专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US4740693A Electron beam pattern line width measurement system 失效
标题翻译：电子束图案线宽测量系统
公开(公告)号：US4740693A
公开(公告)日：1988-04-26
申请号：US807681
申请日：1985-12-11
申请人： Yoshinori Nakayama , Shinji Okazaki , Hidehito Obayashi , Mikio Ichihashi
发明人： Yoshinori Nakayama , Shinji Okazaki , Hidehito Obayashi , Mikio Ichihashi
IPC分类号： G01S13/74 , G01B7/02 , G01B15/00 , H01J37/28 , G01B7/14
CPC分类号： H01J37/28 , G01B15/00 , G01B7/02
摘要： Disclosed is an electron beam pattern line width measurement system wherein an electron beam is converged to a fine spot, the electron beam is scanned on a sample formed with a pattern to-be-measured, secondary electrons generated from a surface of the sample by the projection of the electron beam are detected, and the detected signal is processed to determine a line width of the pattern to-be-measured, comprising a secondary electron detector which detects a signal corresponding to an amount of all secondary electrons generated by the scanning, and a secondary electron energy analyzer which selectively detects a signal corresponding to an amount of secondary electrons of specified energy. With the electron beam pattern line width measurement system, it becomes possible to precisely detect a pattern boundary region defined by different sorts of materials in a stepped structure of a small level difference not having been measurable with a prior-art electron beam pattern line width measurement system.
摘要翻译：公开了一种电子束图案线宽度测量系统，其中电子束会聚到细微点，电子束在形成有要测量图案的样品上扫描，从样品表面产生的二次电子被检测电子束的投影，并且处理检测信号以确定要测量的图案的线宽，包括二次电子检测器，其检测对应于由扫描产生的所有二次电子的量的信号，以及二次电子能量分析器，其选择性地检测与特定能量的二次电子量对应的信号。利用电子束图案线宽度测量系统，可以精确地检测由现有技术的电子束图案线宽度测量不能测量的小电平差的阶梯式结构中由不同种类的材料限定的图案边界区域系统。

2. 发明授权

US06282611B1 Digital information system, digital audio signal processor and signal converter 失效
公开(公告)号：US06282611B1
公开(公告)日：2001-08-28
申请号：US08446278
申请日：1995-05-22
申请人： Nobuo Hamamoto , Minoru Nagata , Masatoshi Ohtake , Katsutaka Kimura , Toshio Sasaki , Hiroshi Kishida , Isamu Orita , Katsuro Sasaki , Naoki Ozawa , Kazuhiro Kondo , Toshiaki Masuhara , Tadashi Onishi , Hidehito Obayashi , Kiyoshi Aiki , Hisashi Horikoshi
发明人： Nobuo Hamamoto , Minoru Nagata , Masatoshi Ohtake , Katsutaka Kimura , Toshio Sasaki , Hiroshi Kishida , Isamu Orita , Katsuro Sasaki , Naoki Ozawa , Kazuhiro Kondo , Toshiaki Masuhara , Tadashi Onishi , Hidehito Obayashi , Kiyoshi Aiki , Hisashi Horikoshi
IPC分类号： G06F1200
CPC分类号： G07F7/1008 , G07F17/16 , H02J7/0063
摘要： In a digital information system for realizing the sale of information or the like having a commercial value in the form of a digital signal, and an audio processor, and signal processor suitably used with the system, when a digital signal is received/delivered, a digital signal source is connected directly to a player for receiving and storing a specified information, which is reproduced by the player independently. A voice interval of a digital audio signal is processed to realize the slow and fast playback. The system includes a data compressor and a data extender of simple configuration. The value of the digital signal received/delivered can be exhibited directly. A selling system is constructed easily, and the player is simple in configuration and easy to operate by anyone. The fast and slow playback are possible without deteriorating the sound quality, and ripples can be greatly reduced against the digital input signal, thereby making possible a faithful data compression of an acoustic signal or the like by a simple configuration. The self-diagnosis function permits the use of a defective memory chip, thereby leading to a very economical system.

