into said reaction container.
摘要翻译：一种化学分析装置，其中将待分析样品和试剂置于反应容器中，并且将声波照射到所述反应容器以搅拌它们，其中所述化学分析装置包括产生所述声波的压电元件，以及用于驱动所述压电元件的驱动器，所述声波被间歇地照射到所述反应容器中。

8. 发明授权

US5191778A Process for producing thin-webbed H-beam steel 失效
标题翻译：生产薄网H型钢的工艺
公开(公告)号：US5191778A
公开(公告)日：1993-03-09
申请号：US719122
申请日：1991-06-20
申请人： Akira Inagaki , Masao Kurokawa , Hiroyuki Hasegawa , Toshihiro Ishibashi , Hiroaki Hadano , Takeshi Hioki , Yoshimi Toriyama , Kazuo Fujita , Yasushi Takeshima , Teruyuki Wakatsuki , Yasushi Horiuchi
发明人： Akira Inagaki , Masao Kurokawa , Hiroyuki Hasegawa , Toshihiro Ishibashi , Hiroaki Hadano , Takeshi Hioki , Yoshimi Toriyama , Kazuo Fujita , Yasushi Takeshima , Teruyuki Wakatsuki , Yasushi Horiuchi
IPC分类号： C21D8/00 , C21D9/00
CPC分类号： C21D8/00 , C21D9/0068
摘要： A thin-webbed H-beam steel having a web thinner that flanges is produced by forcibly water cooling the outer surface of the flanges during an intermediate hot rolling prior to a final hot rolling by cooling to less than 700.degree. C., interrupting the cooling to return the temperature to greater than 700.degree. C., and repeating the cooling and interrupting in order to refine the microstructure of the surface of the flanges to a predetermined depth from the surface; final-hot rolling the intermediate-hot rolled H-beam steel; and forcibly water cooling the flanges of the final-hot rolled H-beam steel in a manner such that the web does not wave during this forcible water cooling, and such that upon completion of the forcible water cooling, thermal stress, generated in the web during air cooling to room temperature, does not exceed the buckling strength of the web.

9. 发明授权

US5191624A Optical information storing apparatus and method for production of optical deflector 失效
标题翻译：光学信息存储装置及其制造方法
公开(公告)号：US5191624A
公开(公告)日：1993-03-02
申请号：US762935
申请日：1991-09-19
申请人： Kenchi Ito , Kazumi Kawamoto , Naoya Kanda , Yasuo Hira , Hidemi Sato , Atsuko Fukushima , Masataka Shiba , Akira Inagaki , Minoru Yoshida
发明人： Kenchi Ito , Kazumi Kawamoto , Naoya Kanda , Yasuo Hira , Hidemi Sato , Atsuko Fukushima , Masataka Shiba , Akira Inagaki , Minoru Yoshida
IPC分类号： G02B6/12 , G02F1/335 , G11B7/12
CPC分类号： G02B6/12004 , G02F1/335 , G11B7/1245
摘要： An optical waveguide is comprised of an optical substrate and an optical thin-film optical waveguide layer and formed such that ##EQU1## where .theta. is an output angle, n.sub.o1 is an ordinary refractive index of the optical substrate for an ordinary beam, n.sub.e1 is an extraordinary refractive index of the optical substrate for an extraordinary beam, n.sub.o2 is an ordinary refractive index of the optical thin-film optical waveguide layer for the ordinary beam and n.sub.e2 is an extraordinary refractive index of the optical thin-film optical waveguide layer for the extraordinary beam, and an electrode for generating a surface acoustic wave for diffracting light is formed on the optical waveguide to construct a collinear optical deflector. A method for production of the optical thin-film optical waveguide layer is exemplified wherein a target made of tantalic lilthium niobate or tantalic lithium niobate magnesium and an optical substrate made of lithium tantalate are prepared and an optical thin-film optical waveguide layer having a composition of tantalic lithium niobate or tantalic lithium niobate magnesium is formed on the optical substrate through an ion beam sputtering process into which oxygen can be introduced. Proton substitutes for part of an element constituting the optical thin-film optical waveguide layer.
摘要翻译：光波导包括光学基板和光学薄膜光波导层，并且被形成为使得θ是输出角度的θIMA1是普通光束的光学基板的普通折射率，ne1是用于非常光束的光学基板的非常折射率，no2是普通光束的光学薄膜光波导层的普通折射率，ne2是非常优异的光学薄膜光波导层的非常折射率并且在光波导上形成用于产生用于衍射光的表面声波的电极，以构成共线的光学偏转器。制备光学薄膜光波导层的方法被制备，其中制备由钽酸铌酸锂或钽酸铌镁制成的靶和由钽酸锂制成的光学衬底，并且制备具有组成的光学薄膜光波导层通过可以引入氧气的离子束溅射工艺在光学基板上形成铌酸锂或钽酸铌酸镁。质子代替构成光学薄膜光波导层的元件的一部分。

10. 发明授权

US07892607B2 Multilayer film, electrooptic device, electronic apparatus, and process for forming multilayer film 失效
标题翻译：多层膜，电光装置，电子设备和用于形成多层膜的工艺
公开(公告)号：US07892607B2
公开(公告)日：2011-02-22
申请号：US11383016
申请日：2006-05-12
申请人： Hironori Hasei , Akira Inagaki
发明人： Hironori Hasei , Akira Inagaki
IPC分类号： B05D5/12 , B05D1/38 , B05D3/10
CPC分类号： H05K3/4664 , H05K3/125 , H05K3/245 , H05K2203/013 , H05K2203/1476
摘要： A process for forming a multilayer film includes (a) discharging a first functional liquid containing a first functional material on a substrate by a droplet discharge method to form a lower layer, (b) solidifying the first functional liquid on the substrate to form a solid lower layer containing the first functional material, (c) forming a liquid layer containing the first functional material on the solid lower layer, (d) discharging a second functional liquid containing a second functional material on the liquid layer and the solid lower layer by the droplet discharge method to form an upper layer, and (e) solidifying the liquid layer and the second functional liquid to form a solid upper layer.
摘要翻译：一种形成多层膜的方法包括：（a）通过液滴喷射法在基板上排出含有第一功能材料的第一功能性液体，形成下层，（b）使基材上的第一功能液固化，形成固体（c）在固体下层上形成含有第一功能材料的液体层，（d）在液体层和固体下层上排出含有第二功能材料的第二功能性液体，液滴喷射法形成上层，（e）固化液体层和第二功能液体以形成固体上层。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式