3. 发明授权

US4367269A Solid electrolyte 失效
标题翻译：固体电解质
公开(公告)号：US4367269A
公开(公告)日：1983-01-04
申请号：US201766
申请日：1980-10-29
申请人： Ryo Nagai , Hidehito Obayashi , Akira Gotoh , Tetsuichi Kudo
发明人： Ryo Nagai , Hidehito Obayashi , Akira Gotoh , Tetsuichi Kudo
IPC分类号： C01B21/083 , G02F1/15 , H01M6/18
CPC分类号： C01B21/083 , G02F1/1525 , H01M6/18
摘要： A lithium-ionic-conductive solid electrolyte consisting of lithium iodide and lithium nitride. It has the feature that the lithium ionic conductivity is higher than in prior-art solid electrolytes, and such feature becomes more remarkable when lithium hydroxide is added.
摘要翻译：由碘化锂和氮化锂组成的锂离子导电固体电解质。其特征在于锂离子电导率高于现有技术的固体电解质，当添加氢氧化锂时，其特征变得更加显着。

4. 发明授权

US4323381A Method for producing mother rods for optical fibers 失效
标题翻译：光纤母棒的制造方法
公开(公告)号：US4323381A
公开(公告)日：1982-04-06
申请号：US169638
申请日：1980-07-17
申请人： Iwao Matsuyama , Kenzo Susa , Tsuneo Suganuma , Shin Satoh , Toshio Katsuyama , Hidehito Obayashi
发明人： Iwao Matsuyama , Kenzo Susa , Tsuneo Suganuma , Shin Satoh , Toshio Katsuyama , Hidehito Obayashi
IPC分类号： C03B8/02 , C03B37/014 , C03B37/016 , G02B6/00 , C03B5/16
CPC分类号： C03B37/016 , C03B2201/10 , Y10S65/901
摘要： A process for producing a mother rod useful for the production of an optical fiber which comprises hydrolyzing a silicon alkoxide to prepare a gel of a desired shape, and drying and sintering the gel to produce a block made of a silica glass. The process has the advantages that it is well adapted for mass-production, that a glass made of a B.sub.2 O.sub.3 --SiO.sub.2 system may be produced thereby and that a glass block of arbitrary shape may be readily produced.
摘要翻译：一种制造用于生产光纤的母棒的方法，包括水解硅醇盐以制备所需形状的凝胶，以及干燥和烧结凝胶以制备由石英玻璃制成的块。该方法的优点是适于批量生产，因此可以生产由B2O3-SiO2体系制成的玻璃，并且可以容易地生产任意形状的玻璃块。

5. 发明授权

US4044601A Smoke and gas sensor element 失效
标题翻译：烟雾和气体传感器元件
公开(公告)号：US4044601A
公开(公告)日：1977-08-30
申请号：US600052
申请日：1975-07-29
申请人： Yo Sakurai , Hidehito Obayashi , Tetsuo Gejyo
发明人： Yo Sakurai , Hidehito Obayashi , Tetsuo Gejyo
IPC分类号： G01N27/12
CPC分类号： G01N27/12
摘要： A sensor element for detecting smoke and/or reducing gases, which comprises a shaped body formed from a material consisting essentially of:A. a complex metal oxide having a perovskite type crystal structure and represented by the general formula ABO.sub.3-.delta. wherein A is at least one element selected from the group consisting of yttrium, a rare earth element having an atomic number of from 57 to 71 and an alkaline earth metal, B is at least one element selected from the group consisting of transition metals having atomic numbers from 21 to 30, O is oxygen and .delta. is a nonstoichiometric parameter which may vary from 0 to 0.25 andB. at least one metal oxide selected from the group consisting of CdO, In.sub.2 O.sub.3, SnO, Tl.sub.2 O.sub.3 and PbO.
摘要翻译：一种用于检测烟雾和/或还原气体的传感器元件，包括由主要由以下组成的材料形成的成形体：

6. 发明授权

US3953173A Gas-sensor element and method for detecting oxidizable gas 失效
标题翻译：气体传感器元件和可氧化气体检测方法
公开(公告)号：US3953173A
公开(公告)日：1976-04-27
申请号：US376717
申请日：1973-07-05
申请人： Hidehito Obayashi , Tetsuo Gejyo , Tetsuichi Kudo
发明人： Hidehito Obayashi , Tetsuo Gejyo , Tetsuichi Kudo
IPC分类号： G01N27/12 , G01N27/04 , H01C13/00
CPC分类号： G01N27/12 , Y10T436/200833 , Y10T436/204165 , Y10T436/205831
摘要： A gas-sensor element for detecting oxidizable gases and vapors such as alcohols for carbon monoxide, which is characterized by comprising a complex metal oxide having the K.sub.2 MgF.sub.4 -type crystal structure and represented by the general formula A.sub.2-x A'.sub.x BO.sub.4-.sub..delta., wherein A is at least one element selected from the group consisting of rare earth elements of the atomic numbers from 57 to 71, yttrium, and hafnium, A' is at least one element selected from the group consisting of alkaline earth metals and lithium, B is at least one element selected from the group consisting of transition elements of the atomic numbers from 21 to 30, 0 is oxygen, x is in the range of 0.ltoreq.x.ltoreq.2, and .delta. is a nonstoichiometric parameter.
摘要翻译：一种气体传感器元件，用于检测可氧化气体和蒸气如一氧化碳的醇类，其特征在于包含具有K2MgF4型晶体结构并由通式A2-xA'xBO4-δ表示的复合金属氧化物，其中A 是选自57〜71的原子序数的稀土元素，钇和铪中的至少一种元素，A'是选自碱土金属和锂的至少一种元素，B在从由21至30的原子序数的过渡元素组成的组中选择的至少一种元素是氧，x在0≤x≤2的范围内，δ是非化学计量参数。

7. 发明授权

US4788698A X-ray exposure system 失效
标题翻译： X射线曝光系统
公开(公告)号：US4788698A
公开(公告)日：1988-11-29
申请号：US28024
申请日：1987-03-17
申请人： Takeshi Kimura , Kozo Mochiji , Shojiro Asai , Hidehito Obayashi
发明人： Takeshi Kimura , Kozo Mochiji , Shojiro Asai , Hidehito Obayashi
IPC分类号： G03F7/20 , G21K5/00
CPC分类号： G03F7/70008 , G03F7/70991
摘要： An X-ray exposure system including a plurality of X-ray exposure apparatuses each for duplicating a mask pattern on a semiconductor wafer by irradiating an X-ray mask and the semiconductor wafer with synchrotron radiation is disclosed in which a synchrotron radiation path branching device including a reflecting mirror is disposed between a synchrotron ring and the X-ray exposure apparatuses, and the propagation direction of the synchrotron radiation emitted from the synchrotron ring is changed by the reflecting mirror so that the synchrotron radiation from the ring can be introduced into each of the X-ray exposure apparatuses.
摘要翻译：公开了一种X射线曝光系统，其包括多个X射线曝光装置，每个X射线曝光装置用于通过用同步加速器辐射照射X射线掩模和半导体晶片来复制半导体晶片上的掩模图案，其中同步加速器辐射路径分支装置包括在同步加速器环和X射线曝光装置之间设置反射镜，并且由反射镜改变从同步加速器环发射的同步加速器辐射的传播方向，使得可以将来自环的同步加速器辐射导入 X射线曝光装置。

8. 发明授权

US4514857A X-Ray lithographic system 失效
标题翻译： X光光刻系统
公开(公告)号：US4514857A
公开(公告)日：1985-04-30
申请号：US541447
申请日：1983-10-13
申请人： Takashi Kimura , Kozo Mochiji , Hidehito Obayashi
发明人： Takashi Kimura , Kozo Mochiji , Hidehito Obayashi
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30 , H05G2/00 , G21K5/00
CPC分类号： G03F7/70075 , H01L21/30
摘要： While a convex mirror is being rotated or rotatingly vibrated about a rotational axis which is parallel to the center axis of the convex mirror and which is eccentric to the convex mirror, a synchrotron radiation flux is caused to be incident on the convex mirror, and a radiation sensitive resist film is irradiated with the reflected radiation flux through a mask.Thus, an area of uniform irradiation can be increased remarkably as compared with that in a prior art, and the invention is well suited to the irradiation of a semiconductor wafer having a large area.
摘要翻译：当凸面镜绕着平行于凸面镜的中心轴并且与凸面镜偏心的旋转轴线旋转或旋转振动时，使同步加速器辐射通量入射到凸面镜上，并且辐射敏感抗蚀剂膜通过掩模用反射辐射通量照射。因此，与现有技术相比，均匀照射的面积可以显着增加，本发明非常适合于具有大面积的半导体晶片的照射。

9. 发明授权

US4411971A Lithium compounds 失效
标题翻译：锂化合物
公开(公告)号：US4411971A
公开(公告)日：1983-10-25
申请号：US371798
申请日：1982-04-26
申请人： Akira Gotoh , Hidehito Obayashi , Ryo Nagai , Shouji Mochizuki , Tetsuichi Kudo
发明人： Akira Gotoh , Hidehito Obayashi , Ryo Nagai , Shouji Mochizuki , Tetsuichi Kudo
IPC分类号： C01B21/092 , H01B1/06 , H01G9/02 , H01G9/025 , H01M6/18
CPC分类号： H01G9/025 , C01B21/092 , H01M6/18 , Y10T428/24769
摘要： This invention relates to lithium compounds composed of a lithium halide and lithium imide. The compounds are high in lithium ionic conductivity and are used as solid electrolytes. Particularly excellent ones of the lithium compounds are those represented by the general formula:yLi.sub.2 NH.(1-y)LiXwhere X represents Cl, Br or I and y denotes the molar fraction of lithium imide ranging from about 0.35 to about 0.98 when X is chlorine, from about 0.25 to about 0.35 when X is bromine or from about 0.33 to about 0.75 when X is iodine.
摘要翻译：本发明涉及由卤化锂和酰亚胺组成的锂化合物。该化合物的锂离子电导率高，用作固体电解质。特别优选的锂化合物是由以下通式表示的那些：yLi2NH（1-y）LiX其中X表示Cl，Br或I，y表示当X为约0.35至约0.98时，酰亚胺的摩尔分数为约0.35至约0.98 氯，X为溴时约0.25至约0.35，X为碘时为约0.33至约0.75。

10. 发明授权

US5389198A Structure and method of manufacturing the same 失效
标题翻译：其制造方法及结构
公开(公告)号：US5389198A
公开(公告)日：1995-02-14
申请号：US763519
申请日：1991-09-23
申请人： Akira Koide , Kazuo Sato , Seiko Suzuki , Norio Ichikawa , Hidehito Obayashi , Masahide Hayashi
发明人： Akira Koide , Kazuo Sato , Seiko Suzuki , Norio Ichikawa , Hidehito Obayashi , Masahide Hayashi
IPC分类号： G01P15/125 , B81B3/00 , H01L21/306 , H01L21/308 , H01L29/84 , H01L21/00
CPC分类号： H01L21/30608 , H01L21/3086 , G01P2015/0828
摘要： A method of manufacturing structures such as a pressure gauge, an accelerometer and the like with a single crystal material such as silicon uses etching techniques where the shape of a part subjected to stress concentration has a curvature, another part is formed in a plane body and a polyhedron is constituted by combining both.To attain the above constitution, a wafer of single crystal material is formed with a stepped surface having a value corresponding to at least the depth of the curvature in a first anisotropic etching process using a prescribed etching mask, and in a second anisotropic etching process, an etching mask is used by removing at least a part of the etching mask used in the first anisotropic etching process.
摘要翻译：使用诸如硅的单晶材料制造诸如压力计，加速度计等的结构的方法使用蚀刻技术，其中经受应力集中的部分的形状具有曲率，另一部分形成在平面体中，多面体是通过组合两者构成的。为了实现上述结构，在使用规定的蚀刻掩模的第一各向异性蚀刻工艺中，形成具有至少与曲率深度相对应的值的阶梯面的单晶材料晶片，在第二各向异性蚀刻工艺中，通过去除在第一各向异性蚀刻工艺中使用的蚀刻掩模的至少一部分来使用蚀刻掩模。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式